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    • 1. 发明专利
    • 異物検出方法、インプリント方法及びインプリントシステム
    • 外部事物检测方法,印刷方法和印刷系统
    • JP2015028978A
    • 2015-02-12
    • JP2013157467
    • 2013-07-30
    • 大日本印刷株式会社Dainippon Printing Co Ltd
    • ARITSUKA YUKIHIRABAYASHI MASASHI
    • H01L21/027B29C59/02
    • 【課題】基板上にインプリント樹脂とともに供給されてしまう異物を検出し、異物の存在による転写欠陥やインプリントモールドの破損等を防止することのできる異物検出方法、当該異物検出方法を利用したインプリント方法及びインプリントシステムを提供する。【解決手段】インプリント材料に含まれる異物を検出する異物検出方法は、第1の基板の主面上の異物を検出し、検出した異物に関する情報を含む第1の基板情報を取得する工程と、第1の基板の主面にインプリント材料を供給する工程と、インプリント材料を硬化させ、第1の基板の主面上に前記硬化したインプリント材料の硬化物を形成する工程と、硬化物に含まれる異物を検出し、検出した異物に関する情報を含む硬化物情報を取得する工程と、硬化物情報から第1の基板情報を除き、インプリント材料に含まれる異物に関する情報を取得する工程とを含む。【選択図】図1
    • 要解决的问题:为了提供能够检测与压印树脂一起提供到基板上的异物并防止由于异物的存在而导致的印模的转印缺陷和断裂等的异物检测方法, 使用异物检测方法的印记方法和印记系统。解决方案:用于检测包含在压印材料中的异物的异物检测方法包括以下步骤:检测第一基底的主表面上的异物和 获取包含与检测到的异物有关的信息的第一基底信息; 将压印材料供应到第一基板的主表面; 通过固化所述压印材料在所述第一基板的主表面上形成所述压印材料的固化产物; 检测包含在固化产物中的异物并获取包含与检测到的异物有关的信息的固化产品信息; 以及从所述固化产品信息中去除所述第一基板信息并且获取与所述压印材料中包含的异物有关的信息。
    • 2. 发明专利
    • Acceleration sensor
    • 加速传感器
    • JP2009243916A
    • 2009-10-22
    • JP2008087517
    • 2008-03-28
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • HIRABAYASHI MASASHI
    • G01P15/12G01P15/18H01L29/84
    • PROBLEM TO BE SOLVED: To provide a small acceleration sensor which prevents defective electrical contact between and wiring conductors and piezoresistance elements. SOLUTION: This acceleration sensor includes a frame section having openings, weight sections arranged in the openings of the frame section, at least a pair of beam sections connecting the frame section and each weight section, detection sections formed in the beam sections and arranged respectively in regions where one-side ends of the beam sections are connected to the frame section, and in regions where the other ends of the beam sections are connected to the weight sections, a plurality of terminal sections formed extending from at least one-side ends of the detection sections, insulating layers which are on the beam sections and cover at least parts of the detection sections, at least one contact hole formed by opening each insulating layer, and wiring conductors for electrically connecting to the terminal sections through those contact holes. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种小型加速度传感器,其防止和布线导体与压阻元件之间的电接触不良。 解决方案:该加速度传感器包括具有开口的框架部分,布置在框架部分的开口中的加权部分,连接框架部分和每个加权部分的至少一对梁部分,形成在梁部分中的检测部分和 分别布置在梁部分的一侧端部连接到框架部分的区域中,以及在梁部分的另一端连接到配重部分的区域中,形成有多个端子部分, 检测部分的侧端,在梁部分上的绝缘层,并且覆盖检测部分的至少一部分,通过打开每个绝缘层形成的至少一个接触孔,以及通过那些接触电连接到端子部分的布线导体 孔。 版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • Pattern forming apparatus by nano-imprint mold
    • 由NANO-IMPRINT模具形成的图案
    • JP2014195088A
    • 2014-10-09
    • JP2014091360
    • 2014-04-25
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • HIRABAYASHI MASASHIARITSUKA YUKI
    • H01L21/027B29C59/02
    • PROBLEM TO BE SOLVED: To provide a pattern forming method that prevents resin or a mold from being broken when a nano-imprint mold is released from the resin.SOLUTION: A pattern forming apparatus by nano-imprint for controlling an amount of light radiated to a transfer substrate stage by moving plural movable members 501, 502 comprises: a mold chuck for holding a mold; a transfer substrate stage on which a transfer substrate is arranged; a light source arranged on at least any one of a mold chuck side and a transfer substrate side, and radiating light to the transfer substrate arranged on the transfer substrate stage; and an aperture 500 arranged between the light source and the transfer substrate stage and constituted by the plural movable members 501, 502.
    • 要解决的问题:提供当从树脂中释放纳米压印模具时防止树脂或模具破裂的图案形成方法。解决方案:通过纳米压印的图案形成装置,用于控制辐射到 通过移动多个可移动部件501,502的转印基板台包括:用于保持模具的模具卡盘; 其上配置有转印基板的转印基板台; 设置在模具卡盘侧和转印基板侧的至少任一个上的光源,并且向配置在转印基板台上的转印基板照射光; 以及布置在光源和转印衬底台之间并由多个可动构件501,502构成的孔500。
    • 4. 发明专利
    • Liquid cartridge for atomization device, liquid cartridge package, atomization device, and container with mesh for atomization device
    • 用于原型装置的液体盒,液体包装盒,成型装置和带有用于成型装置的MES的容器
    • JP2013255693A
    • 2013-12-26
    • JP2012133707
    • 2012-06-13
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • ARITSUKA YUKINAGANUMA HIROYUKIFUJITA HIROSHINAKATA NAOKOHIRABAYASHI MASASHIISHIKAWA KOJI
    • A61H33/12
    • PROBLEM TO BE SOLVED: To provide a liquid cartridge for an atomization device, which makes a mesh member used in the atomization device replaceable, and enables a mesh member and a container part to be firmly fixed inside the atomization device.SOLUTION: A liquid cartridge 100 includes a container part 110 having a liquid housing part 112 and a flange part 114, and a mesh member 120 disposed on the flange part 114 so as to cover the opening of the liquid housing part 112. In the mesh member 120, a plurality of through-holes 122 are formed in an area where the opening of the liquid housing part 112 is present, and a liquid 130 is housed in the liquid housing part 112 of the container part 110. When the container part 110 and the mesh member 120 are incorporated in an atomization device 1000, by the fixing member 1080 of the atomization device 1000, the flange part 114 of the container part 110 and the outer periphery of the mesh member 120 are bent and both are joined to each other.
    • 要解决的问题:提供一种用于雾化装置的液体盒,其使得在雾化装置中使用的网状构件可更换,并且能够将网状构件和容器部牢固地固定在雾化装置内。溶液:液体盒 100包括具有液体容纳部分112和凸缘部分114的容器部分110以及设置在凸缘部分114上以覆盖液体容纳部分112的开口的网状部件120.在网状部件120中,多个 的通孔122形成在存在液体容纳部分112的开口的区域中,并且液体130容纳在容器部分110的液体容纳部分112中。当容器部分110和网状部件120 通过雾化装置1000的固定构件1080,容器部110的凸缘部114和网状构件120的外周弯曲并且彼此接合,并入雾化装置1000中。
    • 5. 发明专利
    • Pattern formation method, nanoimprint mold and transfer base for nanoimprint
    • 图案形成方法,NANOIMPRINT模具和NANOIMPRINT的转移基座
    • JP2012044019A
    • 2012-03-01
    • JP2010184683
    • 2010-08-20
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • HIRABAYASHI MASASHIARITSUKA YUKI
    • H01L21/027B29C33/38B29C33/42B29C59/02
    • PROBLEM TO BE SOLVED: To provide a pattern formation method ensuring the resin filling performance in the pattern of a mold and the mold releasability from a resin layer, and to provide a nanoimprint mold and a transfer base for nanoimprint each for use in nanoimprint transfer using the pattern formation method.SOLUTION: A nanoimprint mold 1 comprises a substrate 2, a transfer shape part 3 located on one surface 2a of the substrate 2, and a wettability change layer 4 located at least on the transfer shape part 3. A decrease in contact angle to water due to irradiation with light of a first wavelength and an increase in contact angle to water due to irradiation with light of a second wavelength occur reversibly in the wettability change layer 4.
    • 要解决的问题:提供确保模具图案中的树脂填充性能和树脂层的脱模性的图案形成方法,并且提供纳米压印模具和用于纳米压印的转印基底,用于 纳米压印使用图案形成方法。 解决方案:纳米压印模具1包括基板2,位于基板2的一个表面2a上的转印形状部分3和至少位于转印形状部分3上的润湿性变化层4.接触角降低 由于由于第二波长的光的照射而导致的第一波长的光的照射和与水的接触角的增加而引起的水分会在润湿性变化层4中可逆地发生。(C)2012,JPO&INPIT
    • 7. 发明专利
    • Liquid cartridge for spray device, liquid cartridge package, spray device, and mesh container for spray device
    • 用于喷雾装置的液体盒,液体包装盒,喷雾装置和喷雾装置的网箱
    • JP2013118952A
    • 2013-06-17
    • JP2011268194
    • 2011-12-07
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • FUJITA HIROSHINAKATA NAOKONAGANUMA HIROYUKIISHIKAWA KOJIHIRABAYASHI MASASHI
    • A61H33/12
    • PROBLEM TO BE SOLVED: To provide a liquid cartridge capable of enhancing the convenient properties of a spray device by making the mesh used in the spray device replaceable, enabling a user to arbitrarily altering a liquid used in the spray device and enabling a user to optionally alter a liquid used in the spray device.SOLUTION: The liquid cartridge 100 includes a container part 110 having a liquid housing part 112 opened at one end thereof and a mesh member 120 arranged on one end side of the container part 110 so as to cover the opening of the liquid housing part 112. The mesh member 120 has a plurality of through-holes 122 and the plurality of the through-holes 122 are positioned in the region where the openings of the liquid housing part 112 are present. A liquid 130 is housed in the liquid housing part 112. By mounting the liquid cartridge 100 in the spray device 1,000, a mist-like liquid 130 is sprayed from the plurality of the through-holes 122.
    • 要解决的问题:为了提供能够通过使喷雾装置中使用的网格可更换来增强喷雾装置的便利性能的液体盒,使得使用者能够任意地改变喷雾装置中使用的液体并使能 用户可选地改变在喷雾装置中使用的液体。 解决方案:液体盒100包括:容器部分110,其具有在其一端开口的液体容纳部分112和布置在容器部分110的一端侧上的网眼部件120,以便覆盖液体壳体的开口 网状构件120具有多个通孔122,并且多个通孔122位于存在液体容纳部112的开口的区域中。 液体容纳在液体容纳部分112中。通过将液体暗盒100安装在喷射装置1000中,从多个通孔122喷射雾状液体130.(C) 2013年,JPO&INPIT
    • 10. 发明专利
    • Dynamic quantity sensor, method for manufacturing the same, and electronic apparatus using the same
    • 动态数量传感器,其制造方法和使用该电子设备的电子设备
    • JP2010281776A
    • 2010-12-16
    • JP2009137082
    • 2009-06-08
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • HIRABAYASHI MASASHI
    • G01P15/12G01P15/18H01L29/84
    • PROBLEM TO BE SOLVED: To prevent breakage of a flexible portion by alleviating an impact upon collision caused by an excessive displacement of a weight portion and to prevent a degradation in reliability of a detection signal by preventing deformation to a metal wire.
      SOLUTION: The dynamic quantity sensor includes: a semiconductor substrate having a frame portion, a weight portion disposed inside the frame portion, and a flexible portion for connecting the weight portion with the frame portion; a plurality of sensor elements formed at the flexible portion; a plurality of electric wires which are attached on the top of the weight portion and for electrically connecting the plurality of sensor elements with a plurality of connection terminals; a cap substrate for covering the tops of the flexible portion attached with the plurality of sensor elements, the plurality of wired flexible portions and the weight portion; and a buffering member which is disposed either or both of the weight portion side and the cap substrate side and alleviating an impact caused by an excessive displacement of the weight portion.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:通过减轻由于重量部分的过度位移引起的碰撞造成的碰撞来防止柔性部分的破坏,并且通过防止金属丝变形来防止检测信号的可靠性的劣化。 解决方案:动态量传感器包括:具有框架部分的半导体衬底,设置在框架部分内部的配重部分和用于将重量部分与框架部分连接的柔性部分; 形成在柔性部分的多个传感器元件; 多个电线,其安装在所述配重部分的顶部并且用于使所述多个传感器元件与多个连接端子电连接; 用于覆盖附接有多个传感器元件的柔性部分的顶部,多个有线柔性部分和重量部分的盖基板; 以及缓冲构件,其配置在所述重量部分侧和所述盖基板侧之一或两者处,并且减轻由所述重物部分的过度位移引起的冲击。 版权所有(C)2011,JPO&INPIT