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1. 发明专利

JP2002154054A ATTACHING MECHANISM FOR CUTTING BLADE 失效
公开(公告)号：JP2002154054A
公开(公告)日：2002-05-28
申请号：JP2000350840
申请日：2000-11-17
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B24B45/00 , B23Q3/12 , B24D5/16 , H01L21/301 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide an attaching mechanism for a cutting blade capable of preventing fall-off of the cutting blade by ensuring a holding force of the cutting blade regardless of a rotating direction of the rotary shaft, without requiring an exclusive tool nor skill for attaching/detaching the cutting blade. SOLUTION: This attaching mechanism for attaching to a rotary shaft 42, the cutting blade 43 having a base 431 provided with an engaging hole 433 in a central portion thereof and a cutting edge 432 arranged on an outer periphery of the base, is provided with a mounter flange 50 arranged on a front end portion of the rotary shaft and having a supporting portion 51 engaging with an engaging hole 433 of the base, and a flange 52 formed protrusively in a radial direction from a rear end of the supporting portion and provided with an attaching surface on a front surface thereof. The mounter flange 50 is provided with a suction passage 502 opening to the attaching surface.

2. 发明专利

JP2000046054A AIR SPINDLE AND DICING DEVICE 失效
公开(公告)号：JP2000046054A
公开(公告)日：2000-02-15
申请号：JP21239298
申请日：1998-07-28
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23Q11/00 , B23Q3/12 , B23Q5/04 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To prevent contaminant from intruding to between a spindle housing and a rotary shaft in the machining process which involves much generation of contaminant, prevent generation of a difference in the air pressure which forms an air seal, and eliminate bothering blowout sounds generated when a large quantity of air is blown out. SOLUTION: An air spindle to be mounted in a machining device is composed of a rotary shaft 4, air bearings 2 and 3 to support the rotary shaft 4 pneumatically both in the radial and thrust directions, and a spindle housing 1 including air seal groove 11 to seal the periphery of the rotary shaft 4. The air seal groove 11 is furnished with two or more air supply passages 10a for supplying the air in communication with one another.

3. 发明专利

JPH11216643A DISLOCATION PREVENTIVE METHOD OF ACTION ELEMENT, AND CUTTING APPARATUS 失效
公开(公告)号：JPH11216643A
公开(公告)日：1999-08-10
申请号：JP2066098
申请日：1998-02-02
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23Q15/18 , B23Q3/12 , H01L21/301
摘要： PROBLEM TO BE SOLVED: To prevent the deviation of an action element by allowing an expansion/contraction member to be thermally expanded by the same quantity in the opposite direction when a member to constitute a support part is thermally expanded, and moving the action element in the opposite direction. SOLUTION: In a cutting means 12 of a cutting apparatus, the coefficient of thermal expansion of a rotary spindle 22, and the expansion of a thrust bearing 24 can be expressed by (K×L), and (T×M), respectively where L is the length from a fitting surface 32 of the thrust bearing 24 to a circular blade 21, K is the coefficient of linear expansion of the rotary spindle 22, M is the coefficient of linear expansion of a member to constitute the thrust bearing 24, and T is the thickness of the thrust bearing 24. If the relationship of (K×L=T×M) is established, the expansion of the rotary spindle 22 can be completely canceled by the expansion of the thrust bearing 24. Thus, the thickness T of the thrust bearing 24 may be set so as to establish the relationship of (T=K×L/M), and the position of the action element is kept constant, and not affected by the heat.

4. 发明专利

JPH0929627A BLADE MOUNTING AND DEMOUNTING MECHANISM OF CUTTING DEVICE 失效
公开(公告)号：JPH0929627A
公开(公告)日：1997-02-04
申请号：JP19926895
申请日：1995-07-13
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23B31/20 , B23B31/02 , B24B45/00 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To conduct an accurate cutting without oscillating an circular blade even if a spindle is rotated at high speed during operation by enabling the blade to be fixed when the outer dia. of cylinrical form of a blade mounting and demounting part of the spindle is enlarged after the enlarged member is pulled in the blade mounting and demounting part while the blade is fitted therein. SOLUTION: In mounting a blade 4, first high pressure air is fed into a cylinder part 1a from a ventilation port Q to move a piston 8 forward and a dia.-incresed member 6 is pushed ahead against a coil spring T. Next, the blade 4 is fitted in a blade mounting and demounting part 2b and received by a flange part 2a, a switching valve 9 is changed over and high pressure air is fed from a ventilation port P to move the piston 8 rearward, and then the member 6 is pushed back rearward by the resuming force of the spring 1. At this time, since the outer dia. of the part 2b is made large due to the expanding action of a part 2d, the part 2b is brought into close contact with the inner edge of the fitting hole 4a of the blade 4, whereby the blade can be fixed without looseness.

5. 发明专利

JP2001054805A CUTTING TOOL MOUNTING MECHANISM FOR CUTTING DEVICE 失效
公开(公告)号：JP2001054805A
公开(公告)日：2001-02-27
申请号：JP23223099
申请日：1999-08-19
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23B31/02
摘要： PROBLEM TO BE SOLVED: To install a cutting tool with its rotational center matched with that of a tool mounting part in a fixing flange installed to a rotational spindle by fitting a mounting hole of the cutting tool around the outer circumference of an annular spring member fitted in the tool mounting part. SOLUTION: An annular spring member 60 having an inner circumferential face to be fitted in a tool mounting part 573 in a second fixing flange 572 is provided with a plurality of spring parts 62 on the radial outside. The spring member 60 is forcibly fitted in the tool mounting part 573 so that the fixing flange 572 is installed to a rotational spindle 56 through a fitting hole 572a, and a mounting hole 541a in a blade supporting member 541 is fitted around a mounting part 622 in the spring member 60 for installing a cutting tool 54. In this process, the dimension of the mounting hole 541a is set to be larger than the outside diameter in the width directional both ends of the mounting part 622 and slightly smaller than the central part outside diameter, so that the mounting part 622 is resiliently deformed and shrunk for bringing the central part outer circumferential face of the mounting part 622 and the inner circumferential face of the mounting hole 541 into tight contact mutually, and consequently, the rotation center of the rotational spindle 56 and that of the cutting tool 54 can be matched with each other.

6. 发明专利

JPH07208474A AIR SPINDLE AND DEVICE MOUNTED THEREWITH 失效
公开(公告)号：JPH07208474A
公开(公告)日：1995-08-11
申请号：JP1492094
申请日：1994-01-14
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23Q5/10 , B23B19/02 , B24B41/04 , F16C32/06
摘要： PURPOSE:To realize accurate machining with heating quantity reduced without exerting thermal deformation on a spindle by using a synchronous motor as a drive source. CONSTITUTION:A synchronous motor 3 has a rotor 3a and a stator 3b to high speedily rotate a spindle 2 via the rotor 3a. In the synchronous motor 3, heating quantity at the time of high speed rotation is very little and the temperature rise of a spindle housing 1 is hardly seen. In a cutting device where in a rotary blade is attached to the tip of the spindle 2, since the slip of the spindle 2 is restrained to the utmost even when a cutting load is increased, torque does not become unstable. Consequently, the machining accuracy of a precision cutting device and a precision grinding device, etc., on which this air spindle is mounted can be improved.

7. 发明专利

JP2001129743A ROTATIONAL BALANCE ADJUSTING MECHANISM OF CUTTING DEVICE 失效
公开(公告)号：JP2001129743A
公开(公告)日：2001-05-15
申请号：JP2000243613
申请日：2000-08-11
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B23Q11/00 , H01L21/301
摘要： PROBLEM TO BE SOLVED: To provide a rotational balance adjusting mechanism of a cutting device capable of easily and finely adjusting the balance without using plural kinds of balance weights. SOLUTION: In this rotary balance adjusting mechanism of a cutting device comprising a spindle unit having a rotary spindle, a fixed flange having a tool mounting part on its outer periphery mounted on a point of the rotary spindle, an annular cutting tool having a mounting hole fittable to the tool mounting part of the fixed flange, and a holding flange for holding the cutting tool with the fixed flange, at least two threaded holes are radially formed on an outer periphery of the holding flange or the fixed flange, and screws for balance weight are movably fitted on the threaded holes.

8. 发明专利

JPH11214334A BLADE SET-UP SYSTEM 失效
公开(公告)号：JPH11214334A
公开(公告)日：1999-08-06
申请号：JP1674298
申请日：1998-01-29
申请人： DISCO ABRASIVE SYSTEMS LTD
发明人： WAKITA NOBUHIKO
IPC分类号： B28D5/02 , H01L21/301
摘要： PROBLEM TO BE SOLVED: To avoid detection errors due to a reference position detection sensor for detecting the reference position of a blade based on a threshold in a blade set-up system for a precision cutting apparatus, in which the sensor is formed of a light-emitting element and a light-receiving element. SOLUTION: A blade set-up system 25 is for setting up a blade 3 of a precision cutting apparatus such as a dicing equipment. The system 25 is constituted of a light-emitting section and a light-receiving section. The light-emitting section emits a laser beam having a diameter of 0.01 mm or smaller. Thus, the system 25 allows the reference position of the blade 3 to be detected at the instance when the light is completely blucked. As a result, even if contaminants and water droplets are deposited on the blade, mis-detections such as detection of thresholds can be eliminated, and thus the reference position can be detected with high accuracy.

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