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1. 发明专利

JP2012020395A Method of manufacturing device provided with fluid-encapsulating membrane 有权
标题翻译：用流体包封膜制造装置的方法
公开(公告)号：JP2012020395A
公开(公告)日：2012-02-02
申请号：JP2011152957
申请日：2011-07-11
申请人： Commissariat A L'energie Atomique & Aux Energies Alternatives , コミッサリアアレネルジーアトミークエオゼネルジザルタナテイヴ
发明人： POUYDEBASQUE ARNAUD , BOLIS SEBASTIEN , JACQUET FABRICE
IPC分类号： B81C3/00
CPC分类号： G02B3/14 , F04B43/043 , G02B26/004
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a device provided with a membrane for encapsulating a fluid.SOLUTION: The method of manufacturing a device provided with a membrane used to encapsulate a fluid contained in a cavity includes: a step of providing two substrates; a step of placing the membrane on the substrate; a step of forming one or a plurality of walls, helping to laterally define the cavity; a step of integrally assembling the two substrates by superimposing one on the other so as to complete the cavity; a step of encapsulating the fluid in the cavity between the substrates, and soaking the membrane by the fluid; a step of removing at least a portion of the substrates in order to release the membrane at least in a central portion thereof in the case that the membrane is formed on the substrate.
摘要翻译：要解决的问题：提供一种制造具有用于封装流体的膜的装置的方法。解决方案：制造具有用于封装包含在空腔中的流体的膜的装置的方法包括：提供两个基板的步骤; 将膜放置在基板上的步骤; 形成一个或多个壁的步骤，有助于横向限定空腔; 通过将两个基板叠置在一起而完成空腔的步骤; 将流体封装在基板之间的空腔中并通过流体浸泡膜的步骤; 在膜形成在基板上的情况下，至少除去至少一部分基板以至少在其中心部分释放膜的步骤。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2011187964A Interconnect structure including blind via to be metalized 审中-公开
标题翻译：互联结构包括通过金属化的盲点
公开(公告)号：JP2011187964A
公开(公告)日：2011-09-22
申请号：JP2011051734
申请日：2011-03-09
申请人： Commissariat A L'energie Atomique & Aux Energies Alternatives , コミッサリアアレネルジーアトミークエオゼネルジザルタナテイヴ
发明人： SAINT-PATRICE DAMIEN , BOLIS SEBASTIEN , JACQUET FABRICE
IPC分类号： H01L21/60 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号： H01L21/76898 , H01L23/481 , H01L24/24 , H01L24/92 , H01L2224/24226 , H01L2224/24992 , H01L2224/24997 , H01L2224/30151 , H01L2224/32225 , H01L2224/82 , H01L2224/8203 , H01L2224/82101 , H01L2224/83 , H01L2224/83192 , H01L2224/8385 , H01L2224/9202 , H01L2924/00014 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide an interconnect structure including one or more vias of which the bottom walls are formed with at least one second substrate made integrally with a first substrate by penetrating at least the first substrate of the interconnect structure.
SOLUTION: The interconnect structure includes: at least one first substrate, where at least one first face thereof is made integrally with at least one face of at least one second substrate; at least one blind via passing through the first substrate and emerging at the first face of the first substrate and at a second face located on the side opposite to the first face of the first substrate; at least one electric contact arranged in contact with the face of the second substrate and opposite to the blind via, and/or in contact with the first face and/or in contact with the second face of the first substrate; and at least one channel bringing the blind via into a communication state with an environment outside the interconnect structure and/or with at least one cavity formed in the interconnect structure, and extending substantially parallel to at least one of the faces of the first or second substrate.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种互连结构，其包括一个或多个通孔，其中底壁形成有至少一个通过至少穿透互连结构的第一基底与第一基板一体制成的第二基板。解决方案：互连结构包括：至少一个第一衬底，其中至少一个第一面与至少一个第二衬底的至少一个面整体地制成; 至少一个盲孔通过所述第一基板并在所述第一基板的第一面处以及位于与所述第一基板的所述第一面相反的一侧的第二面处; 至少一个电触头，其布置成与所述第二基板的表面接触并且与所述盲孔相对，和/或与所述第一面接触和/或与所述第一基板的所述第二面接触; 以及至少一个通道，其将盲通道带入与互连结构外部的环境的通信状态和/或形成在互连结构中的至少一个空腔，并且基本上平行于第一或第二表面的至少一个面延伸基质。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2011097059A Interconnect structure provided with cavity having at least one contact rise on cavity wall and method for forming the interconnect structure 审中-公开
标题翻译：具有至少一个接缝上的孔的互连结构和形成互连结构的方法
公开(公告)号：JP2011097059A
公开(公告)日：2011-05-12
申请号：JP2010240640
申请日：2010-10-27
申请人： Commissariat A L'energie Atomique & Aux Energies Alternatives , コミッサリアアレネルジーアトミークエオゼネルジザルタナテイヴ
发明人： BOLIS SEBASTIEN , JACQUET FABRICE , SAINT-PATRICE DAMIEN
IPC分类号： H01L23/02 , H01L23/14 , H01L23/15 , H01L23/32
CPC分类号： B81B7/0006 , B81B2203/0353 , B81B2207/012 , B81B2207/07 , H01L23/481 , H01L23/5389 , H01L27/14618 , H01L27/14627 , H01L2924/0002 , H05K1/0219 , H05K1/183 , H05K3/403 , H05K3/4697 , H05K2201/09172 , H05K2201/09181 , H05K2201/09645 , H01L2924/00012 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide a new interconnect structure that facilitates packaging without the drawbacks that the interconnect structure must be situated near the edges of a support and a method for forming the interconnect structure.
SOLUTION: The invention concerns an interconnect device comprising a support (200) in which at least one hole is formed, the hole including: walls forming a closed contour and being formed by a cavity (203); and one or several slots (205a-205b, 215a-215b) communicating with the cavity, the slots extending in a direction making a non-zero angle with the main plane of the support, several conducting elements (214) being disposed on at least one wall of the hole so as to penetrate a hole portion, the conducting elements being each intended to connect conductive areas located on either side of the support, and at least one of the slots separating two of the conductive elements.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种便于封装的新的互连结构，而不需要互连结构必须位于支撑体的边缘附近的缺点以及用于形成互连结构的方法。解决方案：本发明涉及一种互连装置，其包括其中形成有至少一个孔的支撑件（200），所述孔包括：形成封闭轮廓的壁并由腔（203）形成; 以及与空腔连通的一个或多个狭槽（205a-205b，215a-215b），所述狭槽在与所述支撑件的主平面成非零角度的方向上延伸，至少设置有几个导电元件（214）所述孔的一个壁穿过孔部分，所述导电元件各自用于连接位于所述支撑件的任一侧上的导电区域，以及分隔两个所述导电元件的所述狭槽中的至少一个。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2012068638A Membrane device whose membrane can be deformed by actuation with fast response time 有权
标题翻译：膜片可以通过快速响应时间的启动而变形
公开(公告)号：JP2012068638A
公开(公告)日：2012-04-05
申请号：JP2011204448
申请日：2011-09-20
申请人： Commissariat A L'energie Atomique & Aux Energies Alternatives , コミッサリアアレネルジーアトミークエオゼネルジザルタナテイヴ
发明人： BOLIS SEBASTIEN
IPC分类号： G02B26/08 , G02B3/14
CPC分类号： G02B3/14 , G02B7/08 , G02B13/0075
摘要： PROBLEM TO BE SOLVED: To provide a membrane device which has no disadvantage of conventional techniques.SOLUTION: A device includes a membrane and a support defining a cavity containing a fluid. The membrane includes an anchoring area to the support, a central area which can be deformed following a displacement of the fluid, an actuation area between the anchoring area and the central area, and means of actuation to apply stress to the membrane in the actuation area and cause a displacement of the fluid to the central area following an actuation. The cavity includes a main chamber in the central area and a peripheral chamber in the actuation area communicating with the main chamber. The peripheral chamber includes at least one forced flow structure favoring the flow of at least a part of the fluid from the peripheral chamber to the main chamber or vice versa following the actuation. A given forced flow structure has no attachment both to the support and to the membrane.
摘要翻译：要解决的问题：提供一种没有常规技术缺点的膜装置。解决方案：装置包括膜和支撑件，其限定包含流体的空腔。膜包括到支撑件的锚固区域，可在流体移动之后变形的中心区域，在锚定区域和中心区域之间的致动区域，以及致动装置，以在致动区域中对膜施加应力并且在致动之后导致流体移动到中心区域。空腔包括在中心区域中的主室和在与主室连通的致动区域中的周边室。周边室包括至少一个强制流动结构，有利于至少一部分流体从周边室到主室的流动，反之亦然。给定的强制流动结构对支撑物和膜都没有附着。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2014044446A Optical device with piezoelectrically actuated deformable membrane shaped as continuous crown 审中-公开
标题翻译：具有压电致动的可变形膜的光学器件形成连续的形状
公开(公告)号：JP2014044446A
公开(公告)日：2014-03-13
申请号：JP2013250870
申请日：2013-12-04
申请人： Commissariat A L'energie Atomique Et Aux Energies Alternatives , コミッサリアアレネルジーアトミークエオゼネルジザルタナテイヴ
发明人： MOREAU STEPHANE , BOLIS SEBASTIEN
IPC分类号： G02B3/14 , G02B26/00
CPC分类号： G02B3/12 , G02B3/14 , G02B26/004 , G02B26/0825 , G02B27/0068 , H01L41/098
摘要： PROBLEM TO BE SOLVED: To provide an optical device with a deformable membrane including: an anchor area on a support entrapping a liquid or gas fluid; a central area reversibly deformable from a rest position; and actuating means for moving the fluid by biasing the membrane in an intermediate area between the anchor area and the central area.SOLUTION: The actuating means includes a piezoelectric continuous crown accommodating several actuators. The crown surrounds the central area. The actuating means is anchored to the membrane in at least the intermediate area. The actuating means and the membrane to which it is anchored form at least one piezoelectric bimorph. The actuating means radially contracts or extends upon actuation so as to generate a movement of said fluid either from the intermediate area to the central area of the membrane or reversely, aiming at deforming the central area with respect to the rest position of the membrane.
摘要翻译：要解决的问题：提供一种具有可变形膜的光学装置，包括：支撑物捕获液体或气体流体的锚定区域; 从休息位置可逆地变形的中心区域; 以及致动装置，用于通过在所述锚定区域和所述中心区域之间的中间区域中偏置所述膜来移动所述流体。解决方案：致动装置包括容纳多个致动器的压电连续冠部。皇冠围绕中心区域。致动装置至少在中间区域中固定在膜上。致动装置和其被锚定的膜形成至少一个压电双压电晶片。致动装置在致动时径向收缩或延伸，以便产生所述流体从膜的中间区域到中心区域或相反地移动，其目的在于使中心区域相对于膜的静止位置变形。

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