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1. 发明专利

JP2008276439A Temperature control device 有权
标题翻译：温度控制装置
公开(公告)号：JP2008276439A
公开(公告)日：2008-11-13
申请号：JP2007118071
申请日：2007-04-27
申请人： Ckd Corp , Tokyo Electron Ltd , シーケーディ株式会社 , 東京エレクトロン株式会社
发明人： NAGASEKI KAZUYA , KOBAYASHI YOSHIYUKI , MURAKAMI KOICHI , NONAKA TATSU , SUDO YOSHIHISA , BANDO HIROSHI , KUNIYASU NORIO
IPC分类号： G05D23/19
CPC分类号： G05D23/19
摘要： PROBLEM TO BE SOLVED: To solve the problem of difficulty in promptly following a temperature of a controlled object to a desired temperature, when controlling the temperature of the controlled object to the desired temperature by circulating fluid in a temperature control unit disposed in the vicinity of the controlled object.
SOLUTION: A temperature control unit 11 for circulating the fluid is housed inside a temperature control plate 10 for supporting the controlled object. To the temperature control unit 11, there connected are a cooling path 20 for cooling and circulating the fluid, a bypass path 30 for circulating the fluid on the downstream side of the temperature control unit 11 intact again into the temperature control unit 11, and a heating path 40 for heating and circulating the fluid.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题为了解决难以及时将被控制物的温度维持在所需温度的问题，通过将流体循环在设置在温度控制单元中的温度控制单元中来控制受控对象的温度达到所需温度受控对象的附近。解决方案：用于使流体循环的温度控制单元11容纳在用于支撑受控对象的温度控制板10内。所连接的温度控制单元11是用于冷却和循环流体的冷却路径20，用于使温度控制单元11的下游侧的流体再循环到温度控制单元11中的旁路路径30，加热路径40，用于加热和循环流体。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2006022926A Lower block for integrated valve 审中-公开
标题翻译：集成阀门下方
公开(公告)号：JP2006022926A
公开(公告)日：2006-01-26
申请号：JP2004203664
申请日：2004-07-09
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , ITO KAZUHISA , MORIMOTO MASAYOSHI , SUDO YOSHIHISA
IPC分类号： F16K27/00 , C23C16/455
摘要： PROBLEM TO BE SOLVED: To provide a lower flow channel block for an integrated valve capable of reducing manufacturing cost, shortening a manufacturing time, controlling pressure loss in a flow channel and lightening the block.
SOLUTION: This lower flow channel block 1 for the integrated valve is a U-shaped stainless pipe, and has an U-shaped pipe 11 having a first opening 11a and a second opening 11b opened in the same direction, and a casing 21 supporting the U-shaped pipe 11 in a state that the first opening 11a and the second opening 11b are positioned on its upper face.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够降低制造成本，缩短制造时间，控制流路中的压力损失并减轻块的集成阀的下部流路块。解决方案：该集成阀的下流道块1是U形不锈钢管，并且具有U形管11，其具有沿相同方向开口的第一开口11a和第二开口11b，壳体 21在第一开口11a和第二开口11b位于其上表面的状态下支撑U形管11。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2003167630A FLOW RATE CONTROLLER AND FLOW RATE CONTROL METHOD 审中-公开
公开(公告)号：JP2003167630A
公开(公告)日：2003-06-13
申请号：JP2001370111
申请日：2001-12-04
申请人： CKD CORP
发明人： SUDO YOSHIHISA , KOKETSU MASAYUKI , NAWATA TOKUHIDE , WATANABE MASAYUKI
IPC分类号： F17D3/01 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To provide a flow rate controller and a flow rate control method for making it unnecessary to prepare any probe being the factor of any trouble such as a fine pipe or a minimum orifice, and for making the controllable flow rate range of gas much wider without changing the sizes of parts. SOLUTION: In operating the opening of a proportional valve 17 after opening and closing an interrupting valve 12, the opening of the proportional valve 17 is operated based on a pressure P of the process gas of a gas filling volume 13 measured by a pressure sensor 14, and the pressure slope of the process gas of the gas filing volume 13 is controlled so as to be fixed. Thus, it is possible to adjust the mass/flow of the process gas outflowing from the proportional valve 17. COPYRIGHT: (C)2003,JPO

4. 发明专利

JPH1069317A MASS-FLOW CONTROLLER FITTING STRUCTURE 失效
公开(公告)号：JPH1069317A
公开(公告)日：1998-03-10
申请号：JP12993797
申请日：1997-05-20
申请人： CKD CORP , TOSHIBA CORP
发明人： MIKATA YUICHI , SUDO YOSHIHISA , GOSHIMA KENICHI , BANDOU HIROSHI , KOJIMA AKIHIRO
IPC分类号： G01F1/68 , C23F4/00 , F16K27/00 , G05D7/00 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide the fitting structure for a mass-flow controller which is easily replaced. SOLUTION: The fitting structure for the mass-flow controller has a 2nd communication port which (1) has a manifold port 14b for the mass-flow controller formed on the top surfaces of manifold plates 14 and 15 and (2) has fitting blocks 44 and 45 having a 1st communication port for linking with the input or output port of the mass-flow controller 5 on the flank and a 2nd communication port for linking with a manifold port for the mass-flow controller on the bottom surface, communication paths 44a and 45a linking the 1st and 2nd communication ports with each other, and a couple of bolt holes penetrating the top and reverse surfaces, and (3) fitting blocks 44 and 45 are fitted to the manifold plates 14 and 15 from above with four fitting bolts 41 by using the couple of bolt holes.

5. 发明专利

JPH1028854A PURGE SYSTEM AND PURGE JOINT 失效
公开(公告)号：JPH1028854A
公开(公告)日：1998-02-03
申请号：JP18431996
申请日：1996-07-15
申请人： CKD CORP
发明人： GOSHIMA KENICHI , SUDO YOSHIHISA
IPC分类号： F16L19/00 , B01J4/00 , B08B9/032 , C23C16/44 , F16L19/02 , F17C13/04 , F17D1/02 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To obtain a purge system generating no particles and capable of efficiently performing purging within a short time by providing the system with a purge arranged on a purge gas piping route and having an opening part communicating with the outside at the connection position of two pipes. SOLUTION: An external opening 14C is formed at the connection position of pipes 12A, 12B, that is, at the gap position of both of them and connected to the external opening 18a formed to the central part of an external joint 18. A male screw is formed to the outer periphery of the external joint 18 and the pipes 12A, 12B are brought to a contact state so as to hold a gasket 19 and a nut member 13 is screwed in a joint body 14. By this constitution, since purging can be performed in a usual piping state, connection machinery can be detached rapidly and simply. When the pipes are connected or disconnected, purging due to inert gas is performed and, therefore, an excessive time for purging can be conserved to a large extent.

6. 发明专利

JPH10337464A GASIFICATION DEVICE OF LIQUID MATERIAL 失效
公开(公告)号：JPH10337464A
公开(公告)日：1998-12-22
申请号：JP14615397
申请日：1997-06-04
申请人： CKD CORP , TOSHIBA CORP
发明人： SUDO YOSHIHISA , ITO MINORU , OKUMURA KATSUYA , TSUNASHIMA YOSHITAKA
IPC分类号： B01J7/00 , C23C16/44 , C23C16/448 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To stably gasify a liquid material, to easily produce gas and to enhance accuracy of control of the gasified gas. SOLUTION: A gasification device 3 heats the liquid material fed to a gasification chamber 25 of a housing 21 from a feed port 26 with a heater 12 to gasify, and discharges from a discharge port 27. A sintered body 28 is provided in the gasification chamber 25. The sintered body 28 is formed by compacting a powdery assembly having heat conductivity and anticorrosion property in a state having a specified porosity, and sintering. The gasification device 3 is provided with a control valve 11 for controlling a flow rate of the liquid material fed to the gasification chamber 25. The control valve 11 is provided with a valve body 44 and a seat 51, and the seat 51 has a feed port 26 in the center of it. One portion of the sintered body 28 is arranged in an adjacentnt relation to a feed port 26. A heater 12 provided on the outer periphery of the housing 21 works to heat the sintered body 28.

7. 发明专利

JPH08185229A MASS FLOW CONTROLLER 失效
公开(公告)号：JPH08185229A
公开(公告)日：1996-07-16
申请号：JP34031694
申请日：1994-12-27
申请人： CKD CORP
发明人： SUDO YOSHIHISA , ITO MINORU , NITTA SHINICHI , KUDO MASAYUKI
IPC分类号： F16K31/128 , G05D7/06
摘要： PURPOSE: To provide a mass flow controller which can accurately control the position of a valve body by feeding back a measured mass flow rate and has a complete cutting-off function. CONSTITUTION: The mass flow controller, having a mass flowmeter part 2 which measures the mass flow rate of fluid flowing in a conduit 15 from the values of currents flowing to two resistance bodies R1 and R2 wound around the duct 15 independently of each other and varying in resistance value with the temperature of the fluid and a proportional valve mechanism which is sit in the passage of the fluid and varies the flow rate by varying the gap formed with a valve seat 27, has diaphragm 24 formed integrally with the valve body 17, a solenoid valve 35 for supply and a solenoid valve 36 for discharge which control compressed air operating on the diaphragm 24 to change the position of the valve body, and a control means 32 and a pulse converting circuit 33 which control the solenoid valve 35 for supply and solenoid valve 36 for discharge on the basis of the mass flow rate of the fluid measured by the mass flowmeter part 2 and feed the mass flow rate of the fluid back to a specific value.

8. 发明专利

JPH07269732A ON-OFF VALVE MOUNTING STRUCTURE 失效
公开(公告)号：JPH07269732A
公开(公告)日：1995-10-20
申请号：JP28406194
申请日：1993-02-10
申请人： CKD CORP , TOSHIBA CORP
发明人： MIKATA YUICHI , SUDO YOSHIHISA , GOSHIMA KENICHI , BANDOU HIROSHI , KOJIMA AKIHIRO
IPC分类号： F16K27/00 , C23F1/08 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To secure an on-off valve mounting structure reduced in a setup space required for mounting a flow control valve. CONSTITUTION:This mounting structure of an on-off valve is made up of being clamped to an output manifold 12 by an output valve 3 to be equipped with a valve supply port receiving a supply of gas in and around the central part of an underside, and a valve output port being interconnected or interrupted to or from the valve supply port by means of valve opening or closing, and a mounting bolt 41 being mounted with the on-off valve on the top face where the output valve 3 is mounted, is extended in the one side face direction, using two bolt holes formed on the top face extended. With this constitution, it has an output valve block 13 formed with an interconnecting passage interconnecting a manifold port 12b and the valve output port, and whereby the manifold port 12b is made up in an interval between both the mounting bolts 41 and 41.

9. 发明专利

JPH0435768B2 失效
公开(公告)号：JPH0435768B2
公开(公告)日：1992-06-12
申请号：JP5715985
申请日：1985-03-20
申请人： CKD CORP
发明人： SUDO YOSHIHISA
IPC分类号： G05D16/10

10. 发明专利

JP2000259255A GAS SUPPLY CONTROLLER 失效
公开(公告)号：JP2000259255A
公开(公告)日：2000-09-22
申请号：JP6525599
申请日：1999-03-11
申请人： CKD CORP
发明人： SUDO YOSHIHISA , ITO MINORU
IPC分类号： G01F1/00 , B01J3/02 , B01J4/02 , G01F1/68 , G05D7/06 , G05D16/20
摘要： PROBLEM TO BE SOLVED: To detect a failure of a diaphragm part even without removing the restriction part by providing a thermal type flow rate sensor that detects the flow rate of fluid passing through the restriction part and detects a fault of the restriction part. SOLUTION: Material gas is made to pass through an orifice 33 on sonic flow by maintaining the pressure ratio of an upstream of the orifice 33 to a downstream equally to or more than a fixed value. Then, the flow rate of the material gas can be controlled on the basis of upstream side pressure when the pressure ratio of the upstream of the orifice 33 to the downstream is maintained equally to or more than the fixed value. In the case corrosion gas is used for a gas supplying device for a long time, the orifice 33 corrodes away, a flow path is expanded in a diameter, and particles clog up in the flow path of the orifice 33 or the like so that an effective sectional area can sometimes be changed. A thermal type flow rate sensor 36 is provided on the upstream side of the orifice 33 to detect the change of this effective sectional area. That is, the sensor 36 detects the flow rate of the material gas passing through the orifice 33 in sonic flow and can detect the change of the effective sectional area from the flow rate change.

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