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1. 发明专利

JP2006143229A Tank structure 有权
标题翻译：坦克结构
公开(公告)号：JP2006143229A
公开(公告)日：2006-06-08
申请号：JP2004332065
申请日：2004-11-16
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , SUGATA KAZUHIRO , TOMITA HIROSHI
IPC分类号： B65D90/02
CPC分类号： B67D7/0294 , B67D7/0272
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive tank structure capable of integrally and reliably fixing the tank having a fixing mechanism of a valve to a tank which is a fluid coupling and the valve to each other, using even in a corrosive atmosphere such as acid, and miniaturizing a chemical supply circuit, and high in maintainability. SOLUTION: The tank structure having a fluid coupling 12 to be fixed to a tip side of a projecting opening part 31 of a tank 11 and a valve 13 to be fixed to the fluid coupling 12 comprises a first annular component 21 arranged on the tank 11 at a root side of the projecting opening part 31 of the tank 11 with the projecting opening part 31 of the tank 11 inserted in an annular manner, a rotatable second annular component 22 to be screwed to the first annular component 21, and a spacer 23 to be inserted between the second annular component 22 and the fluid coupling 12. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：为了提供廉价的罐结构，能够将具有阀的固定机构的罐整体可靠地固定到作为流体联接器的阀和阀彼此，即使在腐蚀性气氛中如酸，化学品供应电路小型化，维护性高。解决方案：具有固定到罐11的突出开口部分31的顶端侧的流体联接器12和待固定到流体联接器12的阀13的罐结构包括：第一环形部件21，其布置在储罐11的突出开口部31根部侧的槽11以罐11的突出开口部31插入环状，可旋转的第二环状部件22与第一环状部件21螺合，插入在第二环形部件22和流体连接器12之间的间隔件23.版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2006125338A Pump for feeding chemicals 有权
标题翻译：用于饲料化学品的泵
公开(公告)号：JP2006125338A
公开(公告)日：2006-05-18
申请号：JP2004316658
申请日：2004-10-29
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , ITO SHIGENOBU , SUGATA KAZUHIRO , ARAKAWA KAZUHIRO
IPC分类号： F04B43/06 , B05C11/10 , H01L21/027
CPC分类号： F04B43/073
摘要： PROBLEM TO BE SOLVED: To provide a pump for feeding chemicals capable of deforming a diaphragm onto an operation chamber side securely in a short time, shortening chemicals filling time into a pump chamber, and ensuring sufficient amount of filling chemicals.
SOLUTION: An opening 22d of a supply and exhaust passage 22b is positioned in a central part on an internal wall face 22c of an operation chamber 26 (a recess 22a), and a cross-shaped ventilation channel 22e extending from the opening 22d of the supply and exhaust passage 22b to a peripheral fringe side of the internal wall face 22c is formed. When operation air in the operation chamber 26 is exhausted (sucked) through the supply and exhaust passage 22b so that the pressure in the operation chamber 26 becomes negative and a central part of the diaphragm 23 first covers an opening 22d of the supply and exhaust passage 22b when absorbing chemicals, operation air in the operation chamber 26 from the ventilation channel 22e positioned on an outer side of a first abutted central part can be continuously exhausted (sucked) since the opening 22d is communicated with the ventilation channel 22e extending to a peripheral fringe of the operation chamber 26.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在短时间内稳定地将隔膜变形到操作室侧的化学品的泵，缩短到泵室的化学品填充时间，并且确保足够量的填充化学品。解决方案：供排气通道22b的开口22d位于操作室26（凹部22a）的内壁面22c上的中心部分和从开口延伸的十字形通风通道22e 22d形成在内壁面22c的周边边缘侧。当操作室26中的操作空气通过供排气通道22b排出（吸入），使得操作室26中的压力变为负，并且隔膜23的中心部分首先覆盖供排气通道的开口22d 22b，当吸收化学物质时，由于开口22d与延伸到周边的通气通道22e连通，因此能够连续地排出（吸入）位于第一抵接中心部的外侧的通气路22e的操作室26的操作空气操作室26的边缘。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2005240989A Flow passage block 有权
标题翻译：流动通道块
公开(公告)号：JP2005240989A
公开(公告)日：2005-09-08
申请号：JP2004071143
申请日：2004-03-12
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , SUGATA KAZUHIRO , ARAKAWA KAZUHIRO , HATA TAKU
IPC分类号： F16K27/00
摘要： PROBLEM TO BE SOLVED: To provide a flow passage block used to realize a chemical supply unit with a chemical valve attached to the flow passage block.
SOLUTION: This flow passage block forms two ports 36 on one face of rectangular parallelopiped and has a curved communicating passage 37 communicating with two ports 36. For example, a tube member 30 in which two ports 36 and the communicating passage 37 are integrally formed, is mounted on a rectangular block member 20 to form the curved communicating passage 37.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供用于实现具有附接到流动通道块的化学阀的化学品供应单元的流路块。解决方案：该流动通道块在矩形平行六面体的一个面上形成两个端口36，并且具有与两个端口36连通的弯曲连通通道37.例如，管构件30，其中两个端口36和连通通道37是整体形成，安装在矩形块体20上，形成弯曲连通通道37.版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2007139196A Flow passage block 审中-公开
标题翻译：流动通道块
公开(公告)号：JP2007139196A
公开(公告)日：2007-06-07
申请号：JP2006327693
申请日：2006-12-05
申请人： Ckd Corp , Okutekku:Kk , Tokyo Electron Ltd , シーケーディ株式会社 , 東京エレクトロン株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , SUGATA KAZUHIRO , ARAKAWA KAZUHIRO , HATA TAKU
IPC分类号： F16L41/02 , F16K27/00 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To provide a flow passage block used to achieve a chemical supply unit with a chemical valve attached to the flow passage block. SOLUTION: This flow channel passage forms two ports 36 on one face of a rectangular parallelpiped, and has a curved communicating passage 37 communicating with two ports 36. For example, a tube member 30 in which two ports 36 and the communicating passage 37 are integrally formed, is mounted on a rectangular block member 20 to form the curved communicating passage 37. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种流路块，用于实现具有附接到流路块的化学阀的化学品供应单元。解决方案：该流道通道在矩形平行爪的一个面上形成两个端口36，并且具有与两个端口36连通的弯曲连通通道37.例如，管构件30，其中两个端口36和连通通道 37一体地形成，安装在矩形块状构件20上以形成弯曲的连通通道37.版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006316711A Chemical liquid supply system and chemical liquid supply pump 审中-公开
标题翻译：化学液体供应系统和化学液体供应泵
公开(公告)号：JP2006316711A
公开(公告)日：2006-11-24
申请号：JP2005140705
申请日：2005-05-13
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , NITTA SHINICHI , NABEI TATSUMI , SUGATA KAZUHIRO , SAKAI ATSUYUKI
IPC分类号： F04B43/06 , B05C11/10 , H01L21/027
CPC分类号： F04B43/06 , F04B43/084 , F04B43/10
摘要： PROBLEM TO BE SOLVED: To provide a chemical liquid supply system controlling the suction or discharge flow rate of a chemical liquid with high accuracy and eliminating an adverse effect caused by heat generation.
SOLUTION: A bellows type partition member 12 is received as a capacity variable member in a pump housing 11 of a chemical liquid supply pump 10, and a pump chamber 13 and a pressure acting chamber 14 are separately formed by the bellows type partition member 12. The pressure acting chamber 14 is connected with an electropneumatic regulator 28. A rod 33 is coupled to the bellows type partition member 12 and a displacement of the rod 33 is detected by a position detector 36. A controller 40 sets a target operation amount of the bellows in suction or discharge of the chemical liquid and controls the electropnuematic regulator 28 based on a difference between the target operation amount and an actual operation amount obtained from a detection result by the position detector 36.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种以高精度控制化学液体的吸入或排出流量并消除由发热引起的不利影响的化学液体供给系统。解决方案：波纹管式分隔构件12作为容量可变构件容纳在化学液体供应泵10的泵壳体11中，泵室13和压力作用室14由波纹管型分隔件压力作用室14与电动气动调节器28连接。杆33联接到波纹管式分隔构件12，杆33的位移由位置检测器36检测。控制器40设定目标操作波纹管在化学液体的吸入或排出中的量，并且基于由位置检测器36的检测结果获得的目标操作量与实际操作量之间的差来控制电动调节器28。）2007，JPO＆INPIT

6. 发明专利

JP2006049756A Chemical feeding system 有权
标题翻译：化学进料系统
公开(公告)号：JP2006049756A
公开(公告)日：2006-02-16
申请号：JP2004232071
申请日：2004-08-09
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , ITO SHIGENOBU , TOYODA TETSUYA , SUGATA KAZUHIRO
IPC分类号： H01L21/027 , F04B43/06
CPC分类号： F04F1/06 , F04B43/073 , Y10T137/3124
摘要： PROBLEM TO BE SOLVED: To provide a chemical feeding system preventing heat transfer from a pump at the time of operation, and realizing the miniaturization of a delivery pump that drops the chemical from a top nozzle. SOLUTION: A resist liquid R is filled in a pump chamber by pressurizing the chemical positively pressured inside the pump chamber of the delivery pump 11 by supplying the compressed air to the upper space 15a of a resist bottle 15. It is unnecessary, therefore, to adopt a conventional configuration that a spring or the like is used to suck the resist liquid R by driving a flexible membrane of the delivery pump 11 towards an operating chamber side. This allows the system to eliminate the use of a motor, which never damages a semiconductor wafer 19 by heat, and also allows the delivery pump 11 to be further miniaturized. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种防止在操作时从泵传热的化学物质输送系统，并实现从顶部喷嘴滴下化学物质的输送泵的小型化。解决方案：通过将压缩空气供给到抗蚀剂瓶15的上部空间15a，通过对输送泵11的泵室内的化学物进行正压加压来将抗蚀剂液体R填充在泵室中。不需要，因此，为了采用弹簧等通过将输送泵11的柔性膜朝向操作室侧驱动来吸附抗蚀剂液体R的常规构造。这允许系统消除使用不会因半导体晶片19受热而损坏的电动机，并且还允许输送泵11进一步小型化。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2006024776A Chemical solution supplying unit 有权
标题翻译：化学解决方案供应单位
公开(公告)号：JP2006024776A
公开(公告)日：2006-01-26
申请号：JP2004202088
申请日：2004-07-08
申请人： Ckd Corp , Okutekku:Kk , シーケーディ株式会社 , 株式会社オクテック
发明人： OKUMURA KATSUYA , ARAKAWA KAZUHIRO , SUGATA KAZUHIRO
IPC分类号： H01L21/304 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To provide a cumulative chemical solution supplying unit which is easily aligned with two common passages. SOLUTION: In the chemical solution supplying unit; an upstream side opening/closing valve 11, a pump 13 for sending the chemical solution, a downstream side opening/closing valve 14, and a filter 15 are successively connected in series. The upstream side opening/closing valve 11, the pump 13, the downstream side opening/closing valve 14, and the filter 15 are connected via connection blocks 20, 37, 36 to form an integral block structure unit. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供容易与两个共同通道对准的累积化学溶液供应单元。
解决方案：在化学溶液供应单元中; 上游侧开闭阀11，用于送出化学溶液的泵13，下游侧开闭阀14和过滤器15依次连续地连接。上游侧开闭阀11，泵13，下游侧开闭阀14以及过滤器15经由连接块20,37,36连接，形成一体的块结构单元。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2008208977A Control valve 有权
标题翻译：控制阀
公开(公告)号：JP2008208977A
公开(公告)日：2008-09-11
申请号：JP2007048895
申请日：2007-02-28
申请人： Ckd Corp , シーケーディ株式会社
发明人： SUGATA KAZUHIRO , FUJITA KAZUHIRO
IPC分类号： F16K37/00 , F16K31/122
摘要： PROBLEM TO BE SOLVED: To provide a control valve enabling to surely detect the totally closed condition of a valve portion.
SOLUTION: The control valve 1 comprises a valve opening/closing detecting mechanism 32, whereby reciprocating motion is given to a piston rod 13 in a piston chamber 12 to make a valve element 10 connected to the piston rod 13 abut on or separate from a valve seat 11. The piston rod 13 includes a first piston member 14 which is slidably stored in the piston chamber 12, and a second piston member 15 whose piston portion 20 is stored in the piston chamber 12 in the state of slidably passing a rod portion 21 through the first piston member 14. When the valve element 10 abuts on the valve seat 11, a clearance S is formed between the first piston member 14 and the second piston member 15. The valve opening/closing detecting mechanism 32 detects a lock position where the first piston member 14 is locked when moved to the valve seat 11 in the piston chamber 12, as showing the totally closed condition of the valve portion.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够可靠地检测阀部分的完全关闭状态的控制阀。解决方案：控制阀1包括阀打开/关闭检测机构32，由此在活塞室12中向活塞杆13提供往复运动，以使得连接到活塞杆13的阀元件10抵靠或分离活塞杆13包括可滑动地存储在活塞室12中的第一活塞构件14和活塞部分20以可滑动方式通过的状态存储在活塞室12中的第二活塞构件15 杆部21通过第一活塞构件14.当阀体10抵接在阀座11上时，在第一活塞构件14和第二活塞构件15之间形成有间隙S.阀开闭检测机构32检测锁定位置，当移动到活塞室12中的阀座11时第一活塞构件14被锁定，显示阀部分的完全关闭状态。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2008101757A Internal structure for chemical control equipment 有权
标题翻译：化学控制设备内部结构
公开(公告)号：JP2008101757A
公开(公告)日：2008-05-01
申请号：JP2006286763
申请日：2006-10-20
申请人： Ckd Corp , シーケーディ株式会社
发明人： MIYASHITA MICHIO , KUNITACHI YOSHIHIRO , SUGATA KAZUHIRO
IPC分类号： F16K1/00 , F16K7/16 , F16K31/163 , F16K41/10 , H01L21/304 , H01L21/306
摘要： PROBLEM TO BE SOLVED: To provide an internal structure wherein chemical permeates between a plurality of members which form a chemical flow path in chemical control equipment.
SOLUTION: A chemical introduction passage 20 and a chemical flow-out passage 22 for a chemical control valve 10 are communicated with each other or shut off by a valve 26. Namely, the valve 26 is normally closed because the elastic force of a spring 30 is given thereto via a piston rod 28. On the contrary, when pressure air is introduced from an air introduction passage 32 formed in the side face of a cylinder 16, the piston rod 28 is displaced while overcoming the force of the spring 30 and the valve 26 is thus opened. The valve 26 is fitted between a body 14 and the cylinder 16. On a contact face between the valve 26 and the body 14, an uneven structure is provided for increasing an angle of contact with chemical.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种内部结构，其中化学渗透在化学控制设备中形成化学流动路径的多个构件之间。解决方案：用于化学品控制阀10的化学品引入通道20和化学品流出通道22彼此连通或通过阀26切断。即，阀26常闭，因为弹性力通过活塞杆28向其施加弹簧30.相反，当从形成在气缸16的侧面的空气引入通道32引入压力空气时，活塞杆28在克服弹簧的力的同时被移动 30并且阀26因此被打开。阀26装配在主体14和缸体16之间。在阀26与主体14之间的接触面上设置有不均匀的结构以增加与化学品的接触角度。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2003301985A Double tube joint 审中-公开
标题翻译：双管接头
公开(公告)号：JP2003301985A
公开(公告)日：2003-10-24
申请号：JP2002107908
申请日：2002-04-10
申请人： Ckd Corp , シーケーディ株式会社
发明人： SUGATA KAZUHIRO
IPC分类号： F16L39/00 , F16L37/23
摘要： PROBLEM TO BE SOLVED: To provide a double tube joint with easy maintenance management and maintaining. SOLUTION: An inner tube 2 is sealed to an inner tube main body 8 joint provided in a control valve 4 by screw connecting a bag-shaped inner tube joint nut 9, and an outer tube is sealed to a cylindrical outer tube joint main body 14 by screw connecting a bag-shaped outer tube joint nut 15. The outer tube joint main body 14 is fitted to an outer peripheral surface of the inner tube joint nut 9 by mounting a seal material 24, and the outer joint member 13 is radially connected to an inner joint member 7 and the double tube 1 is connected to the control valve 4 by locking a rotary body 20 to a locking part 23 of the inner tube joint nut 9. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供双管接头，便于维护管理和维护。解决方案：内管2通过螺旋连接袋形内管接头螺母9而密封到设置在控制阀4中的内管主体8接头，外管密封到圆筒形外管接头主体14通过螺纹连接袋形外管接头螺母15.外管接头主体14通过安装密封材料24而装配到内管接头螺母9的外周面，外接头构件13 通过将旋转体20锁定在内管接头螺母9的卡定部23上，径向地连接于内侧接头部件7，双管1与控制阀4连接。（C） JPO

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