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    • 7. 发明专利
    • Apparatus and method for spin coating with coating fluid
    • 旋涂用涂料油的装置和方法
    • JP2005013908A
    • 2005-01-20
    • JP2003183790
    • 2003-06-27
    • Central Glass Co Ltdセントラル硝子株式会社
    • KURAMASU HARUKIARAI HIROAKIAKAMATSU YOSHINORI
    • B05D1/40B05C11/08
    • PROBLEM TO BE SOLVED: To provide an apparatus for the spin coating of a substrate, whereby even when the substrate is rectangle or curved, the unevenness of coating with a coating fluid is suppressed, and the coating fluid is prevented from spreading onto the back of the substrate and to provide a method for spin coating. SOLUTION: In a spin coater which is an apparatus used for applying a coating fluid to a substrate by a spin coating method and is provided with a mechanism having a pedestal that supports and rotates the substrate, spreads the coating fluid applied to the substrate in the direction of the outside of the substrate by the centrifugal force of spin rotation, and sucks the extra coating fluid staying near the end from the periphery of the substrate, the pedestal is covered with a nearly recessed cross section body that is near to the pedestal and the substrate and rotates together with the pedestal, the nearly recessed cross section body is connected with a suction pump, and the suction pump sucks the atmosphere around the end of the substrate through a suction path being the clearance formed between the pedestal and the nearly concave cross section body. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种用于基材旋涂的装置,由此即使基材是矩形或弯曲的,也可以抑制涂布液的涂布不均匀性,防止涂布液扩散到 衬底的背面并提供旋涂方法。 解决方案:在旋转涂布机中,其是用于通过旋涂法将涂布流体涂覆到基材上的设备,并且设置有具有支撑和旋转基底的基座的机构,将施加到 通过旋转旋转的离心力在基板的外部的方向上吸附基材,并吸附从基板的周围停留在端部附近的额外的涂布液,基座被几乎凹陷的截面体覆盖, 基座和基板与基座一起旋转,大致凹入的截面体与抽吸泵连接,吸引泵通过吸引路径吸附基板的端部周围的大气,该吸引路径形成在基座和 近乎凹的截面体。 版权所有(C)2005,JPO&NCIPI