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1. 发明专利

JP2009016385A Stage apparatus, exposure apparatus, and method of manufacturing device 审中-公开
标题翻译：阶段装置，曝光装置和制造装置的方法
公开(公告)号：JP2009016385A
公开(公告)日：2009-01-22
申请号：JP2007173108
申请日：2007-06-29
申请人： Canon Inc , キヤノン株式会社
发明人： HIYAMA YOSHIHISA
IPC分类号： H01L21/027 , G03F7/20 , H01L21/68
CPC分类号： G03B27/42 , G03F7/70758
摘要： PROBLEM TO BE SOLVED: To provide a stage apparatus capable of reducing moments generated by electromagnets due to rotation of a micromotion stage, and of reducing heat generation of a micromotion linear motor. SOLUTION: This stage apparatus includes a first stage 104 and a second stage 105 mounted on the first stage 104. A linear motor 103 positions the second stage 105 relative to the first stage 104. A plurality of electromagnets 106a-106d accelerate and decelerate the second stage 105 relative to the first stage 104. A controller controls the electromagnets 106a-106d to reduce moments generated by the electromagnets due to rotation of the second stage 105. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够减少由于微动阶段的旋转而由电磁体产生的力矩并且减少微动直线电动机的发热的平台装置。
解决方案：该级装置包括安装在第一级104上的第一级104和第二级105.线性电动机103相对于第一级104定位第二级105.多个电磁体106a-106d加速使第二级105相对于第一级104减速。控制器控制电磁体106a-106d以减少由于第二级105的旋转而由电磁体产生的力矩。（C）2009年，JPO和INPIT

2. 发明专利

JP2008153546A Moving object mechanism 审中-公开
标题翻译：移动对象机制
公开(公告)号：JP2008153546A
公开(公告)日：2008-07-03
申请号：JP2006341812
申请日：2006-12-19
申请人： Canon Inc , キヤノン株式会社
发明人： HIYAMA YOSHIHISA , HIRATA YOSHIHIRO
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： G03B27/58
摘要： PROBLEM TO BE SOLVED: To reduce heat generation of a linear motor for a precise positioning to suppress thermal influence. SOLUTION: A moving object mechanism includes an electromagnet having a coil for driving a moving object movable in at least one direction and an electromagnet control system for feedback-controlling the electromagnet based on an input instruction value. It further includes a thrust correcting means for detecting an error between a thrust to be generated by the electromagnet based on the instruction value and a thrust generated by the electromagnet by the feedback control for making correction. The thrust correcting means measures a distance between the electromagnet and the moving object, calculates a correction value of driving current to be applied to a coil from the measurement value, and adds or multiplies the correction value to the instructed value to reduce the error in the thrusts. Alternatively, the thrusts generated on the electromagnet and the moving object are measured, the correction value of the driving current to be applied to the coil is calculated from the measurement value, and the correction value is added to or multiplied by the instructed value to reduce the error in the thrusts. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了减少用于精确定位的线性电动机的发热以抑制热影响。解决方案：移动物体机构包括具有用于驱动可沿至少一个方向移动的移动物体的线圈的电磁体和用于基于输入指令值反馈控制电磁体的电磁体控制系统。还包括一个推力校正装置，用于根据指令值检测由电磁体产生的推力与通过用于进行校正的反馈控制由电磁体产生的推力之间的误差。推力校正装置测量电磁体和移动物体之间的距离，根据测量值计算要施加到线圈的驱动电流的校正值，并将校正值与指示值相加或相乘以减少线圈中的误差推力。或者，测量在电磁体和运动物体上产生的推力，根据测量值计算施加到线圈的驱动电流的校正值，并将校正值相加或乘以指示值以减少推力的误差。版权所有（C）2008，JPO＆INPIT

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