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    • 3. 发明专利
    • THIN-FILM SEMICONDUCTOR DEVICE
    • JPH04174563A
    • 1992-06-22
    • JP29992090
    • 1990-11-07
    • CANON KK
    • YAMANOBE MASATOKOBAYASHI ISAOSAIGA TOSHIHIROISHII TAKAYUKITAKEDA SHINICHI
    • H01L21/314H01L29/78H01L29/786
    • PURPOSE:To make a characteristic and a distribution uniform inside a large-area substrate by a method wherein a protective layer covering a thin-film semiconductor layer is constituted of two thin-film insulating layers composed of mutually different inorganic substances. CONSTITUTION:For a glass substrate G, Cr is used as a gate electrode 1. Then, a gate insulating film 2, a thin-film semiconductor layer 3 and protective films 10, 11 are deposited continuously. The protective films 10, 11 covering the semiconductor layer 2 are constituted of two thin-film insulating layers composed of mutually different inorganic substances. It is desirable that the thin-film semiconductor layer is composed of amorphous hydrogenated silicon and that the first protective film is composed of amorphous silicon nitride. Then, after the protective film 10 has been formed and when an element is formed, the channel upper part of the semiconductor layer 3 is not etched, an electric characteristic is not deteriorated and a uniform distribution is obtained. The composition of the protective film 10 is selected without considering the stability against surroundings and by controlling only the state at the interface between the semiconductor layer 3 and the protective film 10. As a result, a uniform and desired initial characteristic can be obtained even inside the large-area substrate G. Since the protective film 11 is laminated, the stability against surroundings can be ensured.
    • 4. 发明专利
    • PHOTOELECTRIC CONVERTER
    • JPH0394571A
    • 1991-04-19
    • JP23029889
    • 1989-09-07
    • CANON KK
    • ENDO TADAOUMIBE NORIYUKISAIGA TOSHIHIROKOBAYASHI ISAOTOMOTA KOJI
    • H04N1/028H01L27/146
    • PURPOSE:To form a signal with high accuracy able to be decoded into an excellent picture by receiving a correction signal outputted from a voltage division means and a read signal obtained from a read sensor so as to apply subtraction processing and eliminating a stray light component. CONSTITUTION:A reflection light 10 from a protection layer surface radiates a read sensor 5 in addition to a light of an original face 9 and the light is processed by a read sensor output processing circuit 11. On the other hand, a reflecting light 10 from the protection layer surface radiates to a correction sensor 6 and the light is processed by a correction sensor processing circuit 12. The output of the correction sensor is subjected to reduction of 1/K (K is a value depending on stray light quantity) by a voltage division circuit 17 and a subtraction circuit 13 applies subtraction processing with the read sensor output. Where, a sensor output when reading a white original is W, the sensor output M by stray light is expressed as M=(1/K)W. Thus, the subtraction output characteristic to the original face reflectance independently of the stray light is obtained by subtracting the output (1/K)W by stray light from the sensor output.
    • 5. 发明专利
    • PHOTOELECTRIC CONVERTER
    • JPH0394570A
    • 1991-04-19
    • JP23029689
    • 1989-09-07
    • CANON KK
    • ENDO TADAOUMIBE NORIYUKISAIGA TOSHIHIROKOBAYASHI ISAOTOMOTA KOJI
    • H04N1/028H01L27/146
    • PURPOSE:To eliminate stray light component other than original information due to optical action such as reflection or diffusion by providing a means inputting a correction signal obtained from a correction sensor and a read signal obtained from a read sensor, applying subtraction processing and outputting the corrected read signal. CONSTITUTION:An incident light passing through windows 14, 15 passes through a transparent protection layer 4 and is directed in the direction of an original 8 and a black color shield plate 16, part of the incident light is reflected in the surface of the transparent protection layer 4 and directed in the direction of respective sensors. An original face reflecting light 9 and a protection layer surface reflecting light 10 radiate in a read sensor 5 and outputs are processed by a read sensor output processing circuit 11. On the other hand, only stray light radiates to a correction sensor 6 and is outputted to a correction sensor processing circuit 12. Outputs of respective processing circuits are subjected to subtraction processing by a subtraction circuit 13. Thus, the output by the stray light component is eliminated and only original information is obtained as an output with high accuracy.
    • 6. 发明专利
    • SEMICONDUCTOR DEVICE AND PHOTOELECTRIC CONVERSION DEVICE USING SAME
    • JPH02226764A
    • 1990-09-10
    • JP4514489
    • 1989-02-28
    • CANON KK
    • KOBAYASHI ISAOSAIGA TOSHIHIROUMIBE NORIYUKIENDO TADAOSHIMADA TETSUYA
    • H01L27/146H04N1/028H04N5/335H04N5/341H04N5/355H04N5/359H04N5/369H04N5/374
    • PURPOSE:To prevent the generation of crosstalk between each of the output signals of wirings by constituting a matrix wiring and a charge storing means of a laminated structure composed of a first conducting layer, a first insulating layer, a second conducting layer, a second insulating layer, a semiconductor layer, and a third conducting layer, and forming each layer of wirings and each layer of storing means by using the same layers. CONSTITUTION:On a substrate 8, the following are formed; a first conducting layer 22 of Al, Cr and the like, a first insulating layer 23 of SiN and the like, a second conducting layer 24 of Al, Cr and the like, a second insulating layer 25 of SiN and the like, a semiconductor layer 26 of a-Si:H, an ohmic contact layer 27 of a -Si:H and a-Si:H, a third conducting layer 28 of Al, Cr and the like, and a protecting layer 29 of polyimide and the like. By constituting a device in this manner, and making the conductivity of the semiconductor layer 26 change with a reflected light from a manuscript surface, a current flowing between wirings 30 and 31 of upper layer electrodes facing in the form of a comb is made to be changed. A storing capacitor part 2 is constituted of the following; a first electrode wiring 40, the insulating layer 23 thereon, an electrode wiring 33 arranged on the insulating layer 23, the insulating layer 25 arranged on the wiring 33, and a semiconductor layer 26.
    • 8. 发明专利
    • PICTURE READER
    • JPS6392153A
    • 1988-04-22
    • JP23706786
    • 1986-10-07
    • CANON KK
    • ITABASHI SATORUSAIGA TOSHIHIROGOFUKU IHACHIROU
    • H01L27/146H01L27/14H04N1/028
    • PURPOSE:To eliminate the need for a correcting circuit and to reduce the cost of equipment by applying a bias voltage which is different according to the array position of a photosensor to a light shield layer. CONSTITUTION:An original P is irradiated with light L which is incident through the incidence window 19 of a transparent substrate 11 and its reflected light is received by a photosensor part 108 to read out a read signal through electrode wiring. Namely, when the reflected light L is incident on the surface of a semiconductor layer 14 through a photodetection part 118 while a high-potential driving voltage based upon the potential of a main electrode 116 is applied to a main electrode 117, carriers increase and then the resistance decreases, so that the variation is read as image information. At this time, the bias voltage which is different according to the array position of the photosensor is applied to the light shield layer 112 and the distribution of the sensor output is smoothed when the image is read, thereby eliminating the need for the correcting circuit.