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1. 发明专利

JP2006278891A Method for comparing charactristic curve of semic0nductor 审中-公开
标题翻译：比较半导体特征曲线的方法
公开(公告)号：JP2006278891A
公开(公告)日：2006-10-12
申请号：JP2005098431
申请日：2005-03-30
申请人： Agilent Technol Inc , アジレント・テクノロジーズ・インクAgilent Technologies, Inc.
发明人： ISHIZUKA KOJI
IPC分类号： H01L21/66 , H01L21/02
CPC分类号： G01R31/31912 , G01R31/318314
摘要： PROBLEM TO BE SOLVED: To facilitate the speedy grasp of a test result and a device-specific trend. SOLUTION: An analysis system of mesurements of a semiconductor element comprises a display means 30 for displaying the measurements stored in a storing means 20 as a graph in an individual window, an input means 10 for selecting several windows, a mesurement rendering means 210 for storing the information of types of the graphs displayed on several individual windows selected and dislaying the graph of the measuements; and a computing means 40 for laying a position of a graph axis in the case of the same graph type, making transparent only the inside of the display area of one graph and making transparent at least the inside of the display area of the other graph, displaying the one graph as a top window on the display device 30, and making opaque at least the inside of the display area of the graph in the bottom window to lay the other graphs under the one graphs. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了方便快速掌握测试结果和设备特定的趋势。解决方案：半导体元件的测量分析系统包括显示装置30，用于将存储在存储装置20中的测量作为单独窗口中的图形显示，用于选择几个窗口的输入装置10，测量渲染装置 210，用于存储在所选择的几个单独的窗口上显示的图形的类型的信息，并且剔除测量的图形; 以及用于在相同图形类型的情况下放置图形轴的位置的计算装置40，使得仅透明一个图形的显示区域的内部并至少透明另一个图形的显示区域的内部，将一个图形显示为显示装置30上的顶部窗口，并且在底部窗口中至少使图形的显示区域的内部不透明，以将其他图形放置在一个图形下。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2005300324A Method for analyzing measurement data of device under test, program, and measurement data analysis system 审中-公开
标题翻译：用于分析测试，程序和测量数据分析系统中设备的测量数据的方法
公开(公告)号：JP2005300324A
公开(公告)日：2005-10-27
申请号：JP2004116170
申请日：2004-04-09
申请人： Agilent Technol Inc , アジレント・テクノロジーズ・インクAgilent Technologies, Inc.
发明人： ISHIZUKA KOJI
IPC分类号： G01R31/28
CPC分类号： G01R31/2834
摘要： PROBLEM TO BE SOLVED: To facilitate understanding of an operational environment of a measuring device, including the selection of an application for use in the measurement of a device under test, the setting of parameters during the execution, the execution of the measurement, and the display of the result of the execution.
SOLUTION: The operational method in a semiconductor measuring device, having a measurement means, a display means, an input means, a storage means, and a computation/control means for performing the calculation and the control, includes a first form selection step 50 of selecting in the display means the form of the application for the semiconductor measurement evaluation by the input means; a setting/storage step 53 of setting 52 the setting information, required in the execution with respect to the form of the application displayed on the display means by the input means and for storing the setting information in the storage means; a step 55 of executing the application; and first display steps 54, 56, 57, and 58 of storing the executed result and executed result attribute information in the storage device and for displaying them on the display device.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了便于理解测量装置的操作环境，包括选择用于测量被测设备的应用程序，执行期间的参数设置，测量的执行，并显示执行结果。解决方案：具有测量装置，显示装置，输入装置，存储装置和用于执行计算和控制的计算/控制装置的半导体测量装置中的操作方法包括第一形式选择在显示装置中选择由输入装置进行的半导体测量评估的应用形式的步骤50; 设置/存储步骤53，设置在执行中相对于通过输入装置显示在显示装置上的应用的形式所需的设置信息，并将设置信息存储在存储装置中; 执行应用程序的步骤55; 以及第一显示步骤54,56,57和58，其将执行的结果和执行的结果属性信息存储在存储装置中并将其显示在显示装置上。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006234621A Semi-conductor measurement system and its control method 审中-公开
标题翻译：半导体测量系统及其控制方法
公开(公告)号：JP2006234621A
公开(公告)日：2006-09-07
申请号：JP2005050494
申请日：2005-02-25
申请人： Agilent Technol Inc , アジレント・テクノロジーズ・インクAgilent Technologies, Inc.
发明人： ISHIZUKA KOJI
IPC分类号： G01R31/28
CPC分类号： G01R31/31917
摘要： PROBLEM TO BE SOLVED: To provide a measurement system in which a user is capable of easily selecting an objective application and quickly setting up necessary parameters.
SOLUTION: The measurement system comprises: an input means; a display means; a plurality of measurement units; a memory means in which a plurality of application regulating the operation order of the measurement units and a plurality of category related with the application; and a control means provided with functions for displaying the application belonging to the selected category on the display means based on the input from the input means, and for executing the application selected by the input means among the displayed applications and controlling the measurement unit.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种测量系统，其中用户能够容易地选择目标应用并快速设置必要的参数。
解决方案：测量系统包括：输入装置; 显示装置; 多个测量单元; 存储装置，其中调节所述测量单元的操作顺序的多个应用程序和与所述应用程序相关的多个类别; 以及控制装置，其具有用于基于来自输入装置的输入显示属于所选类别的应用的功能，并且用于在所显示的应用程序中执行由输入装置选择的应用程序并控制测量单元。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2006237365A Method and program for managing semiconductor characteristics evaluation device 审中-公开
标题翻译：用于管理半导体特性评估装置的方法和程序
公开(公告)号：JP2006237365A
公开(公告)日：2006-09-07
申请号：JP2005051212
申请日：2005-02-25
申请人： Agilent Technol Inc , アジレント・テクノロジーズ・インクAgilent Technologies, Inc.
发明人： ISHIZUKA KOJI
IPC分类号： H01L21/66 , H01L21/02
CPC分类号： G01R31/31908 , G01R31/2831 , G01R31/2834 , G01R31/31912
摘要： PROBLEM TO BE SOLVED: To provide a testing device for facilitating management and reuse of a test program of a semiconductor characteristics evaluation device, of set data and test result data, in wafer development for a plurality of projects, or its management program.
SOLUTION: A data management method is for the semiconductor characteristics evaluation device 10 including a control unit 12, a memory 60, and input/output parts 13, 14 and 15. The management method includes steps of: selecting a work space containing the test program for testing a plurality of wafer types; storing the test results as a history in the selected work space; and searching for a desired test result from the history of the stored test results.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于促进半导体特性评估装置的测试程序，设定数据和测试结果数据的管理和再利用的测试装置，用于多个项目的晶片开发或其管理程序。解决方案：数据管理方法用于包括控制单元12，存储器60以及输入/输出部分13,14和15的半导体特性评估装置10.管理方法包括以下步骤：选择包含用于测试多个晶片类型的测试程序; 将测试结果作为历史存储在所选择的工作空间中; 并从存储的测试结果的历史中搜索期望的测试结果。版权所有（C）2006，JPO＆NCIPI

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