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1. 发明专利

JPS60194067A Formation of hard film 失效
标题翻译：形成硬膜
公开(公告)号：JPS60194067A
公开(公告)日：1985-10-02
申请号：JP4926884
申请日：1984-03-16
申请人： Agency Of Ind Science & Technol , Showa Denko Kk , Toshiba Tungaloy Co Ltd
发明人： MINETA NOBUSHIGE , YASUNAGA NOBUO , TARUMI NOBORU , OBARA AKIRA , IKEDA MASAYUKI , SATOU JIYUNICHI , SADAHIRO TAKESHI
IPC分类号： C23C14/24 , C23C14/28
CPC分类号： C23C14/28
摘要： PURPOSE:To form easily various kinds of hard films on a substrate by using a laser vapor deposition installation by using graphite, carbon, metal, alloy, metallic compd., ceramics, etc. for forming a rotating body on which convergent laser light is irradiated. CONSTITUTION:Convergent laser light is irradiated on a rotating body under rotation in a vessel and the particles evaporating from the rotating body are deposited on a substrate, thereby forming a hard film thereon. The rotating body is made of a mixture composed of >=2 different materials selected from graphite, carbon, metal, alloy, metallic compd. and ceramics. The construction thereof is columnar, cylindrical body, conical body, disk body, and ring body. If such rotating body is formed of a powder mixture composed of, for example, metallic titanium and carbon, the hard film of titanium carbide can be formed on the substrate. The dense, strong and hard film is formed on the substrate with good adhesion at a high deposition rate by the above-mentioned method.
摘要翻译：目的：通过使用激光蒸镀装置，通过使用石墨，碳，金属，合金，金属组合物，陶瓷等在基板上容易地形成各种硬膜，形成会聚激光的旋转体。构成：在容器内转动的会聚激光照射在旋转体上，从旋转体蒸发的粒子沉积在基板上，由此在其上形成硬膜。旋转体由选自石墨，碳，金属，合金，金属组合物的≥2种不同材料组成的混合物制成。和陶瓷。其结构为圆柱体，圆柱体，圆锥体，圆盘体和环体。如果这样的旋转体由例如金属钛和碳构成的粉末混合物形成，则可以在基板上形成碳化钛的硬膜。通过上述方法，以高沉积速率在基材上形成具有良好粘合性的致密，强硬和硬膜。

2. 发明专利

JPS60194066A Production of hard film-coated material 失效
标题翻译：生产硬质薄膜材料
公开(公告)号：JPS60194066A
公开(公告)日：1985-10-02
申请号：JP4926784
申请日：1984-03-16
申请人： Agency Of Ind Science & Technol , Showa Denko Kk , Toshiba Tungaloy Co Ltd
发明人： MINETA NOBUSHIGE , YASUNAGA NOBUO , TARUMI NOBORU , OBARA AKIRA , IKEDA MASAYUKI , SATOU JIYUNICHI , SHIBUKI KUNIO
IPC分类号： C23C14/24 , C23C14/28
CPC分类号： C23C14/28
摘要： PURPOSE:To obtain a hard film-coated material coated with a dense film having high hardness by controlling the irradiating angle of the convergent laser light irradiated on a rotating body which is a material to be irradiated within a prescribed range and irradiating laser light having large output thereon. CONSTITUTION:Laser light 1 is converged by a condenser lens 2 and is introduced through a transmission window 3 into a vessel 4 where the laser light is irradiated from a tangent direction on the rotating surface of a rotating body 5 formed of a material to be irradiated. The sample to be irradiated existing in the irradiating region is then evaporated and released in an arrow R direction. The released sample is deposited by evaporation on a base material 7. The output of the convergent laser light is made >=500W and the irradiating angle of the convergent laser light on the irradiating region is controlled to 2-40 deg. with respect to the tangent direction in the irradiating region. The kind of the usable material to be irradiated is increased and the rate of forming the film is increased according to the above-mentioned method for forming the coated material. The dense and high-hardness characteristics are given to the resultant hard film.
摘要翻译：目的：通过控制照射在作为被照射材料的旋转体在规定范围内的会聚激光的照射角度并照射具有高硬度的激光，来获得涂覆有具有高硬度的致密膜的硬膜涂覆材料在其上输出。构成：激光1由聚光透镜2会聚，并通过透射窗3被引入到容器4中，在该容器4中，激光从由被照射材料形成的旋转体5的旋转表面上的切线方向照射。然后将存在于照射区域中的被照射样品蒸发并沿箭头R方向释放。将释放的样品通过蒸发沉积在基材7上。会聚激光的输出为= 500W，会聚激光的照射角度照射在照射区域上，控制在2-40度。相对于照射区域的切线方向。根据上述涂布材料的形成方法，能够照射的材料的种类增加，并且成膜速度提高。给出所得硬膜的致密和高硬度特性。

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