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    • 7. 发明专利
    • REFRIGERATING CHUCKING METHOD AND DEVICE THEREFOR
    • JPH06246567A
    • 1994-09-06
    • JP3065593
    • 1993-02-19
    • HATAMURA YOTAROASAHI GLASS CO LTD
    • HATAMURA YOTAROANDO HIROSHI
    • B23Q3/08
    • PURPOSE:To prevent the deformation of a workpiece at the refrigerating chucking time by forming such structure that a liquid medium freezing method can be set optionally in the case of freezing the liquid medium supplied between the workpiece and a workpiece placing table so as to fix the workpiece rigidly to the table. CONSTITUTION:At the time of using a refrigerating chuck device 30, a cooler part 42 is operated first to supply cooled refrigerant to the passage 32A of a table 32 so as to cool the surface 32B of the table 32. A heating signal based on the freezing pattern of water is then outputted to a driver 36 from a controller 40 so as to apply voltage to heater members 44. The surface 32B of the table 32 is heated to freeze water according to the freezing pattern. At this time, the controller 40 compares the freezing pattern temperature of water with the detected temperature of a temperature sensor 48 and performs the feedback control of the driver 36. A workpiece 41 is rigidly fixed to the surface 32B of the table 32 by the freezing of water, and the surface of the workpiece 41 is machined by a polishing pad.