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1. 发明专利

JPH01172563A FORMATION OF HIGH-PURITY FILM 失效
公开(公告)号：JPH01172563A
公开(公告)日：1989-07-07
申请号：JP33117287
申请日：1987-12-26
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI ELECTRIC CORP
发明人： KIUCHI MASATO , SATO MAMORU , FUJII KANEYOSHI , YOSHIDA KOREKAZU , HASHIMOTO YOICHI , MAEYAMA NORITAKA
IPC分类号： H01L21/203 , C23C14/24 , C23C14/32 , C23C14/34 , C23C14/48
摘要： PURPOSE:To form a high-purity metallic vacuum-deposited layer with superior adhesive strength by simultaneously applying the ions of an inert element at the time of vacuum-depositing a metal onto the surface of a work by a vacuum vapor deposition method. CONSTITUTION:The inside of a vacuum vessel 11 is evacuated via an outlet 10, and one kind among the gases of inert elements, such as Ar, Ne, Kr, and Xe, is introduced via a gas-introducing hole 8 to form a reduced pressure region of the order of 10 torr. The grains of the above inert gas are formed into positive ions by means of an electron shower from an electron radiation source 7 and accelerated by means of an accelerating electrode 6 on which a negative voltage of 5-60kV is impressed, with which the surface of a substrate 1 is irradiated by 1X10 -3X10 ion/mm .sec quantity of irradiation. Simultaneously, a metal 5 for vacuum deposition, such as Ti and Al, is heated and evaporated by means of an electron beam gun 3, which is vacuum-deposited onto the surface of the substrate 1. By this method, the vacuum-deposited film of extremely high-purity Ti or Al can be vacuum-deposited at a rate of 1-200Angstrom /sec with superior adhesive strength.

2. 发明专利

JPH01172564A FORMATION OF FILM AT HIGH SPEED 失效
公开(公告)号：JPH01172564A
公开(公告)日：1989-07-07
申请号：JP33117387
申请日：1987-12-26
申请人： AGENCY IND SCIENCE TECHN , MITSUBISHI ELECTRIC CORP
发明人： KIUCHI MASATO , SATO MAMORU , FUJII KANEYOSHI , YOSHIDA KOREKAZU , HASHIMOTO YOICHI , MAEYAMA NORITAKA
IPC分类号： H01L21/203 , C23C14/24 , C23C14/32 , C23C14/34 , C23C14/48
摘要： PURPOSE:To form a metallic vacuum-deposited film at high speed without applying excessive energy to a vacuum deposition source by simultaneously irradiating the ions of an inert element at the time of vacuum-depositing a metal onto the surface of a work by a vacuum vapor deposition method. CONSTITUTION:The inside of a vacuum vessel 11 is evacuated through an outlet 10, and one kind among inert gases of Ar, Xe, Kr, Ne, etc., is introduced through a gas- introducing hole 8 to form a reduced-pressure atmosphere of the order of 10 torr. The inert gas is formed into positive ions by means of an electron shower from an electron radiation source 7 and then accelerated by means of an accelerating electrode 6 on which a negative voltage of 1-80kV is impressed, with which the surface of a substrate 2 is irradiated by 1X10 -1X10 ion/mm .sec quantity of irradiation. Simultaneously, a metal 5, such as Ti and Al, in a crucible 4 is heated and evaporated by means of an electron beam gun 3, by which a vacuum-deposited film of Ti or Al is formed at a speed as high as 5-200Angstrom /sec. By this method, the metallic vacuum- deposited film can be formed at high speed by means of inert gas ion irradiation without applying excessive energy to the metal 5 in the crucible and, as a result, the early damage of the crucible 4 due to excessive energy can be prevented.

3. 发明专利

JPH0116348B2 失效
公开(公告)号：JPH0116348B2
公开(公告)日：1989-03-23
申请号：JP10148783
申请日：1983-06-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： SUGIHARA MASAHIRO , MORISHITA ETSUO , MAEYAMA NORITAKA
IPC分类号： F04C18/02 , F01C1/02 , F04C29/02

4. 发明专利

JPS6153953B2 失效
公开(公告)号：JPS6153953B2
公开(公告)日：1986-11-20
申请号：JP5343181
申请日：1981-04-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： MATSUNAGA HIROYUKI , MAEYAMA NORITAKA
IPC分类号： B32B37/00 , B29C63/00 , B32B43/00

5. 发明专利

JPS61167190A SCROLL TYPE COMPRESSOR 失效
公开(公告)号：JPS61167190A
公开(公告)日：1986-07-28
申请号：JP246386
申请日：1986-01-09
申请人： MITSUBISHI ELECTRIC CORP
发明人： SUGIHARA MASAHIRO , MORISHITA ETSUO , MAEYAMA NORITAKA
IPC分类号： F04C18/02 , F04C29/02
摘要： PURPOSE:To aim at enhancing the lubrication of a scroll type compressor, by journalling a crankshaft in the radial direction with the use of a shaft hole, and by journalling a bed plate in the thrust direction with the use of a thrust bearing having a simple structure so that there is formed a circulation cycle from an oil sump through the shaft hole, the thrust bearing and a return hole to the oil sump. CONSTITUTION:A shaft hole 16 into which a crankshaft 17 is journalled in the radial direction and a thrust bearing which supports a bed plate 7 for a swingable scroll in the thrust direction, are provided in a body 13. With this arrangement, the structure of the bearing may be simplified, and further since the thrust bearing is formed in the peripheral section of the shaft hole 16, it supports the high pressure sections of compression chambers 4, 5 so that it is possible to prevent the bed plate 7 for the swingable scroll from being distorted and to shorten the length of an oil supply system upto the thrust bearing 13. Therefore, smooth lubrication may be carried out. Further, the slide surfaces of both shaft hole 16 and thrust bearing are formed therein with oil holes 21, 22, 25, etc. and a series of lubrication cycle in which oil lubricated a slide surface 15 is returned into an oil sump 42a through an oil return hole 54, thereby it is possible to prevent the slide surfaces from being seized.

6. 发明专利

JPS5928088A Scroll compressor 失效
标题翻译：滚动压缩机
公开(公告)号：JPS5928088A
公开(公告)日：1984-02-14
申请号：JP10148883
申请日：1983-06-06
申请人： Mitsubishi Electric Corp
发明人： SUGIHARA MASAHIRO , MORISHITA ETSUO , MAEYAMA NORITAKA
IPC分类号： F04C23/02 , F01C1/02 , F04C23/00
CPC分类号： F04C23/008
摘要： PURPOSE:To reduce the axial length of a scroll compressor, by disposing a bearing for supporting the lower end portion of a crank shaft on the inside of a bottom plate, and increasing the length of a crank shaft supporting span. CONSTITUTION:A rotor 8 of a motor produces torque and is turned together with a crank shaft 6. When the crank shaft 6 begins to rotate, a gas is compressed by eccentric oscillating motion and the compressed gas is discharged from a discharge port 3. A gas such as Freon gas is introduced into the compressor from a threaded suction hole 28 formed in a bottom plate 27, and passing through an air gas formed between the rotor 8 and a stator 9 of the motor and clearance formed between the stator 9 and a shell 23 of the motor, is carried from a suction port formed in a bearing support 7 into a compression chamber 4 formed between the oscillating scroll 2 and a fixed scroll 1. By employing such an arrangement, it is enabled to reduce the axial length of a scroll compressor.
摘要翻译：目的：为了减小涡旋压缩机的轴向长度，通过在底板的内侧设置用于支撑曲轴的下端部的轴承，并且增大曲轴的支撑跨度的长度。构成：马达的转子8产生扭矩并与曲轴6一起转动。当曲轴6开始转动时，气体通过偏心摆动运动被压缩，并且压缩气体从排出口3排出。诸如氟利昂气体的气体从形成在底板27中的螺纹吸入孔28引入压缩机，并且通过形成在转子8和电动机的定子9之间的空气气体，并形成在定子9和电动机的外壳23从形成在轴承座7上的吸入口运送到形成在摆动涡旋件2和固定涡旋件1之间的压缩室4.通过采用这种结构，能够减小轴向长度涡旋压缩机。

7. 发明专利

JPS5891388A SCROLL FLUID MACHINE 失效
公开(公告)号：JPS5891388A
公开(公告)日：1983-05-31
申请号：JP18859081
申请日：1981-11-24
申请人： MITSUBISHI ELECTRIC CORP
发明人： NAKAMURA TOSHIYUKI , IIZAKA KATSUYOSHI , MAEYAMA NORITAKA
IPC分类号： F04C18/02 , F01C1/02
摘要： PURPOSE:To facilitate manufacturing of the core member of a scroll and to shorten the time required for machining, by forming precision coating of a resin over the surfaces of scroll members facing toward each other. CONSTITUTION:The core member 2' of an oscillating scroll 2 is prefabricated with a material such as castings or steel satisfying a required strength and rigidity, and a precision coating layer of a resin 13 or the like is formed over the surface of the core member 2'. Here, since the scroll section of the core member 2' can be used as cast or after subjecting the same to rough finishing, it is enabled to shorten the time required for manufacturing the scroll considerably.

8. 发明专利

JPS57131895A SCROLL COMPRESSOR 失效
公开(公告)号：JPS57131895A
公开(公告)日：1982-08-14
申请号：JP20868181
申请日：1981-12-21
申请人： MITSUBISHI ELECTRIC CORP
发明人： SUGIHARA MASAHIRO , MORISHITA ETSUO , MAEYAMA NORITAKA
IPC分类号： F04C23/02 , F01C1/02 , F04C29/00
摘要： PURPOSE:To miniaturize the whole unit of a compressor and decrease its weight, by equipping the first balance weight to the space, formed between the bearing back side of a rocking scroll and the coil end of an electric motor stator, further devising shape of the balance weight. CONSTITUTION:The first balance weight 10 is fixed to the key groove of a crankshaft 6 by a key inserted into a key groove 74 provided in a fixed part 73. To miniaturize the whole unit of a compressor, a balance weight 71 is equipped through a cylindrical part 72 so that it may be located in the space formed between a bearing 7 and electric motor stator 9. While the balance weight 71 is axially approximated extremely to a rocking scroll 2 further radially separated from the center of the crankshaft 6 as far as possible, and this obtains the smaller mass of the balance weight 71. In this construction, the compressor can be miniaturized and decreased its weight.

9. 发明专利

JPH0158001B2 失效
公开(公告)号：JPH0158001B2
公开(公告)日：1989-12-08
申请号：JP15335384
申请日：1984-07-24
申请人： MITSUBISHI ELECTRIC CORP
发明人： KODERA SUNAO , MAEYAMA NORITAKA , YAMASHITA MIKIO , YOSHIDA AKIO
IPC分类号： B23B1/00 , B23B5/00 , B23P25/00 , B23Q3/08

10. 发明专利

JPH0116345B2 失效
公开(公告)号：JPH0116345B2
公开(公告)日：1989-03-23
申请号：JP10148483
申请日：1983-06-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： SUGIHARA MASAHIRO , MORISHITA ETSUO , MAEYAMA NORITAKA
IPC分类号： F04C18/02 , F01C1/02 , F01C21/02

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