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    • 10. 发明专利
    • Dry vacuum pump device
    • JP5373691B2
    • 2013-12-18
    • JP2010096540
    • 2010-04-19
    • 株式会社荏原製作所
    • 一磨 伊東敦 大山克明 臼井
    • F04B37/16F04B39/06
    • PROBLEM TO BE SOLVED: To provide a dry vacuum pump device enabling miniaturization of the entire device by cooling with a high efficiency cooling means with a cooling liquid large current circuit component parts of a large self heat generation amount represented by an switching element constituting an inverter in a dry vacuum pump device driven by an inverter. SOLUTION: The dry vacuum pump device converts an alternating current power from an alternating current power source 19 to a direct current power of a predetermined voltage via a rectifier 13 and a DC/DC conversion circuit 16, and converts the same to an alternating current power of a predetermined frequency with an inverter 17 for supplying the same to an electric motor 11 for driving a dry vacuum pump 12. It comprises an electric equipment enclosure 21 for storing the entire control electronic circuit including the inverter 17, a pump enclosure 22 for storing the dry vacuum pump 12 and operation monitoring sensors, and a liquid cooling partition wall 23 disposed betwen the electric equipment enclosure 21 and the pump enclosure 22 for circulation of a cooling liquid in the inside for providing an enclosure 24 integrally. COPYRIGHT: (C)2012,JPO&INPIT