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    • 7. 发明专利
    • Laser dicing method
    • JP4826773B2
    • 2011-11-30
    • JP2006225395
    • 2006-08-22
    • 株式会社デンソー
    • 篤 小邑和彦 杉浦宗生 田村祐嗣 舩戸
    • B23K26/38B23K26/40B23K101/40B28D5/00H01L21/301
    • PROBLEM TO BE SOLVED: To provide a laser dicing method capable of performing a proper cut-off work while reducing a forming range of a reformed layer. SOLUTION: In a laser dicing method 20, a forming space Sb of a reformed layer kb positioned in a pressure side range hb is set more narrowly than a forming space Sa of the reformed layer ka positioned in an incident side range ha at an opposite side thereof. Thereby, since the reformed layer kb is formed concentrated in the pressure side range hb on the side near a rear surface Wb pressurized at the time of cut-off work, although the reformed layer ka is formed in the incident side range ha on the side far from the rear surface Wb pressurized in the cut-off work, the cut-off work becomes possible without increasing more crack density than what is necessary, owing to a succession of cracks starting from the pressure side range hb on the side near the rear surface Wb. Therefore, it becomes possible to perform the proper cut-off work while reducing the number of the reformed layers ka compared with the case of forming as much reformed layers ka, kb as possible in the direction of thickness of the cut-off portion Dev. COPYRIGHT: (C)2007,JPO&INPIT