会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明专利
    • Servo type vibration sensors and vibration control device
    • JP5322710B2
    • 2013-10-23
    • JP2009058692
    • 2009-03-11
    • 特許機器株式会社
    • 照雄 丸山正志 安田
    • G01H11/06F16F15/02G01H1/00G05D19/02H01L21/027
    • PROBLEM TO BE SOLVED: To provide a servo vibration sensor for directly detecting, in a wide frequency range, absolute velocity or absolute displacement of a controlling object that vibrates by undergoing a disturbance relative to inertial space, and a vibration controller using this vibration sensor, such as an active precision vibration-free table or an active dynamic vibration absorber. SOLUTION: This servo vibration sensor includes a support spring supporting a mass body with respect to a sensor outer hull, a detector for detecting relative displacement between the outer hull and the mass body, an actuator disposed between the outer hull and the mass body for driving the mass body as a load, and a servo circuit for feeding back a relative displacement signal obtained from the detector to a drive section of the actuator. In order to detect absolute ground motion velocity or absolute ground motion displacement, an amplifier for integral feedback is disposed in the servo circuit of the sensor to take out a detection signal from the amplifier. Further, ingenuity is exerted in the pole structure of this integrator and in a method of taking out the detection signal, thereby allowing the gain-phase characteristic to be made flat in a wide detection range. COPYRIGHT: (C)2011,JPO&INPIT