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1. 发明专利

JP2012151071A Mems switch and manufacturing method thereof 有权
标题翻译： MEMS开关及其制造方法
公开(公告)号：JP2012151071A
公开(公告)日：2012-08-09
申请号：JP2011010834
申请日：2011-01-21
申请人： Fujitsu Ltd , 富士通株式会社
发明人： KATSUKI TAKASHI , NAKATANI TADASHI , OKUDA HISAO , SHIMAUCHI TAKEAKI , UEDA TOMOSHI
IPC分类号： H01H59/00 , B81B3/00 , H01H49/00
摘要： PROBLEM TO BE SOLVED: To solve a new problem which arose when an attempt was made to adopt a new structure for a microswitch making use of a cantilever.SOLUTION: A MEMS switch includes an SOI substrate having active Si layers coupled via a bonding oxide film on a support Si substrate; a cantilever region defined in the active Si layer by slits penetrating the active Si layer; a fixed portion surrounding a cavity and the cantilever region, the cavity being formed between the cantilever region and the support Si substrate by removing the bonding oxide film beneath the cantilever region; a movable contact electrode extending from the cantilever region to the fixed portion; a first region of the active Si layer adjacent to the cavity, surrounded by slits penetrating the active Si layer except for a coupling region, and contiguous via the coupling region to the active Si layer in an adjacent region of the fixed portion; and a fixed contact electrode supported in the first region of the active Si layer and having an overhang portion above the movable contact electrode.
摘要翻译：要解决的问题：为了解决在采用采用悬臂的微动开关的新结构的尝试时出现的新问题。解决方案：MEMS开关包括具有通过支撑Si衬底上的接合氧化膜耦合的有源Si层的SOI衬底; 通过穿透有源Si层的狭缝在有源Si层中限定的悬臂区域; 围绕空腔和悬臂区域的固定部分，通过去除悬臂区域下方的结合氧化膜，在悬臂区域和支撑体Si衬底之间形成空腔; 从所述悬臂区域延伸到所述固定部分的可动接触电极; 邻近空腔的有源Si层的第一区域被除了耦合区域之外的穿透有源Si层的狭缝围绕，并且通过耦合区域连接到固定部分的相邻区域中的有源Si层; 以及支撑在有源Si层的第一区域中并且在可动接触电极上方具有突出部分的固定接触电极。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2012125894A Electronic device and its manufacturing method 有权
标题翻译：电子设备及其制造方法
公开(公告)号：JP2012125894A
公开(公告)日：2012-07-05
申请号：JP2010280534
申请日：2010-12-16
申请人： Fujitsu Ltd , 富士通株式会社
发明人： INOUE HIROAKI , NAKATANI TADASHI , KATSUKI TAKASHI , UEDA TOMOSHI
IPC分类号： B81C3/00 , B81B3/00 , H01G4/33 , H01G7/00 , H01L23/02 , H01L23/10
摘要： PROBLEM TO BE SOLVED: To reduce an amount of outgassing remaining in an electronic device after sealing, in the electronic device, and to provide its manufacturing method.SOLUTION: The method for manufacturing the electronic device has the steps of: forming an underlying film 21 on a substrate 20; forming a seal 25b made by exposure and development of photosensitive resin on the underlying film 21; curing the seal 25b by heating the seal 25b; sealing a switching element 19 with the seal 25b by attaching the seal 25b to the switching element 19 formed on the substrate 1; and peeling off the substrate 1 from the seal 25b with the underlying film 21 as a border after sealing.
摘要翻译：要解决的问题：为了减少密封后的电子设备中的除气量，在电子设备中，并提供其制造方法。解决方案：用于制造电子器件的方法具有以下步骤：在衬底20上形成下面的膜21; 形成通过在下面的膜21上曝光和显影感光树脂制成的密封件25b; 通过加热密封件25b来固化密封件25b; 通过将密封件25b附接到形成在基板1上的开关元件19来密封具有密封件25b的开关元件19; 并且在密封之后以下面的膜21为边界从密封件25b剥离基板1。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2009032283A Touch panel device 有权
标题翻译：触摸板设备
公开(公告)号：JP2009032283A
公开(公告)日：2009-02-12
申请号：JP2008258913
申请日：2008-10-03
申请人： Fujitsu Ltd , 富士通株式会社
发明人： TAKAHASHI YUJI , NAKAZAWA FUMIHIKO , SANO SATOSHI , KATSUKI TAKASHI
IPC分类号： G06F3/043 , G06F3/041
摘要： PROBLEM TO BE SOLVED: To provide a touch panel device for enhancing detection precision of a contact position of an object, by correcting an increment of a contact width caused by a burst wave. SOLUTION: A comparison part 59 compares an actually measured time domain waveform received by a reception part 4, with a reference slice time domain waveform stored in a slice data memory 56, and a detection result obtained from a comparison result therein is temporarily stored in a RAM 53. A correction part 60 corrects detection data stored in the RAM 53, by the minimum contact width determined by the generation frequency of a surface acoustic wave, electrode constitution and a velocity of the surface acoustic wave. The contact width in a diagonal part is acquired as an average value of histories of the contact widths in the past stored in the RAM 53. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于通过校正由突发波引起的接触宽度的增加来提高对象的接触位置的检测精度的触摸面板装置。解决方案：比较部分59将由接收部分4接收的实际测量的时域波形与存储在切片数据存储器56中的参考切片时域波形进行比较，并从其中比较结果获得的检测结果暂时地存储在RAM53中。校正部分60通过由表面声波的产生频率，电极结构和表面声波的速度确定的最小接触宽度来校正存储在RAM 53中的检测数据。获取对角线部分中的接触宽度作为存储在RAM 53中的过去的接触宽度的历史的平均值。（C）2009年，JPO和INPIT

4. 发明专利

JP2008172807A Piezoelectric element, manufacturing method thereof and touch panel apparatus 审中-公开
标题翻译：压电元件及其制造方法及触控面板设备
公开(公告)号：JP2008172807A
公开(公告)日：2008-07-24
申请号：JP2008017007
申请日：2008-01-29
申请人： Fujitsu Ltd , 富士通株式会社
发明人： KATSUKI TAKASHI , NAKAZAWA FUMIHIKO , SANO SATOSHI , TAKAHASHI YUJI
IPC分类号： H03H9/145 , G06F3/041 , G06F3/043 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H01L41/39 , H03H3/08 , H03H9/25
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element with high electromechanical conversion efficiency, manufacturing method thereof, and a SAW type touch panel apparatus with such a piezoelectric element as an exciting means and a receiving means. SOLUTION: A piezoelectric element X is equipped with a substrate 11 constituted of a non-piezoelectric material, a piezoelectric film 12 and electrodes 13, 14. The electrode 13 and/or the electrode 14 is interposed between the substrate 11 and the piezoelectric film 12 and made of Al alloy containing, in an amount of 0.1-3 wt.%, a metal selected from a group of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有高机电转换效率的压电元件，其制造方法以及具有作为激励装置的压电元件和接收装置的SAW型触摸面板装置。解决方案：压电元件X配备有由非压电材料，压电膜12和电极13,14组成的基板11.电极13和/或电极14介于基板11和压电薄膜12，由含有0.1-3重量％的选自Ti，Cr，Ni，Cu，Zn，Pd，Ag，Hf，W，Pt和Au的金属的Al合金制成。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2008058066A Vibration sensor 审中-公开
标题翻译：振动传感器
公开(公告)号：JP2008058066A
公开(公告)日：2008-03-13
申请号：JP2006233434
申请日：2006-08-30
申请人： Fujitsu Ltd , Fujitsu Media Device Kk , 富士通メディアデバイス株式会社 , 富士通株式会社
发明人： YAMAJI TAKAYUKI , ISHIKAWA HIROSHI , KATSUKI TAKASHI , TAKAHASHI YUJI , NAKAZAWA FUMIHIKO
IPC分类号： G01C19/56 , G01C19/5621 , G01C19/5628 , G01P15/08 , H01L41/08 , H01L41/187
CPC分类号： G01C19/5607
摘要： PROBLEM TO BE SOLVED: To provide a vibration sensor improved in sensitivity. SOLUTION: The vibration sensor comprises: a tuning-fork type vibrator (10) having a base section and a plurality of arm sections (11, 12) extending from the base section; an installation section (20) for installing the tuning-fork type vibrator; and a plurality of support sections (32) for installing the tuning-fork type vibrator (10) in the installation section (20). The impedance of the tuning-fork type vibrator (10) is reduced, thereby improving the sensitivity of the vibration sensor. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供灵敏度提高的振动传感器。解决方案：振动传感器包括：音叉式振动器（10），具有基部和从基部延伸的多个臂部（11,12）; 用于安装音叉式振动器的安装部分（20）; 以及用于将音叉式振动器（10）安装在安装部（20）中的多个支撑部（32）。音叉式振动器（10）的阻抗减小，从而提高振动传感器的灵敏度。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2007048915A Semiconductor device 审中-公开
标题翻译：半导体器件
公开(公告)号：JP2007048915A
公开(公告)日：2007-02-22
申请号：JP2005231363
申请日：2005-08-09
申请人： Fujitsu Ltd , Fujitsu Media Device Kk , 富士通メディアデバイス株式会社 , 富士通株式会社
发明人： YAMAJI TAKAYUKI , ISHIKAWA HIROSHI , KATSUKI TAKASHI , TAKAHASHI YUJI , NAKAZAWA FUMIHIKO , SANO SATOSHI
IPC分类号： H01L25/065 , H01L25/07 , H01L25/18
CPC分类号： G01C19/5719 , B81B2201/0242 , B81B2201/042 , B81B2207/097 , B81C1/00301 , H01L2224/48137 , H01L2224/73265 , H01L2924/30107 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor device which can easily and electrically be connected to an outside and can prevent damages of a chip.
SOLUTION: In the semiconductor device, a chip has a support semiconductor layer (10), an insulating layer (12) provided on the support semiconductor layer (10), and an upper semiconductor layer (14) provided on the insulating layer (12). The chip has a mounting board (30) mounted on the side of the support semiconductor layer, and a connecting means (22) (wire) which passes through an opening formed in the upper semiconductor layer (14) and the insulating layer (12) of the chip to be electrically connected from the surface of the support semiconductor layer.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供可以容易地和电连接到外部并且可以防止芯片损坏的半导体器件。解决方案：在半导体器件中，芯片具有支撑半导体层（10），设置在支撑半导体层（10）上的绝缘层（12）和设置在绝缘层上的上半导体层（14）（12）。芯片具有安装在支撑半导体层一侧的安装板（30），以及穿过形成在上半导体层（14）和绝缘层（12）中的开口的连接装置（导线）的芯片从支撑半导体层的表面电连接。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2007033330A Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：JP2007033330A
公开(公告)日：2007-02-08
申请号：JP2005219253
申请日：2005-07-28
申请人： Fujitsu Ltd , Fujitsu Media Device Kk , 富士通メディアデバイス株式会社 , 富士通株式会社
发明人： ISHIKAWA HIROSHI , SANO SATOSHI , KATSUKI TAKASHI , TAKAHASHI YUJI , NAKAZAWA FUMIHIKO , YAMAJI TAKAYUKI
IPC分类号： G01C19/56 , G01C19/5705
CPC分类号： G01C19/5719
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of improving detection sensitivity. SOLUTION: The angular velocity sensor comprises a first gimbal section 10, a second gimbal section 20 connected to the first gimbal section through first torsion bars 12 disposed on facing side surfaces of the first gimbal section, a frame section 30 connected to the second gimbal section through second torsion bars 22 disposed on facing side surfaces of the second gimbal section, a first electrostatic coupling section 14 for electrostatically coupling the first gimbal section to the second gimbal section, and a second electrostatic coupling section 24 for electrostatically coupling the second gimbal section to the frame section. A maximum width of the first or second gimbal section in the direction of the first or second torsion bar is larger than width between the side surfaces of the first or second gimbal section having the first or second torsion bar. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够提高检测灵敏度的角速度传感器。角速度传感器包括第一万向架部分10，第二万向节部分20，其通过设置在第一万向节部分的相对侧表面上的第一扭杆12连接到第一万向节部分，框架部分30连接到第一万向节部分通过设置在第二万向节部分的相对侧面上的第二扭杆22构成的第二万向节部分，用于将第一万向节部分静电耦合到第二万向节部分的第一静电耦合部分14和用于静电耦合第二万向节到框架部分。第一或第二万向节部分在第一或第二扭杆的方向上的最大宽度大于具有第一或第二扭杆的第一或第二万向节部分的侧表面之间的宽度。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2006059169A Touch panel device and manufacturing method 有权
标题翻译：触摸屏设备和制造方法
公开(公告)号：JP2006059169A
公开(公告)日：2006-03-02
申请号：JP2004241065
申请日：2004-08-20
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SANO SATOSHI , KATSUKI TAKASHI , TAKAHASHI YUJI , NAKAZAWA FUMIHIKO
IPC分类号： G06F3/041 , G06F3/043
CPC分类号： G06F3/0436
摘要： PROBLEM TO BE SOLVED: To reduce the width of a frame of a touch panel device as much as possible while preventing increase in thickness of the touch panel device. SOLUTION: Each transducer 20 of the touch panel device comprises a piezoelectric thin film 21, a flat electrode 22 arranged on one surface of the thin film 21, and a comb-shaped electrode 23 arranged on the other surface of the thin film 21, the electrode having a plurality of comb electrode fingers 24 and a linear bus electrode 25 connected to the one-side ends thereof. A plurality of wiring electrodes 30 and 31 connected to the bus electrode 25 and flat electrode 22 of any transducer are provided on the outside of any transducer in parallel to the bus electrode 25 of this transducer. Each of the wiring electrodes 30 and 31 comprises an electrode base part 301, 311 formed by printing a silver paste of fine grains on a surface of a substrate 11 and an electrode body 302, 312 formed by printing a silver paste of a mixture of large grains and fine grains on the electrode base part. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了尽可能减小触摸面板装置的框架的宽度，同时防止触摸面板装置的厚度增加。解决方案：触摸面板装置的每个换能器20包括压电薄膜21，布置在薄膜21的一个表面上的平坦电极22和布置在薄膜的另一个表面上的梳状电极23 如图21所示，电极具有多个梳状电极指24和与其一侧端连接的线性总线电极25。连接到总线电极25和任何换能器的平坦电极22的多个布线电极30和31设置在与该换能器的总线电极25并联的任何换能器的外部。每个布线电极30和31包括通过在基板11的表面上印刷细粒的银浆而形成的电极基部301,311和通过印刷大尺寸的混合物的银浆形成的电极体302,312而形成的电极基体上的晶粒和细晶粒。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005129082A Touch panel device 有权
标题翻译：触摸板设备
公开(公告)号：JP2005129082A
公开(公告)日：2005-05-19
申请号：JP2005028180
申请日：2005-02-03
申请人： Fujitsu Ltd , 富士通株式会社
发明人： TAKAHASHI YUJI , NAKAZAWA FUMIHIKO , SANO SATOSHI , KATSUKI TAKASHI
IPC分类号： G06F3/043 , G06F3/03 , G06F3/033 , G06F3/041
摘要： PROBLEM TO BE SOLVED: To provide a touch panel device capable of exciting a surface acoustic wave at an optimum frequency from an excitation means for reception with a high gain. SOLUTION: In starting the device or at a predetermined time interval during operation of the device, a frequency f 2 giving a reception signal at a maximum level in a reception element 33 is decided by exciting an IDT 36 of an excitation element 32 while a frequency is varied within a range from Δf below an approximation f 1 of a current driving frequency f to Δf above the approximation f 1 , and afterward, the decided frequency f2 is used as a driving frequency. Since a burst wave is applied at an optimally controlled frequency, the reception can be carried out with a high gain. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够以高增益的用于接收的激励装置以最佳频率激发表面声波的触摸面板装置。解决方案：在设备操作期间启动设备或以预定的时间间隔，在接收元件33中给出最大电平的接收信号的频率f SB <2> SB通过激励频率在从当前驱动频率f的近似值F 1 以下的范围内变化的范围内的激励元件32的IDT 36，高于近似f 1 的Δf，之后，将所确定的频率f2用作驱动频率。由于以最佳控制的频率施加脉冲波，所以可以以高增益进行接收。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005100474A Touch panel device 有权
标题翻译：触摸板设备
公开(公告)号：JP2005100474A
公开(公告)日：2005-04-14
申请号：JP2005005706
申请日：2005-01-12
申请人： Fujitsu Ltd , 富士通株式会社
发明人： SANO SATOSHI , NAKAZAWA FUMIHIKO , MATSUDA TAKASHI , SATO YOSHIO , KATSUKI TAKASHI , TAKAHASHI YUJI
IPC分类号： G06F3/043 , G06F3/03 , G06F3/033 , G06F3/041
摘要： PROBLEM TO BE SOLVED: To provide a touch panel device capable of enhancing position detection precision (resolution of a detected position) of an object (a finger or a pointing device) in touch even with a small-sized configuration. SOLUTION: Surface acoustic waves are excited in two vertically opposite angle directions from IDTs 6, 6 (exciting elements) on the upper limb side and the lower limb side of a non-piezoelectric substrate 1, surface acoustic waves propagating on a detected area 1a are received by IDTs 6, 6 (receiving elements) on the left hand side and the right hand side and, on the basis of the reception result, a position of an object in touch with the non-piezoelectric substrate 1 is detected. Comb-shaped electrode fingers 5 range to an electrode base in a manner that the respective IDTs 6 are bent in the middle from opposing two electrode bases (a signal electrode 7 and a ground electrode 8). COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使使用小尺寸配置，也能够提供能够提高对象（手指或指示装置）的位置检测精度（检测位置的分辨率）的触摸面板装置。解决方案：表面声波在与非压电基片1的上肢侧和下肢侧的IDT6,6（激发元件）两个垂直相反的角度方向上被激发，表面声波在检测到的区域1a由左侧和右侧的IDT6,6（接收元件）接收，并且基于接收结果检测与非压电基板1接触的物体的位置。梳状电极指5以相应的IDT6从相对的两个电极基座（信号电极7和接地电极8）在中间弯曲的方式到电极基座。版权所有（C）2005，JPO＆NCIPI

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