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    • 6. 发明专利
    • The formation of the carbon nanotube method and forming apparatus
    • JP4765584B2
    • 2011-09-07
    • JP2005343131
    • 2005-11-29
    • 日新電機株式会社
    • 雅文 中野隆生 原田里佐 宇都宮均 松本
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a method and an apparatus for forming carbon nanotube (CNT) by which the CNT is formed into a desired form while suppressing the fluctuation of the form of the CNT on each substrate surface and is formed with excellent reproducibility while suppressing the fluctuation of the form of the CNT between the substrates in the method and the apparatus for forming the CNT by the thermal CVD method on a catalytic layer of the substrate on which the catalytic layer is formed. SOLUTION: The substrate S on which the catalytic layer C is formed is disposed in a reaction vessel 1, the atmosphere in the vessel 1 is turned to a replacing gas atmosphere, the gas pressure in the vessel 1 is set to pressure lower than CNT-forming gas pressure and the substrate catalytic layer C is heated to a CNT-forming temperature. On the other hand, a gas containing a CNT forming raw material gas is filled and sealed in a gas filling part 5. The gas filled and sealed in the gas filling part 5 is introduced into the vessel 1 all at once based on the difference between the pressure of the filled and sealed gas and the pressure of the gas in the vessel 1 to form the CNT by the thermal CVD method on the catalytic layer C heated by the gas. COPYRIGHT: (C)2006,JPO&NCIPI