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1. 发明专利

JP5502644B2 X-ray detection system 有权
公开(公告)号：JP5502644B2
公开(公告)日：2014-05-28
申请号：JP2010171612
申请日：2010-07-30
申请人：国立大学法人東北大学 , 日本電子株式会社
发明人：正己寺内 , 孝訓村野 , 信雄飯田 , 秀之高橋
IPC分类号： H01J37/244 , G01N23/225 , G21K1/00 , G21K1/04 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To perform measurements on wide energy regions in the system which diffracts, with a diffraction grating, the characteristic X-ray from a sample irradiated with an electron beam and collects spectra with an image sensor.SOLUTION: An X-ray detection system comprises: an electron beam irradiation part for irradiating a sample with an electron beam; a diffraction grating for receiving a characteristic X-ray emitted from the sample irradiated with the electron beam to generate a diffraction X-ray; a splitter for distributing the advance of the diffraction X-ray so as to distribute the imaging faces of the diffraction X-ray to a plurality of positions in the direction orthogonal to the energy dispersion direction of the diffraction X-ray; and a plurality of image sensors, disposed on each of a plurality of imaging faces distributed by the splitter, having different energy sensitivity characteristics.

2. 发明专利

JP5524755B2 X-ray detection systems and x-ray detection method 有权
公开(公告)号：JP5524755B2
公开(公告)日：2014-06-18
申请号：JP2010171611
申请日：2010-07-30
申请人：国立大学法人東北大学 , 日本電子株式会社
发明人：正己寺内 , 孝訓村野 , 信雄飯田 , 秀之高橋
IPC分类号： G01N23/225 , G01N23/207
摘要： PROBLEM TO BE SOLVED: To increase a ratio of x rays made incident on a diffraction grating and an image sensor in a system for diffracting characteristic x-rays from a sample irradiated with an electron beam by the diffraction grating and sampling a spectrum by the image sensor.SOLUTION: An x-ray detection system comprises: an electron beam irradiation part 10 for irradiating a sample 20 with an electron beam; an x-ray condensing mirror 34 for condensing characteristic x-rays emitted from the sample 20 irradiated with the electron beam and guiding the condensed characteristic x-rays to a diffraction grating 50; the diffraction grating 50 for receiving the characteristic x-rays condensed by the x-ray condensing mirror 34 and generating diffracted x-rays; an image sensor 70 for detecting the diffracted x-rays generated in the diffraction grating 50; and an x-ray condensing mirror adjustment part 32 for adjusting a position or an angle of the x-ray condensing mirror 34.

3. 发明专利

JP5576749B2 X-ray detection system 有权
公开(公告)号：JP5576749B2
公开(公告)日：2014-08-20
申请号：JP2010203408
申请日：2010-09-10
申请人：日本電子株式会社
发明人：孝訓村野 , 信雄飯田 , 秀之高橋
IPC分类号： G01N23/225
摘要： PROBLEM TO BE SOLVED: To provide a system for collecting a spectrum by diffraction of characteristic X rays from a sample that has been irradiated with an electron beam, which detects whether cathode luminescence is included in the collected spectrum or not, and removes the detected cathode luminescence.SOLUTION: The X-ray detection system includes: an electron beam irradiation section for irradiating a sample with an electron beam; a diffraction grating for receiving characteristic X rays emitted from the sample that has been irradiated with the electron beam to generate diffracted X rays; an image sensor for detecting the diffracted X rays that have been generated in the diffraction grating; an analysis section for analyzing the collected spectrum of the diffracted X rays that have been detected by the image sensor to generate an energy distribution spectrum; a base extraction section for extracting a base line of the energy distribution spectrum; and a cathode luminescence extraction section for extracting a cathode luminescence component included in the energy distribution spectrum from the inclination of the base line. The analysis section removes the extracted cathode luminescence component from the energy distribution spectrum.

4. 发明专利

JP3950618B2 Electron beam inspection system 有权
公开(公告)号：JP3950618B2
公开(公告)日：2007-08-01
申请号：JP2000216844
申请日：2000-07-18
申请人：日本電子株式会社
发明人：勝重津野 , 信雄飯田
IPC分类号： G01B15/00 , G01N23/225 , G01R1/06 , G01R31/302 , H01J37/05 , H01J37/141 , H01J37/22 , H01J37/244 , H01J37/29 , H01L21/66

5. 发明专利

JP5563935B2 X-ray detection system 有权
公开(公告)号：JP5563935B2
公开(公告)日：2014-07-30
申请号：JP2010203410
申请日：2010-09-10
申请人：日本電子株式会社
发明人：孝訓村野 , 信雄飯田 , 秀之高橋
IPC分类号： G01N23/225 , H01J37/244 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an X-ray detection system for collecting a spectrum by diffraction of characteristic X-rays from a sample that has been irradiated with an electron beam, which maintains the detection accuracy of an energy distribution spectrum by being provided with an X-ray condensing mirror for appropriately condensing rays.SOLUTION: The X-ray detection system includes: an electron beam irradiation section for irradiating a sample with an electron beam; an X-ray condensing mirror for condensing characteristic X-rays emitted from the sample that has been irradiated with the electron beam to guide the condensed characteristic X-rays to a diffraction grating; an X-ray condensing mirror adjustment section for adjusting the position or the angle of the X-ray condensing mirror; a diffraction grating for receiving the characteristic X-rays that have been condensed by the X-ray condensing mirror to generate diffracted X rays; and an image sensor for detecting the diffracted X rays that have been generated in the diffraction grating. The X-ray condensing mirror adjustment section adjusts the position or the angle of the X-ray condensing mirror, in a reflectable angle range according to the energy of the characteristic X-rays reflected on a reflecting surface of the X-ray condensing mirror.

6. 发明专利

JP5441856B2 X-ray detection system 有权
公开(公告)号：JP5441856B2
公开(公告)日：2014-03-12
申请号：JP2010203409
申请日：2010-09-10
申请人：日本電子株式会社
发明人：孝訓村野 , 信雄飯田 , 秀之高橋
IPC分类号： G01N23/225 , G01T1/20
摘要： PROBLEM TO BE SOLVED: To provide a system for collecting a spectrum by diffraction of characteristic X rays from a sample that has been irradiated with an electron beam, which provides information on whether each peak of collected spectra is a measurement object or a composite peak of cathode luminescence and a higher order beam.SOLUTION: The X-ray detection system includes: an electron beam irradiation section 10 for irradiating a sample with an electron beam; a diffraction grating 50 for receiving characteristic X rays emitted from the sample that has been irradiated with the electron beam to generate diffracted X rays; an image sensor 60 for detecting the diffracted X rays that have been generated in the diffraction grating; a scintillation counter 70 arranged adjacent to the image sensor with an energy dispersion direction of an image of the diffracted X rays as a measurement longitudinal direction, for detecting the diffracted X rays in an energy setting range; and an analysis section 80 for analyzing the spectrum of the diffracted X rays that have been detected by the image sensor, and analyzing the content of the peak of the spectrum with reference to the detection result of the scintillation counter.

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