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2. 发明专利

JP5377432B2 Semiconductor optical element device 有权
公开(公告)号：JP5377432B2
公开(公告)日：2013-12-25
申请号：JP2010156744
申请日：2010-07-09
申请人：三菱電機株式会社
发明人：君男鴫原 , 和重川崎 , 裕益松岡
IPC分类号： H01S5/14
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor optical element device improving the degree of freedom of design of a nonreflective film even when a total film thickness of a plurality of films is a value different from λ/4. SOLUTION: The nonreflective film is formed with a plurality of films each having a refractive index higher than 1 and formed using high-reflectivity films (a first film 7, a third film 9, a fifth film 11) each having a refractive index higher than a square-root value of an effective refractive index of a semiconductor optical element, and low-refractive index films (a second film 8, a fourth film 10, a sixth film 12, a seventh film 13) each having a refractive index lower than a square-root value of an effective refractive index of a semiconductor laser 31. The plurality of films are formed to have at least three compositions while each film is formed with a single composition, and to set both a real part and an imaginary part of an amplitude reflectance to zero as a whole. COPYRIGHT: (C)2010,JPO&INPIT

4. 发明专利

JP4941197B2 The film holder and the film-forming apparatus of a semiconductor device 有权
公开(公告)号：JP4941197B2
公开(公告)日：2012-05-30
申请号：JP2007246716
申请日：2007-09-25
申请人：三菱電機株式会社
发明人：元安部 , 俊彦志賀 , 裕益松岡
IPC分类号： H01L21/31 , C23C14/50 , H01S5/028

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