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1. 发明专利

JP5160181B2 Trichlorosilane manufacturing equipment 有权
公开(公告)号：JP5160181B2
公开(公告)日：2013-03-13
申请号：JP2007268617
申请日：2007-10-16
申请人：三菱マテリアル株式会社 , 電気化学工業株式会社
发明人：満敏生川 , 祐司清水
IPC分类号： C01B33/107
CPC分类号： C01B33/10731 , B01J8/025 , B01J8/0285 , B01J12/007 , B01J2208/00415 , B01J2208/00513 , C01B33/10736

2. 发明专利

JP4780284B2 Purification method of trichlorosilane 有权
公开(公告)号：JP4780284B2
公开(公告)日：2011-09-28
申请号：JP2005181298
申请日：2005-06-21
申请人：三菱マテリアル株式会社
发明人：進松永 , 満敏生川 , 力稲葉 , 久幸竹末
IPC分类号： C01B33/107 , C01B33/02

3. 发明专利

JP5396954B2 Method of purification equipment and chlorosilanes manufacturing chlorosilane 有权
公开(公告)号：JP5396954B2
公开(公告)日：2014-01-22
申请号：JP2009069090
申请日：2009-03-19
申请人：三菱マテリアル株式会社
发明人：輝久北川 , 満敏生川 , 力稲葉
IPC分类号： C01B33/107
CPC分类号： B01J8/0285 , B01J2208/00123 , B01J2219/00268 , C01B33/10778

4. 发明专利

JP5344113B2 Hydrogen separation and recovery methods and hydrogen separation and recovery equipment 有权
公开(公告)号：JP5344113B2
公开(公告)日：2013-11-20
申请号：JP2007276564
申请日：2007-10-24
申请人：三菱マテリアル株式会社
发明人：満敏生川
IPC分类号： C01B3/56 , C01B3/52 , C01B33/107
摘要： PROBLEM TO BE SOLVED: To provide a method and a facility for separation/collection of hydrogen, wherein hydrogen contained in a gas generated by a conversion reaction is efficiently separated and collected to be reused by being connected to a conversion facility for producing trichlorosilane. SOLUTION: The hydrogen separation/collection method comprises: [an absorption step] of bringing a mixed gas containing chlorosilanes, hydrogen chloride and hydrogen into contact with an absorption solution consisting mainly of liquid chlorosilanes to absorb the chlorosilanes and hydrogen chloride in the mixed gas into the absorption solution; [a hydrogen chloride separation step] of distillating the absorption solution which has absorbed the chlorosilanes and hydrogen chloride to gasify hydrogen chloride and separating the gasified hydrogen chloride; [an absorption solution circulating step] of collecting the chlorosilanes separated from hydrogen chloride, cooling the collected chlorosilanes, and returning the cooled chlorosilanes to the absorption step; and [a hydrogen purification step] of passing a gas which has passed through the absorption solution and is mainly composed of hydrogen through active carbon to adsorb the chlorosilanes and hydrogen chloride remaining in the gas onto the active carbon, thereby separating hydrogen from the chlorosilanes and hydrogen chloride. The facility for the method is also provided. COPYRIGHT: (C)2008,JPO&INPIT

5. 发明专利

JP5686055B2 トリクロロシラン製造方法有权
公开(公告)号：JP5686055B2
公开(公告)日：2015-03-18
申请号：JP2011143123
申请日：2011-06-28
申请人：三菱マテリアル株式会社
发明人：満敏生川 , 満敏生川
IPC分类号： C01B33/107
CPC分类号： C01F7/58 , C01B33/1071

6. 发明专利

JP5344114B2 Hydrogen purification and recovery methods and hydrogen purification recovery equipment 有权
公开(公告)号：JP5344114B2
公开(公告)日：2013-11-20
申请号：JP2007276565
申请日：2007-10-24
申请人：三菱マテリアル株式会社
发明人：満敏生川 , 俊秀遠藤
IPC分类号： C01B3/56 , C01B33/107
摘要： PROBLEM TO BE SOLVED: To provide a hydrogen purification/collection method and a facility for the method, wherein hydrogen contained in a gas generated by a conversion reaction is efficiently purified and collected to be reused by being connected to a conversion facility for producing trichlorosilane. SOLUTION: This invention relates to the method and the facility for purification/collection of hydrogen which are characterized in that a mixed gas produced by a conversion reaction for producing trichlorosilane is passed through an active carbon-filled layer to adsorb chlorosilanes and hydrogen chloride onto the active carbon, thereby separating the chlorosilanes and hydrogen chloride from the gas. Preferably, the active carbon-filled layer is formed in a two stage structure composed of a first-stage active carbon-filled layer for adsorbing primarily chlorosilanes thereon and a second-stage active carbon-filled layer for adsorbing primarily hydrogen chloride thereon, and the mixed gas is passed through the first-stage active carbon-filled layer and the second-stage active carbon-filled layer successively, thereby separating the chlorosilanes and hydrogen chloride stepwisely. COPYRIGHT: (C)2008,JPO&INPIT

7. 发明专利

JP5429464B2 Purification method of trichlorosilane 有权
公开(公告)号：JP5429464B2
公开(公告)日：2014-02-26
申请号：JP2009168080
申请日：2009-07-16
申请人：三菱マテリアル株式会社
发明人：進松永 , 力稲葉 , 満敏生川 , 久幸竹末
IPC分类号： C01B33/107 , C01B33/02 , C01B33/035

8. 发明专利

JP5428692B2 Purification method for producing polycrystalline silicon carbon parts 有权
公开(公告)号：JP5428692B2
公开(公告)日：2014-02-26
申请号：JP2009213656
申请日：2009-09-15
申请人：三菱マテリアル株式会社
发明人：満敏生川 , 謙一渡部
IPC分类号： C01B31/02 , C01B33/107
CPC分类号： C01B33/035 , C01B32/05

9. 发明专利

JP5327072B2 The apparatus for producing trichlorosilane and trichlorosilane production process 有权
公开(公告)号：JP5327072B2
公开(公告)日：2013-10-30
申请号：JP2010009422
申请日：2010-01-19
申请人：三菱マテリアル株式会社
发明人：満敏生川
IPC分类号： C01B33/107
CPC分类号： B01J8/1836 , B01J8/0055 , B01J8/1872 , B01J8/34 , B01J2208/00053 , B01J2208/00061 , B01J2208/00132 , B01J2208/0084 , B01J2208/00867 , B01J2208/025 , C01B33/10763
摘要： An apparatus for producing trichlorosilane in which metallurgical grade silicon powder supplied to a reactor is reacted with hydrogen chloride gas while being fluidized by the hydrogen chloride gas, thereby discharging trichlorosilane generated by the reaction from the reactor, includes: a plurality of gas flow controlling members which are installed along a vertical direction in an annular shape R from an inner peripheral wall of the reactor in an internal space of the reactor; and a heat transfer tube which is installed along the vertical direction in the annular space R and through which a heating medium passes.

10. 发明专利

JP4747267B2 Shock relaxation-type polycrystalline silicon 有权
公开(公告)号：JP4747267B2
公开(公告)日：2011-08-17
申请号：JP2001303420
申请日：2001-09-28
申请人：三菱マテリアル株式会社
发明人：守中野 , 力人佐藤 , 満敏生川 , 俊秀遠藤
IPC分类号： C01B33/02 , C30B29/06

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