会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明专利
    • Manufacturing method and the method of using the trichlorosilane
    • JP5333725B2
    • 2013-11-06
    • JP2008280591
    • 2008-10-30
    • 三菱マテリアル株式会社
    • 渉 斎木一樹 水嶋
    • C01B33/107
    • PROBLEM TO BE SOLVED: To provide a method for producing trichlorosilane which effectively inhibits decomposition of trichlorosilane and production of polymer, reduces the removing operation load of polymer and has a high recovery ratio of trichlorosilane in a step of cooling gas generated by a conversion reaction step. SOLUTION: The method for producing trichlorosilane comprises subjecting a raw material including tetrachlorosilane and hydrogen to conversion reaction at a temperature of 1,000-1,900°C to form a reaction gas that contains trichlorosilane, dichlorosilylene, hydrogen chloride and higher silane compounds; cooling the reaction gas; and recovering the trichlorosilane, in which the method comprises (A) a first cooling step of cooling the reaction gas drawn from a convertor below 600°C within 0.01 second; (B) an intermediate reaction step of keeping the reaction gas obtained after the first cooling step within a temperature range of 500-950°C for 0.01-5 seconds; and (C) a second cooling step of cooling the reaction gas obtained after the intermediate reaction step to a temperature below 500°C. COPYRIGHT: (C)2010,JPO&INPIT