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1. 发明专利

JP2015023193A 圧電素子有权
标题翻译：压电元件
公开(公告)号：JP2015023193A
公开(公告)日：2015-02-02
申请号：JP2013151078
申请日：2013-07-19
申请人：ヤマハ株式会社 , Yamaha Corp , 富山県 , Toyama Prefecture
发明人： OKUBO MIHO , SAKAI YUICHI , TSUNODA TATSUNORI , FUTAKUCHI TOMOAKI
IPC分类号： H01L41/43 , C04B35/462 , H01L41/187
摘要：【課題】キュリー温度を高くすることでき、圧電性を示す温度範囲を拡げることができる圧電素子を提供する。【解決手段】基板2と、この基板2の一方の面側に積層された圧電体4とを備え、圧電体4が、Ba、Ca、Ti及びZrを含む粉体を有する圧電ペーストを用いてスクリーン印刷及び焼成することで形成されている圧電素子1である。粉体の平均粒径が0.05μm以上10μm以下であり、スクリーン印刷に用いるスクリーンメッシュのオープニングが30μm以上100μm以下であるとよい。基板2としてはセラミクスを主成分とし、平均厚みが100μm以上300μm以下の可撓性基板が好ましい。圧電体が下記式で表される組成の圧電材料を主成分とするとよい。Ba1−xCaxTiyZrzO3(0.04≦̸x≦̸0.10、0.95≦̸y≦̸0.98、0.02≦̸z≦̸0.05)【選択図】図1
摘要翻译：要解决的问题：提供可以增加居里温度的压电元件，并且可以扩大呈现压电性的温度范围。解决方案：压电元件1包括基板2和压电体4，压电体4层压在压电体4通过丝网印刷或煅烧形成具有包含Ba，Ca，Ti和Zr的粉末的压电膏。优选地，粉末的平均粒径为0.05-10μm，丝网印刷中使用的筛网的开口为30-100μm。优选地，基板2是以陶瓷为主要成分的平均厚度为100〜300μm的柔性基板。优选地，压电体包含具有以下式表示的组成的压电材料作为主要成分。 BaCaTiZrO（0.04≤x≤0.10,0.95≤y≤0.98,0.02≤z≤0.05）。

2. 发明专利

JP2013201194A Pzt device 有权
标题翻译： PZT设备
公开(公告)号：JP2013201194A
公开(公告)日：2013-10-03
申请号：JP2012067477
申请日：2012-03-23
申请人： Yamaha Corp , ヤマハ株式会社 , Toyama Prefecture , 富山県
发明人： OKUMIYA YASUO , OKUBO MIHO , FUTAKUCHI TOMOAKI , SAKAI YUICHI
IPC分类号： H01L41/09 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H04R17/00
摘要： PROBLEM TO BE SOLVED: To reduce noise of a PZT device.SOLUTION: The PZT device comprises: a substrate including at least a lead absorption layer having a thickness of 1 μm or over on a surface layer; a first electrode film coupled to the lead absorption layer and having a plurality of electrode areas separated to each other; a PZT film coupled to the first electrode film and the lead absorption layer exposed between the plurality of electrode areas; and a second electrode film overlapping with the first electrode film and the PZT film, and coupled to the PZT film.
摘要翻译：要解决的问题：降低PZT器件的噪声。解决方案：PZT器件包括：至少在表面层上至少具有1μm以上的铅吸收层的衬底; 耦合到所述引线吸收层并具有彼此分离的多个电极区域的第一电极膜; 耦合到所述第一电极膜的PZT膜和暴露在所述多个电极区域之间的所述引线吸收层; 以及与第一电极膜和PZT膜重叠的第二电极膜，并与PZT膜耦合。

3. 发明专利

JP2005297374A Piezoelectric element actuator and method of manufacturing the same 审中-公开
标题翻译：压电元件致动器及其制造方法
公开(公告)号：JP2005297374A
公开(公告)日：2005-10-27
申请号：JP2004117467
申请日：2004-04-13
申请人： Shikino Mekki Kk , Tateyama Kagaku Kogyo Kk , Toyama Prefecture , 富山県 , 志貴野メッキ株式会社 , 立山科学工業株式会社
发明人： FUTAKUCHI TOMOAKI , SAKAI YUICHI , YAMANO HIROSHI , YANAGAWA ARATA , NAKAMURA TOSHIFUMI , EMORI YOSHIO , WATANABE MITSUO , OKUNO HIROYUKI
IPC分类号： B41J2/045 , B41J2/055 , B41J2/16
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element actuator capable of generating a large amount of displacement by a piezoelectric material thick film having a predetermined performance in a predetermined drive voltage.
SOLUTION: A silicon oxide film layer 2, a Pt lower electrode 3, a piezoelectric material thick film 4 and an upper Au electrode 5 are sequentially laminated on a monocrystalline silicon substrate 1. A part of the silicon substrate 1 at a portion corresponding to the piezoelectric material thick film 4 provided to the rear face side of the silicon substrate 1 is completely removed by dry etching, and then the silicon oxide film layer 2 is exposed to form a pressure chamber 7. The silicon oxide film layer 2 and the Pt lower electrode 3 serve as a diaphragm 6. The Pt lower electrode 3 is constituted of a laminated structure having a thick film electrode 3a including a glass, a thick film electrode 3b not including a glass and a thin film electrode. It is possible to carry out the etching of the silicon substrate 1 by wet etching using alkaline.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够通过在预定驱动电压中具有预定性能的压电材料厚膜产生大量位移的压电元件致动器。解决方案：氧化硅膜层2，Pt下电极3，压电材料厚膜4和上Au电极5依次层压在单晶硅衬底1上。一部分硅衬底1的一部分对应于设置在硅衬底1的背面侧的压电材料厚膜4，通过干蚀刻完全除去，然后暴露氧化硅膜层2，形成压力室7.氧化硅膜层2和 Pt下电极3用作隔膜6.Pt下电极3由具有包括玻璃的厚膜电极3a，不包括玻璃的厚膜电极3b和薄膜电极的层压结构构成。可以通过使用碱性的湿蚀刻来进行硅衬底1的蚀刻。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2004330724A Piezoelectric element actuator and its manufacturing method 审中-公开
标题翻译：压电元件致动器及其制造方法
公开(公告)号：JP2004330724A
公开(公告)日：2004-11-25
申请号：JP2003132629
申请日：2003-05-12
申请人： Tateyama Kagaku Kogyo Kk , Toyama Prefecture , 富山県 , 立山科学工業株式会社
发明人： FUTAKUCHI TOMOAKI , SAKAI YUICHI , MURAMOTO SHOICHI , YAMANO HIROSHI , YANAGAWA ARATA
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a high density, high precision and low cost piezoelectric element actuator wherein a piezoelectric element not including a lead oxide material hazardous to the environment is formed on a vibration plate of a silicon substrate, and also to provide its manufacturing method.
SOLUTION: A 1.7-3.0 μm thick silicon oxide film layer 2 is formed on the single crystal silicon substrate 1, and on the silicon oxide film layer 2 on the front surface side of the silicon substrate 1, a Pt lower electrode 3, a piezoelectric thick film 4 of barium titanate zirconate, and an Au upper electrode 5 are sequentially laminated. A pressure chamber 7 is formed in a position corresponding to the piezoelectric thick film 4 on the back surface of the silicon substrate 1 via the vibration plate 6 by the silicon substrate 1. The piezoelectric thick film 4 is made by printing a piezoelectric thick film material of barium titanate zirconate with a screen printing method and by firing the material in a temperature range of 1,270-1,370°C.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种高密度，高精度和低成本的压电元件致动器，其中在硅衬底的振动板上形成不包括对环境有害的氧化铅材料的压电元件，并且还提供其制造方法。解决方案：在单晶硅衬底1上形成1.7-3.0μm厚的氧化硅膜层2，在硅衬底1的表面侧上的氧化硅膜层2上形成Pt下电极3 ，依次层叠了钛酸锆酸锆的压电厚膜4和Au上电极5。压力室7通过硅衬底1经由振动板6形成在与硅衬底1的背面上的压电厚膜4相对应的位置。压电厚膜4通过印刷压电厚膜材料的钛酸钡锆酸盐，并通过在1,270-1,370℃的温度范围内烧制材料。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2010145382A GAS SENSOR FOR DETECTING Total-VOC, AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：用于检测总VOC的气体传感器及其制造方法
公开(公告)号：JP2010145382A
公开(公告)日：2010-07-01
申请号：JP2008326619
申请日：2008-12-22
申请人： Toyama Prefecture , 富山県
发明人： TSUNOSAKI MASAHIRO , SAKAI YUICHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas sensor having high moisture resistance to gas such as a TVOC gas comprising a plurality of gases and containing gas with relatively large molecular weight.
SOLUTION: The gas sensor includes a pair of electrodes disposed on the surface of a substrate at a predetermined distance and a sensitive layer formed between the electrodes, the sensitive layer comprising a tin oxide layer loaded with platinum, palladium, and gold.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种气体传感器，其对气体具有高耐湿性，例如包含多种气体并含有分子量较大的气体的TVOC气体。解决方案：气体传感器包括一对设置在基板表面上的预定距离的电极和形成在电极之间的敏感层，敏感层包含负载铂，钯和金的氧化锡层。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009283627A Ceramic electronic component and manufacturing method thereof 审中-公开
标题翻译：陶瓷电子元件及其制造方法
公开(公告)号：JP2009283627A
公开(公告)日：2009-12-03
申请号：JP2008133272
申请日：2008-05-21
申请人： Toyama Prefecture , 富山県
发明人： SAKAI YUICHI , FUTAKUCHI TOMOAKI , ADACHI MASATOSHI
IPC分类号： H01G4/12 , H01B5/14 , H01B13/00 , H01G4/30
摘要： PROBLEM TO BE SOLVED: To provide a ceramic electronic component and a manufacturing method thereof which efficiently form an electrode of the ceramic electronic component to be reduced in size/thickness, with a good yield by using an inkjet printer.
SOLUTION: Ink for inkjet wherein metal oxide particulates being not ferromagnetic are dispersed in a dispersion medium is printed on a green sheet forming a ceramic sintered body to form an electrode coating film. Conductive ink is printed on a green sheet 18 forming a ceramic sintered body by an inkjet printer to form an electrode coating film 20. The electrode coating film 20 is dried, and the green sheet 18 having had the electrode coating film 20 of the conductive ink printed thereon is sintered together with the electrode coating film 20 in a neutral or reducing atmosphere at 500 to 1,400°C to form an inner electrode 14 on the ceramic sintered body.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种陶瓷电子部件及其制造方法，其能够通过使用喷墨打印机以良好的产率有效地形成尺寸/厚度减小的陶瓷电子部件的电极。解决方案：将形成不具铁磁性的金属氧化物微粒分散在分散介质中的喷墨用油墨印刷在形成陶瓷烧结体的生片上，形成电极涂膜。导电油墨通过喷墨打印机印刷在形成陶瓷烧结体的生片18上以形成电极涂膜20.电极涂覆膜20被干燥，并且具有导电油墨的电极涂膜20的生片18 印刷在其上的电极涂覆膜20在中性或还原性气氛中在500至1400℃下烧结以在陶瓷烧结体上形成内部电极14。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2013239510A Method for manufacturing fired body 有权
标题翻译：制造燃烧体的方法
公开(公告)号：JP2013239510A
公开(公告)日：2013-11-28
申请号：JP2012110357
申请日：2012-05-14
申请人： Toyama Prefecture , 富山県
发明人： TAMBO HIROYUKI , YOKOYAMA YOSHIYUKI , SAKAI YUICHI
IPC分类号： H01L21/027 , B29C59/02 , B82Y30/00 , B82Y40/00 , H01L21/28 , H01L21/288 , H01L21/3205 , H01L21/768 , H03H3/08
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a fired body capable of forming a fired body having a precise surface by suppressing roughening of a surface of an uneven pattern during firing.SOLUTION: A method for manufacturing a fired body comprises the steps of: forming a paste film by applying a paste containing a nanoparticle and an organic material onto a substrate and drying the paste; forming a transfer film to which the uneven pattern is transferred by pressing a mold provided with the uneven pattern on a surface thereof to the paste film; manufacturing a fired body in which the uneven pattern is formed by firing the mold while pressing it to the transfer film; and releasing the mold from the fired body. A firing temperature of the firing step is within a range of 100°C to 1500°C, higher than or equal to a decomposition temperature of an organic coating constituting the outside of the nanoparticle and the organic material, and higher than or equal to a sintering temperature of a nucleus constituting the inside of the nanoparticle in which a melting point drop phenomenon appears.
摘要翻译：要解决的问题：提供一种制造能够形成具有精确表面的烧制体的烧制体的方法，该烧制体通过抑制焙烧期间的凹凸图案的表面的粗糙化。解决方案：一种制造烧制体的方法包括以下步骤：：通过将含有纳米颗粒和有机材料的浆料涂覆在基材上并干燥所述糊料来形成糊剂膜; 通过在其表面上将设置有不均匀图案的模具压到糊状物上而形成转印不均匀图案的转印膜; 制造烧制体，其中通过在将模具按压到转印膜上的同时烧制而形成不均匀图案; 并将模具从烧制体上释放出来。烧成工序的烧成温度在100℃〜1500℃的范围内，高于或等于构成纳米颗粒外部的有机涂层的分解温度和有机材料，并且高于或等于构成出现熔点下降现象的纳米颗粒内部的核的烧结温度。

8. 发明专利

JP2009109328A Microwell electrochemical detection device and method 有权
标题翻译： MICROWELL电化学检测装置及方法
公开(公告)号：JP2009109328A
公开(公告)日：2009-05-21
申请号：JP2007281669
申请日：2007-10-30
申请人： Tateyama Machine Kk , Toyama Prefecture , 富山県 , 立山マシン株式会社
发明人： UENO MINORU , FUJISHIRO TOSHIFUMI , TSUNOSAKI MASAHIRO , ASADA MINEO , TERASAWA TAKASHI , NABESAWA HIROFUMI , TSURITANI HIROYUKI , MAKIMURA MEGUMI , YOKOYAMA YOSHIYUKI , SAKAI YUICHI , FUKAZAWA MASAKI
IPC分类号： G01N27/28 , G01N27/327 , G01N37/00
摘要： PROBLEM TO BE SOLVED: To provide a new microwell electrochemical device and a method therefor. SOLUTION: The microwell electrochemical detection device includes a substrate, an electrode and wiring being conducted to the electrode on the major surface of the substrate, a well plate having a well for holding a solution in a state of being in contact with the electrode. and a spacer. The well plate has a plate with a through-hole and a skirt, extending from one opening of the through-hole in which wells are formed with the through-hole and inner walls of the skirt and adjacent wells are arranged at a distance. The spacer holds the space between the well plate and the substrate and sets the space so that the open end of the skirt is not in contact with the substrate, the electrode, and the wiring, and the solution held by the well is not flown out from between the substrate, the electrode, and the wiring, and the open end of the skirt by the surface tension force of the solution.The electrochemical detection method uses this device. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种新的微孔电化学装置及其方法。解决方案：微孔电化学检测装置包括基板，电极和布线，被传导到基板的主表面上的电极，阱板具有用于将溶液保持在与该基板接触的状态的孔电极。和间隔物。井板具有带有通孔和裙部的板，从通孔的一个开口延伸出来，其中孔的通孔和裙壁的内壁以及相邻的井相隔一定距离。间隔件保持了孔板和基板之间的空间，并设置了空间，使得裙部的开口端不与基板，电极和布线接触，并且由阱保持的溶液不会流出通过溶液的表面张力，从基板，电极和布线之间以及裙部的开口端。电化学检测方法使用该装置。版权所有（C）2009，JPO＆INPIT

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