会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明专利
    • FORMATION OF INORGANIC THIN FILM AND DEVICE THEREFOR
    • JP2001064776A
    • 2001-03-13
    • JP23909699
    • 1999-08-26
    • ASAHI CHEMICAL INDSAITO HIDETOSHI
    • SAITO HIDETOSHIIWABUCHI YOSHIMASA
    • C23C16/40
    • PROBLEM TO BE SOLVED: To suppress the deposition of inorganic matters on the part other than the surface of a substrate and to improve the film forming efficiency by releasing the vaporized gas of a metallic compd. into an air atmosphere upwardly, spraying it on the surface of a heated substrate located in the upper direction of the releasing position and deposition at least the oxide of the metallic compd. thereon. SOLUTION: A film forming raw material 2 is a metallic compd. capable of forming a metallic oxide when the vaporized gas thereof the released into an air atmosphere. The vaporized gas of the film forming raw material 2 is released into the air atmosphere outside a vaporizer 1 upwardly from a nozzle 5 directly connected to the upper part of the vaporizer 1 and is sprayed on the surface of a heated substrate 7. At this time, the released vaporized gas comes into contact with the air atmosphere to produce reaction particles, which come into contact with the heated substrate 7, so that inorganic matters such as the oxides or the like of the metals contained in the film forming raw material 2 are deposited on the surface of the substrate 7 to form an inorganic thin film. The flow of the vaporized gas or the like is head to be disturbed by high temp. ascending currents generated around the nozzle 5 and the substrate 7.
    • 6. 发明专利
    • METAL OXIDE STRUCTURE HAVING PROJECTION
    • JP2000247800A
    • 2000-09-12
    • JP37305698
    • 1998-12-28
    • ASAHI CHEMICAL INDSAITO HIDETOSHI
    • SAITO HIDETOSHIUEDA YOSHITOMOKINOSHITA HIDEO
    • C30B29/62C23C16/40H01B3/10H01B5/00
    • PROBLEM TO BE SOLVED: To provide a metal oxide structure that has a specific structure, for example, of a large surface area, by forming a plurality of projections of a specific shape on its surface. SOLUTION: This metal oxide structure has a plurality of projection parts that have a cross section of 0.01-10,000 μm in terms of diameter of a circle and the aspect ratio of the length to the diameter converted of the cross section of >=1 and individual projection parts have each two or more projection points. In a preferred embodiment, the projection parts distribute on the substrate at a density of 0.01-10,000 per the area of 10 μm×10 μm of the substrate. The structure can widen the area of a dielectric layer with a small capacity, and is particularly useful in electronic materials, for example, an insulator, a conductor, a solid electrolyte, a fluorescent display tube, an EL element, a ceramic condenser, an actuator, a laser oscillation element, a cold cathode element, ferroelectric memory, a piezoelectric material, a thermistor, a barrister, a superconductor, or the like, an electromagnetic wave-shielding material, a photodielectric material, an optical switch, an optical sensor, a solar cell, a light wavelength conversion element, or the like.