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    • 6. 发明专利
    • DEVICE FOR MEASURING PERFLUOROCARBONS
    • JP2001091508A
    • 2001-04-06
    • JP26973399
    • 1999-09-24
    • RIKEN KEIKI KK
    • KAWABE TETSUYAYAMAMOTO AKIHIRO
    • G01N31/12G01N1/22G01N1/28G01N31/00
    • PROBLEM TO BE SOLVED: To accurately measure perfluorocarbons to the extent of approximately management concentration regardless of the presence or absence of fluorine- family detergent. SOLUTION: A first reactor 1, a moisture absorption cylinder 4, a second reactor 6, and a detection-paper-type gas detection device 10 that is an acid gas detection means are connected in series, at the same time, the heating temperature of the first reactor 1 is set to a value where the pyrolysis of fluorine-family detergent can be made and at the same time perfluorocarbons cannot be modified as much as possible, the heating temperature of the second reactor 6 is set to a value for thermally decomposing the perfluorocarbons, only the fluorine-family detergent can be thermally decomposed by acid gases using the first reactor 1 for eliminating with the moisture absorption cylinder 4, and the surplus water of the perfluorocarbons through the moisture absorption cylinder 4 is eliminated for securely and thermally decomposing into an acid gas using the second reactor 6.
    • 7. 发明专利
    • PERFLUOROCARBON MEASURING DEVICE
    • JP2001013128A
    • 2001-01-19
    • JP18786699
    • 1999-07-01
    • RIKEN KEIKI KK
    • KAWABE TETSUYAYAMAMOTO AKIHIRO
    • G01N31/00G01N1/28
    • PROBLEM TO BE SOLVED: To measure highly precisely perfluorocarbons having an approximate control concentration regardless of existence of a fluorine-based detergent. SOLUTION: A fist reaction furnace 1, a water scrubber means 4, water penetrating tubes 5, 8, a second reaction furnace 9, and a detector paper-type gas detecting device 12 which is an acid gas detecting means are connected in series, and a heating temperature of the first reaction furnace 1 is set at such a temperature that a fluorine-based detergent can be thermally decomposed and that perfluorocarbons are not denatured as much as possible, and a heating temperature of the second reaction furnace 9 is set at such a temperature that the perfluorocarbons are thermally decomposed. Only the fluorine-based detergent is thermally decomposed into acid gases by the first reaction furnace 1 and removed by the water scrubber means 4, and after removing excessive water in the perfluorocarbons passing through the water scrubber means 4, the perfluorocarbons are thermally decomposed surely into acid gases by the second reaction furnace 9.
    • 9. 发明专利
    • OPTICAL INTERFERENCE TYPE FLUID CHARACTERISTIC MEASURING DEVICE
    • JP2000292351A
    • 2000-10-20
    • JP10149199
    • 1999-04-08
    • RIKEN KEIKI KK
    • ISHIGURO TOMOOHIRAYAMA TOMOJI
    • G01N21/45
    • PROBLEM TO BE SOLVED: To enlarge a measuring range and a dynamic range without elongation of an image sensor. SOLUTION: This device is equipped with an image sensor 14 for receiving an image of an interference fringe generated by a light beam passing through a measuring cell composed so that a phase change of the interference fringe does not exceed ±πduring the period of one sampling cycle and a reference cell juxtaposed therewith, a Fourier analysis means 24 for calculating the phase θ of a fundamental wave component included in an interference fringe signal from the image sensor 14, and a shifted cycle number detection means 25 and an addition and subtraction means 26, for judging whether the phase θ calculated by the Fourier analysis means 24 satisfies a physical restriction that a phase change caused by a fluid characteristic of the measuring cell does not exceed ±π during one sampling cycle or not, and for outputting the phase θ as a phase changing quantity in the case of satisfying the restriction, and for outputting the value obtained by adding or subtracting 2 π. as the phase changing quantity in the case of not satisfying it. And, a contradiction of a solution of the Fourier analysis means 24 is removed by utilizing positively the fluid characteristic of the measuring cell.
    • 10. 发明专利
    • THERMAL REACTION FURNACE FOR ANALYSIS
    • JP2000206069A
    • 2000-07-28
    • JP776299
    • 1999-01-14
    • RIKEN KEIKI KK
    • KOBAYASHI HISAYOSHIIIJIMA TETSUYA
    • G01N25/00
    • PROBLEM TO BE SOLVED: To provide a furnace that can be miniaturized and has improved reaction efficiency by winding a heater wire on a straight-line area near the bending part of a pipe being formed in a U-shaped, and at the same time, packing the periphery with a heat-insulating material, and then setting a side apart from the heater wire out of the openings of the pipe as a as inflow port. SOLUTION: Installation is made so that a side where a heater wire 2 is wound is at a lower portion, an opening 1c at a side apart from the heater wire 2 used as a gas inflow port, and a detection means is connected to the other opening 1d. When a gas to be inspected is injected in this state, it is heated at a straight-line area 1e being heated by conduction and radiation, and flows into a bend part 1a. The gas becomes a turbulence at the bend part 1a with a small radius of curvature, and flows into a straight-line part 1b, by the heater wire 2. As a result, the gas flows into the straight-line part 1b while being stirred and comes into contact uniformly with a pipe wall whose temperature is increased by the heater wire 2, and the temperature of an entire section increases rapidly to a preset temperature, and is subjected to thermal decomposition and reaction, thus generating a detectable constituent.