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1. 发明专利

JP2006228909A Surface treatment method and surface treatment system using gas decomposing apparatus 有权
标题翻译：使用气体分解装置的表面处理方法和表面处理系统
公开(公告)号：JP2006228909A
公开(公告)日：2006-08-31
申请号：JP2005039765
申请日：2005-02-16
申请人： Canon Anelva Corp , Foi:Kk , Kanto Denka Kogyo Co Ltd , National Institute Of Advanced Industrial & Technology , Randomaaku Technol:Kk , Taiyo Nippon Sanso Corp , キヤノンアネルバ株式会社 , 大陽日酸株式会社 , 株式会社エフオーアイ , 株式会社ランドマークテクノロジー , 独立行政法人産業技術総合研究所 , 関東電化工業株式会社
发明人： NAKAGAWA KOJIN , SATO TOMOKAZU , SEKIYA AKIRA
IPC分类号： H01L21/205 , C23C16/44 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To ensure reliability of an electrode used for generating a plasma in a vacuum container and to surely prevent emission of a gas with high global warming potential.
SOLUTION: The method is used to clean a vacuum treatment apparatus (plasma CVD apparatus) 10 for film formation of a substrate 12 within a vacuum container 11, and it includes a step to introduce a non-reactive gas (inert gas) to a gas decomposing apparatus 24 separately provided from the vacuum container 11, and to generate a plasma by using the non-reactive gas; and a step to introduce a reactive gas (nitrogen trifluoride NF
3 ) into the gas decomposing apparatus 24 where the plasma is generated by the non-reactive gas, to separate it, and to produce active species (atom-like fluorine F). The active species (atom-like fluorine F) are introduced into the vacuum container 11 for cleaning.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了确保用于在真空容器中产生等离子体的电极的可靠性，并且可靠地防止具有高全球变暖潜能的气体的排放。解决方案：该方法用于清洁在真空容器11内用于成膜基板12的真空处理装置（等离子体CVD装置）10，并且其包括引入非反应性气体（惰性气体）分配给从真空容器11提供的气体分解装置24，并通过使用非反应性气体产生等离子体; 以及将反应性气体（三氟化氮NF SB 3）引入气体分解装置24中的步骤，其中通过非反应性气体产生等离子体，将其分离，并产生活性物质（原子类氟F）。将活性物质（原子状氟F）引入真空容器11中进行清洗。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2004038501A Electronic data delivery method and electronic data storage medium 审中-公开
标题翻译：电子数据传送方法和电子数据存储介质
公开(公告)号：JP2004038501A
公开(公告)日：2004-02-05
申请号：JP2002193915
申请日：2002-07-02
申请人： Randomaaku Technol:Kk , 株式会社ランドマークテクノロジー
发明人： ITO YASUFUMI
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To optionally select a function usable in a browsing tool.
SOLUTION: In this electronic data delivery method for forming electronic data by a formation tool 303 having a basic function and a plurality of additive functions, and browsing or editing it by the browsing tool 305, the formation tool 303 comprises a storage step for storing, in a file 304, allowable function information including the function pattern of an additive function usable in the browsing tool 303 which is selected from the additive functions together with the electronic data. The browsing tool 305 comprises a reading step of reading the file 304 and drawing the electronic data based on the function pattern included in the allowable function information.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：可选择选择可用于浏览工具的功能。解决方案：在通过具有基本功能和多个附加功能的形成工具303形成电子数据的电子数据传送方法中，并且通过浏览工具305浏览或编辑它，形成工具303包括存储步骤用于在文件304中存储包括可从加法函数中选择的浏览工具303中与电子数据一起使用的加法函数的功能模式的允许功能信息。浏览工具305包括读取文件304并基于包括在允许功能信息中的功能模式绘制电子数据的读取步骤。版权所有（C）2004，JPO

3. 发明专利

JP2005108043A Conversion method for cad data, device for the method, and computer program 审中-公开
标题翻译： CAD数据的转换方法，方法的装置和计算机程序
公开(公告)号：JP2005108043A
公开(公告)日：2005-04-21
申请号：JP2003342578
申请日：2003-09-30
申请人： Randomaaku Technol:Kk , 株式会社ランドマークテクノロジー
发明人： KOJIMA MASAKI
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To provide a conversion method for image data which can convert CAD data into document data capable of being operated/browsed for each component constituting an object.
SOLUTION: From CAD data representing the location of the object in a three-dimensional space, document data is generated which includes the anteroposterior relationship of components constituting the object, the width and height of an image, and image data. For generating the document data, grouping is performed in consideration of the anteroposterior relationship. In addition, in the case of an image of a line and a surface, below a parent group, a group is further generated, and the document data is generated. Thus, if a model represented by parts 1, 2, 3 being geometric information hierarchized in 3D data is converted into document data, an image is defined by a shape, and an anteroposterior relationship is defined in a group.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种图像数据的转换方法，其可以将CAD数据转换为能够对构成对象的每个组件进行操作/浏览的文档数据。解决方案：从表示对象在三维空间中的位置的CAD数据生成包括构成对象的组件的前后关系，图像的宽度和高度以及图像数据的文档数据。为了生成文档数据，考虑到前后关系进行分组。此外，在行和表面的图像的情况下，在母组下方，进一步生成组，并且生成文档数据。因此，如果将由3D数据分层的几何信息的部分1,2,3表示的模型转换为文档数据，则通过形状来定义图像，并且在组中定义前后关系。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2008121809A Center ring and inductively coupled plasma decomposition device provided with this 审中-公开
标题翻译：中心环和电感耦合等离子体分解装置
公开(公告)号：JP2008121809A
公开(公告)日：2008-05-29
申请号：JP2006307324
申请日：2006-11-14
申请人： Randomaaku Technol:Kk , 株式会社ランドマークテクノロジー
发明人： OKANO MANABU , YAMAMOTO HIROO
IPC分类号： F16J15/06 , B01J19/08 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide technology capable of protecting an inner wall near an opening of a reaction pipe in which plasma is generated and easily performing maintenance.
SOLUTION: The center ring 1 has a first circular ring part 2 having an O ring attachment groove 5 on an outer peripheral surface; and two second circular ring parts 3 adjacent to both sides in an axial direction of the circular ring of the first circular ring part 2 respectively in order to position/connect the axis of two pipes while retaining vacuum. One second circular ring part 3b adjacent to the first circular ring part 2 is formed such that an outer diameter is equal to that of the other second circular ring part 3a and an inner diameter is smaller than that of the other second circular ring part 3a, and is provided with a projection part 4 on the whole peripheral edge of an inner peripheral surface in a direction parallel to the axis of the circular ring.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够保护生成等离子体的反应管的开口附近的内壁，容易进行维护的技术。解决方案：中心环1具有在外周表面上具有O形环附接槽5的第一圆环部分2; 以及分别与第一圆环部2的圆环的轴向两侧相邻的两个第二圆形环部3，以便在保持真空的同时定位/连接两个管的轴线。与第一圆环部2相邻的一个第二圆环部3b形成为使得外径与其他第二圆环部3a的外径相等，内径小于另一第二圆环部3a的外径，并且在平行于圆环的轴线的方向上在内周面的整个周缘上设置有突出部4。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2005008980A Power source adapter for sputtering system, and control method therefor 审中-公开
标题翻译：用于喷射系统的电源适配器及其控制方法
公开(公告)号：JP2005008980A
公开(公告)日：2005-01-13
申请号：JP2003177629
申请日：2003-06-23
申请人： Randomaaku Technol:Kk , 株式会社ランドマークテクノロジー
发明人： MATSUZAWA REIJI
IPC分类号： C23C14/34
摘要： PROBLEM TO BE SOLVED: To provide a power source adapter for a sputtering system with which film thickness is accurately controlled, and to provide a control method therefor.
SOLUTION: The power source adapter lies between a sputtering system 2 and a power source 3 and performs the ON/OFF control in the feed of power. The adapter is provided with: a voltage AD converter for digitally converting an applied voltage value and generating voltage information; a current AD converter for digitally converting a flowing-in current value and generating current information; a power integrating means for integrating input power using the voltage information and current information each digitally outputted; a target energy setting means; a set value preserving means for preserving the set value as a threshold; a power comparing means for dividing the input power to the threshold per minute time and comparing them; and a power source controlling part 20 for performing the ON/OFF control in the feed of the power with respect to the power source 3 based on the comparison result.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够精确控制膜厚度的溅射系统的电源适配器，并提供其控制方法。解决方案：电源适配器位于溅射系统2和电源3之间，并在电源馈送中执行ON / OFF控制。适配器具有：电压AD转换器，用于数字转换施加的电压值并产生电压信息; 用于数字转换流入电流值并产生电流信息的电流AD转换器; 功率积分装置，用于使用每个数字输出的电压信息和电流信息来积分输入电力; 目标能量设定装置; 用于将所述设定值保持为阈值的设定值保存装置; 功率比较装置，用于将输入功率分配到每分钟时间的阈值并将其进行比较; 以及电源控制部20，用于根据比较结果进行电源相对于电源3的供电的ON / OFF控制。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2004038502A Display method of three-dimensional shape, computer program and computer-readable storage medium 审中-公开
公开(公告)号：JP2004038502A
公开(公告)日：2004-02-05
申请号：JP2002193916
申请日：2002-07-02
申请人： Randomaaku Technol:Kk , 株式会社ランドマークテクノロジー
发明人： ITO YASUFUMI
IPC分类号： G06F17/50
摘要： PROBLEM TO BE SOLVED: To provide a display method of three-dimensional shape capable of easily finding out a wrong board thickness in a virtual phase.
SOLUTION: When a CAD viewer is executed, a three-dimensional shape is displayed on the basis of a read shape file (S302). When the formation of a board thickness contour view is instructed in a step S304, a board thickness color gradation conversion program is started, and the board thickness in each position of the three-dimensional shape under display is measured by use of the shape file with the shape concerned described therein (S305). The color in the measuring position is selected in reference to a board thickness-color conformation table (S307). Generated plate thickness color gradation data are returned to the CAD viewer. A three-dimensional shape based on the board thickness color gradation data is displayed (S308).
COPYRIGHT: (C)2004,JPO

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