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1. 发明专利

JP2006349341A CONTINUOUS HEAT TREATMENT DEVICE 审中-公开
公开(公告)号：JP2006349341A
公开(公告)日：2006-12-28
申请号：JP2006218210
申请日：2006-08-10
申请人： KOYO THERMO SYS KK , SENJU METAL INDUSTRY CO
发明人： MATSUMOTO DAISUKE , NAKAMURA HIDEKI
IPC分类号： F27B9/40 , F27B9/08 , F27B9/24 , F27B9/36 , F27D19/00
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive heat treatment device of simple constitution capable of coping with a large-sized treating object, capable of obtaining high in-plane temperature distribution precision, and capable of reducing design manhours. SOLUTION: This continuous heat treatment device is provided with a one, or two or more of heat treatment zone(s), and a cycled type conveyer 3 for conveying the treated object P, and is constituted to temporarily stop the treated object within the heat treatment zone(s). A pair of upper and lower heaters 5, 6 is arranged in the at least one heat treatment zone to heat the treated object P between the both heaters 5, 6. The heater 5 installed in an upper part has a plurality of heating units 7 juxtaposed longitudinally, the heater 6 installed in a lower part has a plurality of heating units 8 juxtaposed laterally, the cycled type conveyer 3 is installed in the vicinity of the upper heater 5, and a temperature control means is provided in every of heating units 7, 8 to control a temperature. COPYRIGHT: (C)2007,JPO&INPIT

2. 发明专利

JP2004010945A CONTINUOUS CARBURIZING FURNACE 审中-公开
公开(公告)号：JP2004010945A
公开(公告)日：2004-01-15
申请号：JP2002164603
申请日：2002-06-05
申请人： KOYO SEIKO CO , KOYO THERMO SYS KK
发明人： HATTORI KIYOYUKI , ISHII HIROSHI , HASHIMOTO HIROYUKI
IPC分类号： C23C8/20 , C21D1/06 , C21D1/74
摘要： PROBLEM TO BE SOLVED: To provide a continuous carburizing furnace by which carburizing/diffusion treatment is processed quickly and, moreover, the stable effect of processing is obtained. SOLUTION: A front exhaust valve 2 which leads an atmosphere gas in a temperature elevation zone 3 to an upstream side and exhausts it by adjusting valve opening is installed on the upstream side of the zone 3, a rear exhaust valve 9 which leads the atmosphere gas in a carburizing/diffusion zones 4 and 5 to the down stream side and exhausts it by adjusting valve opening is positioned on the down stream side of carburizing/diffusion zones 4 and 5, and an intermediate door 11 which can be opened and closed and divide the zone 3 and carburizing/diffusion zones 4 and 5 is arranged. COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2004006447A HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROLLING METHOD USED FOR IT 审中-公开
公开(公告)号：JP2004006447A
公开(公告)日：2004-01-08
申请号：JP2002155285
申请日：2002-05-29
申请人： KOYO SEIKO CO , KOYO THERMO SYS KK
发明人： HATTORI AKIRA , ITO MAKOTO
IPC分类号： C23C16/52 , H01L21/205 , H01L21/22
摘要： PROBLEM TO BE SOLVED: To provide a heat treatment apparatus and its temperature controlling method with facilitated setting and change of manipulated variable without causing a sudden drop in the temperature inside a furnace and large overshoot, even in the case when there are variations in the size and quantity of wafers to be introduced. SOLUTION: A furnace 1 has three zones 101 to 103 for temperature control. A temperature controlling part 20 outputs controlling signals St, Sc and Sb exhibiting the manipulated variable controlling each of heaters 91 to 93 heating corresponding regions while regulating the electric power to be supplied, so as to bring the measured temperature that is detected by each of profiles 71 to 73 and each of spikes 81 to 83 provided correspondingly to the zones close to the set temperature. At the time when a lower lid 10 is opened to introduce wafers 3 and boats 2 mounting them into a reaction tube 4, a predetermined bias manipulated variable is added to the manipulated variable so as to increase the calorific value of a BTM heater 93. COPYRIGHT: (C)2004,JPO

4. 发明专利

JP2003148873A INDUCTION HEATING DEVICE 审中-公开
公开(公告)号：JP2003148873A
公开(公告)日：2003-05-21
申请号：JP2001340732
申请日：2001-11-06
申请人： KOYO THERMO SYS KK
发明人： FUJIYAMA CHIKAHIDE , ISHIBASHI SATOYUKI
IPC分类号： F27D19/00 , F27D11/06
摘要： PROBLEM TO BE SOLVED: To provide an induction heating device which uniformly heats a treated object by relieving the temperature nonuniformity of the heating plate. SOLUTION: In this induction heating device 1 for heating the treated object with radiation heat from the heating plate 3, the heating plate 3 is induction heated by a heating coil 2 having a plurality of coil parts 2a, 2b wound in concentric circle shape, and a support mechanism 4 is provided for supporting the respective coil parts 2a, 2b independently in a vertically movable manner to the heating plate 3.

5. 发明专利

JP2003142862A HEATING COIL COOLING DEVICE 审中-公开
公开(公告)号：JP2003142862A
公开(公告)日：2003-05-16
申请号：JP2001340777
申请日：2001-11-06
申请人： KOYO THERMO SYS KK
发明人： FUJIYAMA CHIKAHIDE , ISHIBASHI SATOYUKI
IPC分类号： H05B6/36 , H05K7/20
摘要： PROBLEM TO BE SOLVED: To provide a heating coil cooling device that can cool a heating coil used to cause an object to generate heat through induction heating, has a compact size, and has an effect on energy conservation. SOLUTION: A highly heat-conductive sheet 3 having higher thermal conductivity in the facial direction than the thickness direction is laid under the heating coil 1, and a radiator 4 having heat radiating fins 4a is brought into contact with the extended portion of the sheet 3 in the facial direction.

6. 发明专利

JP2003130548A ROTARY RETORT FURNACE 审中-公开
公开(公告)号：JP2003130548A
公开(公告)日：2003-05-08
申请号：JP2001326594
申请日：2001-10-24
申请人： KOYO THERMO SYS KK
发明人： YANAGIDA MASAKATSU
IPC分类号： F27B7/06 , F27B7/08 , F27B7/26
摘要： PROBLEM TO BE SOLVED: To increase processing capacity of a rotary retort furnace. SOLUTION: A retort 2 is detachably arranged in a furnace body 1 capable of opening-closing an upper furnace shell 11b. The retort 2 is lifted to be attached and detached by using a lifting device 4 in a state of opening the upper furnace shell 11b. A processed object is directly recovered in the retort 2.

7. 发明专利

JP2002343731A HEAT TREATMENT DEVICE 失效
公开(公告)号：JP2002343731A
公开(公告)日：2002-11-29
申请号：JP2001143383
申请日：2001-05-14
申请人： KOYO THERMO SYS KK
发明人： MAEDA HIDEKI , NISHIMURA KEISUKE , FUKUYAMA YOSHIHARU
IPC分类号： H01L21/22 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a heat treatment device capable of preventing a byproduct adhering to the inside surfaces of a joint and an exhaust pipe from dropping to the bottom end side of a process tube and thus to prevent a substance to be treated from being contaminated. SOLUTION: In the heat treatment device having a boat 8 for placing a semiconductor wafer (substance to be treated) thereon and capable of moving up and down in a process tube 1, a tray 9 for recovering the byproduct dropping from an exhaust port 1a to which the exhaust pipe 3 is connected via a joint 4 is mounted on the top plate 8a of the boat 8.

8. 发明专利

JP2002318081A HEAT TREATMENT METHOD AND HEAT TREATMENT DEVICE USED FOR IT 失效
公开(公告)号：JP2002318081A
公开(公告)日：2002-10-31
申请号：JP2001118392
申请日：2001-04-17
申请人： KOYO SEIKO CO , KOYO THERMO SYS KK
发明人： HATTORI KIYOYUKI , ISHII HIROSHI , HARADA TOSHIYUKI
IPC分类号： C21D1/00 , C21D1/74 , C21D1/773 , C21D9/00 , F27B9/02 , F27B9/04 , F27B9/38 , F27D7/06 , F27D19/00
摘要： PROBLEM TO BE SOLVED: To provide a heat treatment method and a heat treatment device used therefor capable of preventing turbulence from being caused to the atmospheric gas in a heating chamber, and thereby preventing the deterioration in the treatment quality and efficiency of a work. SOLUTION: A controlling part 4 operates a vacuum pump (a pressure- reducing means) VP first to reduce the internal pressure of a purge chamber 3 to the predetermined pressure. After that, a large-bore working valve 13a and a small-bore working valve 13b (purge gas supplying means) are operated to supply the atmospheric gas in the heating chamber 1 to the inside of the purge chamber 3. After that, the controlling part 4 operates a transferring means 5 to transfer a work W between the purge chamber 3 and the heating chamber 1 in such a state that the internal pressure of the purge chamber 3 is substantially the same pressure as the internal pressure of the heating chamber 1 on the basis of the detected values from the first and second pressure sensors PS1 and PS2.

9. 发明专利

JP2002270602A HEAT TREATING APPARATUS 失效
公开(公告)号：JP2002270602A
公开(公告)日：2002-09-20
申请号：JP2001066516
申请日：2001-03-09
申请人： KOYO THERMO SYS KK
发明人： NISHIMURA KEISUKE
IPC分类号： H01L21/22 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a heat treating apparatus, which can prevent particles from creeping into a loading chamber and which can prevent a semiconductor wafer from becoming contaminated. SOLUTION: A cylindrical hole part 2b comprising a ring-shaped flange part 2a is formed in a partition plate 2, which partitions a heater chamber 1 and the loading chamber 3. A flange 5b is installed, so as to protrude around the lower-end opening 5a of a process tube 5. A support ring 10, which is provided with an inner circumferential flange 10a and an outer circumferential flange 10b coming respectively into contact with the flange 5b and the flange part 2a, is attached to the hole part 2b. In addition, a gap between the flange 10a and the flange 5b and a gap between the flange 10b and the flange part 2a are sealed with a seal packing 11a and a seal packing 11b.

10. 发明专利

JP2002265030A CARRYING DEVICE 失效
公开(公告)号：JP2002265030A
公开(公告)日：2002-09-18
申请号：JP2001069914
申请日：2001-03-13
申请人： KOYO THERMO SYS KK , SENJU METAL INDUSTRY CO
发明人： MATSUMOTO DAISUKE , NAKAMURA HIDEKI
IPC分类号： B65G25/02
摘要： PROBLEM TO BE SOLVED: To provide a carrying device capable of quickening a carrying speed of a treatment object more than a conventional device, and capable of setting the temperature distribution of the treatment object in a desirable state. SOLUTION: This walking beams type carrying device 2 lifts the treatment object from a treatment object placing part, and lowers and places the treatment object on the treatment object placing part by at least a pair of vertically moving beams 4. The device has position detecting means S1, S2, S2 and S4 for detecting a vertical position of the beams 4, and has a control means 1 for controlling a vertical moving speed of the beams 4 on the basis of the vertical position of the beams 4 detected by the position detecting means S1, S2, S3 and S4, and is formed so as to slow the vertical moving speed of the beams 4 when the beams 4 lift the treatment object P from the placing part 5, and when the beams 4 lower and place the treatment object P on the placing part 5.

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