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1. 发明专利

JP2010199072A Forming method and forming device of image contrast by phase shift 有权
标题翻译：通过相位移动形成图像对比的方法和形成装置
公开(公告)号：JP2010199072A
公开(公告)日：2010-09-09
申请号：JP2010041184
申请日：2010-02-26
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM , ROSE HARALD
IPC分类号： H01J37/26 , H01J37/153
CPC分类号： H01J37/263 , H01J2237/2614
摘要： PROBLEM TO BE SOLVED: To further improve an image contrast without causing an unallowable error during its improving process. SOLUTION: A quadrupole field (Q 2 ', Q 4 ', Q 12 ', Q 14 ') arranged in front of and in rear side of an anamorphic image (6, 6') for forming and compensating at least one anamorphic image (6, 6') is used so that a widening of the quadrupole filed in its optical axis (10) may become at least two times of a focal distance, and at least one of axial rays (x α , y β ) is made incident into the quadrupole field (Q 2 '; Q 12 ') by a suitable selection of a magnification M of an intermediate image (5) at a gradient of 1/M in front of the at least one anamorphic image (6, 6'), and a length (7) of the anamorphic image (6, 6') is made to remain within an allowable error region. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了进一步提高图像对比度而不会在其改进过程中引起不可容忍的错误。
解决方案：四极场（Q 2 '，Q 4 '，Q 12 布置在用于形成和补偿至少一个变形图像（6,6'）的变形图像（6,6'）的前侧和后侧的“>”）被使用，使得四极杆在其光轴上的加宽（10）可以变为焦距的至少两倍，并且轴向射线（x α，y β）中的至少一个入射到四极场（通过适当选择中间图像（5）的放大倍数M以至少至少在前面1 / M的梯度来选择Q 2 '; Q 12 使一个变形图像（6,6'）和变形图像（6,6'）的长度（7）保持在允许的误差区域内。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2008293977A Monochromator and radiation source equipped with monochromator 有权
标题翻译：单色器和放射源配有单色显示器
公开(公告)号：JP2008293977A
公开(公告)日：2008-12-04
申请号：JP2008135745
申请日：2008-05-23
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： UHLEMANN STEPHAN
IPC分类号： H01J37/05
CPC分类号： H01J37/153 , H01J37/05 , H01J37/26 , H01J49/48 , H01J2237/057 , H01J2237/1534 , H01J2237/1538
摘要： PROBLEM TO BE SOLVED: To provide a monochromator used for an electron microscope. SOLUTION: The monochromator for a charged particle optics, in particular, used for the electron microscope, comprises at least one first deflection element (2, 3) with an electrostatic deflection field (2', 3') for generating a dispersion (4) in the plane (5) of a selection aperture (6) for selecting the charged particles of the desired energy width (7), and at least one second deflection element (8, 9) with an electrostatic deflection field (8', 9') which eliminates the dispersion (4) of at least one first deflecting field (2', 3'). COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供用于电子显微镜的单色仪。特别是用于电子显微镜的带电粒子光学器件的单色仪包括至少一个具有静电偏转场（2'，3'）的第一偏转元件（2,3），用于产生分散体（6）中的用于选择所需能量宽度（7）的带电粒子的平面（5）中的至少一个第二偏转元件（8）和具有静电偏转场（8'）的至少一个第二偏转元件（8,9），9'），其消除了至少一个第一偏转场（2'，3'）的色散（4）。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009140924A Corrector for axial and off-axial beam paths 有权
标题翻译：轴向和离轴光束校正器
公开(公告)号：JP2009140924A
公开(公告)日：2009-06-25
申请号：JP2008297643
申请日：2008-11-21
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM , ROSE HARALD
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1534
摘要： PROBLEM TO BE SOLVED: To eliminate the astigmatism of third-order without introducing disturbing aberrations of higher-order. SOLUTION: The present invention relates to a corrector for the axial and off-axial beam paths of a particle-optical system. The corrector includes a first and a second correction piece, which are disposed one behind the other in the beam path on an optical axis. Each correction piece includes four successive multipole elements disposed symmetrically with respect to a center plane and with the following fields. The first and the fourth multipole elements of the multipole elements are used to generate quadrupole fields and the second and third are used to generate octupole fields and quadrupole fields, wherein the latter are superposed magnetic and electric fields, wherein the quadrupole fields of all four multipole elements are rotated from one to the next through 90°. An astigmatism of third-order is corrected by a central multipole element disposed in the center plane and generating an octupole field. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：消除三阶散光，不引入高阶干扰像差。解决方案：本发明涉及一种用于粒子 - 光学系统的轴向和离轴光束路径的校正器。校正器包括第一和第二校正片，其在光轴上在光束路径中一个接一个地设置。每个校正件包括四个连续的多极元件，其相对于中心平面和随后的场对称设置。多极元件的第一和第四多极元件用于产生四极场，第二和第三多极元件用于产生八极场和四极场，其中后者是叠加的磁场和电场，其中所有四个多极的四极场元件从一个到另一个旋转90°。通过设置在中心平面中的中心多极元件来校正三阶散光并产生八极场。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2012160454A Corrector 有权
标题翻译： CORRECTOR
公开(公告)号：JP2012160454A
公开(公告)日：2012-08-23
申请号：JP2012019751
申请日：2012-02-01
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1534
摘要： PROBLEM TO BE SOLVED: To provide a corrector which is suitable for transmission electron microscopes and is insensitive to fluctuations in the electrical energy supply.SOLUTION: The invention concerns a corrector (9) for chromatic and aperture aberration correction in an electron microscope with six multipoles (1, 2, 3, 4, 5, 6) which are disposed in the optical path (7) one after the other symmetrically with respect to a symmetry plane (8) for generating quadrupole fields (1', 2', 3', 4', 5', 6') and octupole fields, in which the quadrupole fields (1', 2', 3', 4', 5', 6') of all six multipoles (1, 2, 3, 4, 5, 6) are orderly rotated through 90° with respect to one another, thereby generating a mirror-symmetrical exchange symmetry of axial fundamental rays (x, y).
摘要翻译：要解决的问题：提供适用于透射电子显微镜的校正器，并且对电能的波动不敏感。解决方案：本发明涉及一种用于在电子显微镜中进行彩色和孔径像差校正的校正器（9），其中六个多极（1,2,3,4,5,6）设置在光路（7）中一个相对于用于产生四极场（1'，2'，3'，4'，5'，6'）和八极场的对称平面（8）对称地分布，其中四极场（1'，2' 所有六个多极（1,2,3,4,5,6）的'，3'，4'，5'，6'）相对于彼此有序旋转90°，从而产生镜对称交换轴向基线的对称性（x α，y β）。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2009105048A Correction device 有权
标题翻译：校正装置
公开(公告)号：JP2009105048A
公开(公告)日：2009-05-14
申请号：JP2008269925
申请日：2008-10-20
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM
IPC分类号： H01J37/153
CPC分类号： H01J37/153 , H01J37/145 , H01J37/28 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： PROBLEM TO BE SOLVED: To provide a correction device in which a chromatic aberration and an aperture aberration in a scanning electron microscope or a scanning transmission type electron microscope are removed.
SOLUTION: The correction device is provided with four multipole elements arranged continuously in an optical path (9), and a first multipole element (1) and a fourth multipole element (4) are used in order to make 4-pole fields (5, 6), and a second multipole element (2) and a third multipole element (3) are used in order to make 8-pole magnetic fields (7, 8) and a 4-pole field, and the 4-pole fields of the above four multipole elements rotate continuously each in 90°, and the second (2) and the third multipole elements (3) are designed as a 12-pole element by using 12-pole fields (25, 26), and the additional 12-pole element (13) is inserted between the second (2) and the third multipole elements (3), and moreover, an 8-pole filed (14) is overlapped by a 12-pole field (15) in the additional 12-pole element (13).
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种其中除去扫描电子显微镜或扫描透射型电子显微镜中的色像差和孔径像差的校正装置。解决方案：校正装置设置有在光路（9）中连续布置的四个多极元件，并且使用第一多极元件（1）和第四多极元件（4）来形成4极场（5,6），并且使用第二多极元件（2）和第三多极元件（3），以便制造8极磁场（7,8）和4极场，并且4极上述四个多极元件的场均以90°连续旋转，并且通过使用12极场（25,26）将第二（2）和第三多极元件（3）设计为12极元件，并且附加的12极元件（13）插入在第二（2）和第三多极元件（3）之间，此外，8极场（14）由附加的12极场（15）重叠 12极元件（13）。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2012129208A Corrector 有权
标题翻译： CORRECTOR
公开(公告)号：JP2012129208A
公开(公告)日：2012-07-05
申请号：JP2011273613
申请日：2011-12-14
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM , UHLEMANN STEPHAN
IPC分类号： H01J37/153 , H01J37/09
CPC分类号： H01J37/153 , H01J2237/1534 , H01J2237/28 , H01J2237/2802
摘要： PROBLEM TO BE SOLVED: To provide better correction to reduce aberrations, advantageously, higher-order aberrations.SOLUTION: A stigmatic intermediate image (9) of axial fundamental trajectories (x, y) is produced in the quadrupole field (1') of a first quadrupole element (1). This quadrupole field (1') is set such that astigmatic intermediate images (12, 13) of the off-axial fundamental trajectories (x, y) are produced in a center region of the two quadrupole fields (3', 4') of a third multipole element (3) and a fourth multipole element (4). In the region, due to the setting of the quadrupole field (2') of a second quadrupole element (2), the two axial fundamental trajectories (x, y) in the same plane (x, y) as the intermediate images (12, 13) of the two off-axial fundamental trajectories (x, y) are located in exhibit a maximum respectively.
摘要翻译：要解决的问题：为了提供更好的校正以减少像差，有利地是高阶像差。
解决方案：产生轴向基本轨迹（x α，y β）的眩目中间图像（9）第一四极元件（1）的四极场（1'）。该四极场（1'）被设置为使得偏轴基本轨迹（x γ，y δ）在第三多极元件（3）和第四多极元件（4）的两个四极场（3'，4'）的中心区域中产生。在该区域中，由于第二四极元件（2）的四极场（2'）的设置，两个轴向基本轨迹（x αγ< SB>，y δ）分别表现为最大值。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2009081138A Multipolar coil 审中-公开
标题翻译：多芯线圈
公开(公告)号：JP2009081138A
公开(公告)日：2009-04-16
申请号：JP2008245525
申请日：2008-09-25
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人： ZACH JOACHIM , KALLENBACH MATTHIAS
IPC分类号： H01J37/141
CPC分类号： H01J1/50 , H01F5/003 , H01J29/762 , H01J29/768 , H01J37/153 , H01J37/26 , H01J2237/141 , H05K1/0393 , H05K1/165 , Y10T29/4902
摘要： PROBLEM TO BE SOLVED: To introduce a multipolar coil suitable for aberration correction in a particle optical system, with a space required for a structure remarkably reduced, generating an effective region in an imaginary axis region, and to be manufactured reproducibly in high precision. SOLUTION: A winding of the multipolar coil forms a window whose width in an outer face direction is chosen in such a fashion that no secondary interfering fields are formed and whose length in an axial direction corresponds at least to its width. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了在粒子光学系统中引入适合于像差校正的多极性线圈，具有显着减小的结构所需的空间，在虚轴区域中产生有效区域，并且以高的方式重复制造精确。解决方案：多极线圈的绕组形成窗口，其外表面方向上的宽度被选择为使得不形成二次干涉场，并且其在轴向上的长度至少对应于其宽度。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP4271037B2 Particle optical corrector 有权
公开(公告)号：JP4271037B2
公开(公告)日：2009-06-03
申请号：JP2003550246
申请日：2002-12-03
申请人：ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハーCEOS Corrected Electron Optical Systems GmbH
发明人：ヘイコミューラー , ハラルドローセ
IPC分类号： H01J37/153 , G01Q30/00 , H01L21/027
CPC分类号： H01J37/153 , H01J2237/1534

10. 发明专利

JP2007266008A Correction method of image aberration of electron optical system 审中-公开
标题翻译：电子光学系统图像去除的校正方法
公开(公告)号：JP2007266008A
公开(公告)日：2007-10-11
申请号：JP2007182485
申请日：2007-07-11
申请人： Ceos Corrected Electron Optical Systems Gmbh , ツェーエーオーエスコレクテッドエレクトロンオプチカルシステムズゲーエムベーハー
发明人： HAIDER MAXIMILIAN , UHLEMANN STEPHAN
IPC分类号： H01J37/153 , G01Q30/06
CPC分类号： H01J37/153
摘要： PROBLEM TO BE SOLVED: To provide a method of removing the image aberration of the axis of an electron optical system, in which the image aberration of a first, second, third, and n-th dimensional order axis are removed, and a method of removing the image aberration of the electron optical system provided with a hexapole field. SOLUTION: The image aberration of an axis is removed by shifting or inclining a beam path using the aberration α and γ of the higher order image of the outside of an axis, wherein α n is the image aberrations on the axis of the electron optical system. The first and second order image aberrations in the electron optical system provided with the hexapole field are removed by superimposing a quadrupole field or the hexapole field on the hexapole field. COPYRIGHT: (C)2008,JPO&INPIT

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