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    • 2. 发明专利
    • Hot press
    • 热压
    • JP2010179324A
    • 2010-08-19
    • JP2009023353
    • 2009-02-04
    • Kyoshin Engineering:Kk株式会社協真エンジニアリング
    • KAWAHARA MASARU
    • B30B15/34B29C43/02B29C43/32B30B12/00
    • PROBLEM TO BE SOLVED: To provide a hot press which can produce a heated and pressurized product with high accuracy and high precision.
      SOLUTION: In the hot press, a pressure vessel 12 comprises an upper half body 12U, a lower half body 12L, an intermediate annular sealed body 17 and a clutch ring 14, and the upper half body 12U, the lower half body 12L and the intermediate annular body 17 are sealed to be engaged with one another. A hot plate 20 is composed of the upper hot plate 20U and the lower hot plate 20L. A workpiece 50 is arranged between the central part 21U of the upper hot plate and the central part 21L of the lower hot plate, an apparatus reducing pressure and an apparatus increasing pressure act starting media on the upper hot plate and the lower hot plate, thus the workpiece 50 is subjected to heating-pressurizing in the pressure vessel 12.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供可以以高精度和高精度生产加热和加压产品的热压机。 解决方案:在热压机中,压力容器12包括上半体12U,下半体12L,中间环形密封体17和离合器环14,以及上半体12U,下半体 12L和中间环形体17被密封以彼此接合。 热板20由上加热板20U和下加热板20L组成。 工件50配置在上部加热板的中央部21U和下部热板的中央部21L之间,减压装置和增压装置作用在上部加热板和下部热板上的起始介质 工件50在压力容器12中进行加热加压。版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • High-pressure annealing steam treatment device
    • 高压退火处理装置
    • JP2009128837A
    • 2009-06-11
    • JP2007306762
    • 2007-11-28
    • Kyoshin Engineering:Kk株式会社協真エンジニアリング
    • TAGUCHI SHUJIKAWAHARA MASARU
    • G02F1/13B65G49/06B65G49/07H01L21/673H01L21/677
    • PROBLEM TO BE SOLVED: To provide a vertical type high-pressure annealing steam treatment device capable of simultaneously treating a great amount of large glass substrates.
      SOLUTION: The high-pressure annealing steam treatment device is characterized in that: a pressure vessel 22 includes a cylindrical intermediate drum part 22A laid in a horizontal state, a cap member 22B disposed at one end of the intermediate part, and a sealing member 22C disposed at the other end of the intermediate part; a reaction vessel 24 includes a vessel body 24A with one end closed and the other end open, and a closing member 24B closing the open end of the vessel drum part; the vessel body 24A of the reaction vessel is lifted and supported by a drum holding means 60 for the intermediate drum part 22A of the pressure vessel and by a reaction vessel positioning structure; the closing member 24B of the reaction vessel is lifted and supported by a locking means, a gripping means and a linking means for the closing member 22C of the pressure vessel; a cassette unit holding base 40 is provided in the reaction vessel 24; and a reaction vessel bearing means is provided between the reaction vessel 24 and the pressure vessel 22.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供能够同时处理大量大玻璃基板的立式高压退火蒸汽处理装置。 解决方案:高压退火蒸汽处理装置的特征在于:压力容器22包括以水平状态放置的圆柱形中间鼓部分22A,设置在中间部分一端的盖部件22B,以及 设置在中间部分的另一端的密封构件22C; 反应容器24包括一端闭合并另一端打开的容器主体24A和闭合容器鼓部的开口端的封闭构件24B; 反应容器的容器主体24A由用于压力容器的中间鼓部分22A的鼓保持装置60和反应容器定位结构提升和支撑; 反应容器的关闭构件24B由锁定装置,夹持装置和用于压力容器的关闭构件22C的连接装置提升和支撑; 在反应容器24中设置盒单元保持基座40; 并且反应容器承载装置设置在反应容器24和压力容器22之间。版权所有(C)2009,JPO&INPIT
    • 6. 发明专利
    • Steam annealing method
    • JP2004311631A
    • 2004-11-04
    • JP2003101548
    • 2003-04-04
    • Kyoshin Engineering:Kk株式会社協真エンジニアリング
    • KAWAHARA MASARU
    • H01L21/316
    • PROBLEM TO BE SOLVED: To solve the problem of conventional high pressure annealing procedure in which a processed work is often spoiled with spotlike stains. SOLUTION: When the temperature (T) in a processing chamber 19 becomes higher by Δt than the saturation temperature (t) for the inner pressure of the processing chamber 19 after preheating (H1), heating means 25c and 25d are actuated to evaporate pure water by heating a pure water holding chamber 20 thus raising the saturation temperature (t) for the inner pressure of the processing chamber 19 and the saturation steam pressure (P) in the annealing chamber 19. After the saturation steam pressure (P), the saturation temperature (t) and the temperature (T) in the processing chamber 19 are settled at specified levels (H2), annealing work is started while sustaining the saturation temperature (t) and the saturation steam pressure (P) at constant levels. After ending the annealing work (H3), the T, t and P are returned gradually back to initial levels while sustaining the temperature (T) at a level higher by Δt than the saturation temperature (t). COPYRIGHT: (C)2005,JPO&NCIPI
    • 7. 发明专利
    • Automatic valve system
    • 自动阀系统
    • JP2004308740A
    • 2004-11-04
    • JP2003101627
    • 2003-04-04
    • Kyoshin Engineering:Kk株式会社協真エンジニアリング
    • KAWAHARA MASARU
    • F16K1/00H01L21/31
    • PROBLEM TO BE SOLVED: To provide an automatic valve system capable of solving a problem that the insulating property of an oxide film is impaired by foreign matter such as metallic ions mixed in the pure water in executing the high-pressure annealing steam treatment method using the pure water, and refilling the desired amount of pure water at a desired time and stopping the same without mixing the metallic ions and the like into the pure water. SOLUTION: This automatic valve system 13, 70 is respectively composed of a valve body 46, 71 automatically supplying the desired fluid into a pressure container 15, and having a hole 55, 80 longitudinally extended inside thereof, a receiving member 47, 72 mounted in the valve main body and receiving the fluid from the external into the valve body, a delivery member 48, 73 mounted on the valve body and delivering the received pure water from the valve main body, a valve element 48, 74 movable in the longitudinal hole of the valve body, and a starting member 51, 76 for starting the valve element. A retaining member 50, 75 is screwed in the valve body. COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决问题的方案:提供一种自动阀系统,其能够解决在执行高压退火蒸汽处理时,在纯水中混入金属离子等异物,氧化膜的绝缘性受到损害的问题 使用纯水的方法,并在期望的时间再填充所需量的纯水,并将其停止,而不将金属离子等混入纯水中。 解决方案:该自动阀系统13,70分别由阀体46,71自动地将期望的流体供应到压力容器15中,并且具有在其内纵向延伸的孔55,80,接收构件47, 72,其安装在阀主体中并将流体从外部接收到阀体中;安装在阀体上的输送构件48和73,并且从阀主体输送接收到的纯水;阀元件48,74, 阀体的纵向孔以及用于起动阀元件的起动构件51,76。 保持构件50,75旋入阀体中。 版权所有(C)2005,JPO&NCIPI
    • 10. 发明专利
    • Drying apparatus and drying method
    • 干燥装置和干燥方法
    • JP2013053825A
    • 2013-03-21
    • JP2011193406
    • 2011-09-05
    • Kyoshin Engineering:Kk株式会社協真エンジニアリング
    • KAWAHARA MASARUWAKUI TAKEHIKO
    • F26B5/04F26B11/14F26B21/00
    • PROBLEM TO BE SOLVED: To provide a drying apparatus enhanced in drying capacity without impairing the sealability of a hermetic treatment chamber.SOLUTION: A power transmission shaft 53 connected to the fan 51 within the treatment room 21 and to the power source outside the chamber 20 is inserted into the through hole 29 of the chamber 20. A pressure adjusting means switches over a first pressure state within the treatment room 21 higher than a normal pressure and a second pressure state inside the same lower than the normal pressure. A state switching means switches over an airtight state for fixing the space between the chamber 20 and the power transmission shaft 53 in an airtight state and a rotatable state for releasing the airtight state to enable the power transmission shaft 53 to rotate. A control means turns the interior of the treatment room 21 into the first pressure state, and releases the airtight state between the chamber 20 and the power transmission shaft 53 to allow the fan 51 to rotate at a high speed, causing an object to be dried to be rapidly heated by a high speed fluid gas. Furthermore, the control means turns the interior of the treatment room 21 into the second pressure state, and turns the space between the chamber 20 and the power transmission shaft 53 into an airtight state, causing the object to be dried to be dried in vacuum.
    • 要解决的问题:提供一种增强干燥能力的干燥装置,而不会影响密封处理室的密封性。 解决方案:连接到处理室21内的风扇51和室20外的电源的动力传递轴53插入到室20的通孔29中。压力调节装置将第一压力 处于处理室21内的状态比正常压力高的状态以及低于常压的第二压力状态。 状态切换装置切换用于将气室20和动力传递轴53之间的空间固定在气密状态和用于释放气密状态的旋转状态的气密状态,以使动力传递轴53能够旋转。 控制装置将处理室21的内部转变为第一压力状态,并且释放室20和动力传递轴53之间的气密状态,以允许风扇51高速旋转,使物体被干燥 被高速流体气体快速加热。 此外,控制装置将处理室21的内部变为第二压力状态,并且将室20和动力传递轴53之间的空间转变为气密状态,使得被干燥的物体在真空中干燥。 版权所有(C)2013,JPO&INPIT