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    • 7. 发明专利
    • Chuck plate
    • 卡盘
    • JP2007180094A
    • 2007-07-12
    • JP2005373938
    • 2005-12-27
    • Densho Engineering Co LtdNikken Toso Kogyo Kk日建塗装工業株式会社株式会社 電硝エンジニアリング
    • SUMIMOYA IWAOSUNADA KOUKI
    • H01L21/683
    • PROBLEM TO BE SOLVED: To provide a chuck plate whose life can be extended by increasing the thickness of a fluorine containing resin coating layer. SOLUTION: The surface 11a of the base material 11 of the chuck plate 10 is turned into a rough face by sandblasting with a large air volume under a pressure of 0.05-0.15 MPa. When the base material 11 is made of stainless steel, titanium, or titanium alloy, the surface 11a is turned into a rough face of Rmax 40-60 μm; and when the base material 11 is made of aluminum, the surface 11a is turned into a rough face of Rmax 75-90 μm. Thereafter, the surface is coated with a fluorine containing resin added with a conductive material. The thickness of the coating layer after polishing is 50-100 μm and the surface flatness is 20 μm or less. By making the surface 11a a rough face of Rmax 40-60 μm, the fluorine containing resin layer 12 can made thick and thereby the life of the chuck plate can be extended. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种通过增加含氟树脂涂层的厚度来延长寿命的卡盘板。 解决方案:通过在0.05-0.15MPa的压力下以大的空气量进行喷砂,将卡盘板10的基材11的表面11a变成粗糙面。 当基材11由不锈钢,钛或钛合金制成时,表面11a变成Rmax为40-60μm的粗糙面; 并且当基材11由铝制成时,表面11a变成Rmax为75-90μm的粗糙面。 此后,表面涂覆有加入导电材料的含氟树脂。 研磨后的被覆层的厚度为50〜100μm,表面平坦度为20μm以下。 通过使表面11a成为Rmax为40-60μm的粗糙面,可以使含氟树脂层12变厚,从而可以延长卡盘板的寿命。 版权所有(C)2007,JPO&INPIT