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1. 发明专利

JPWO2008044319A1 ＥＵＶ光発生装置及びＥＵＶ露光装置有权
公开(公告)号：JPWO2008044319A1
公开(公告)日：2010-02-04
申请号：JP2008538554
申请日：2006-10-13
申请人：株式会社光子発生技術研究所 , 山田廣成
发明人：廣成山田 , 廣成山田
IPC分类号： H01L21/027
CPC分类号： G21K1/06 , G03F7/70008 , G21K2201/06 , G21K2201/064 , G21K2201/067
摘要：プラズマEUV光源の問題(デブリの発生)を生じることなく、十分な強度のEUV光を出力することができるEUV光発生装置及びEUV露光装置を提供するために、EUV光発生装置は、シンクロトロン(1)と、シンクロトロン(1)内部の電子の周回軌道(2)上に配置され、電子が入射されてEUV光(L)を発生する複数のターゲット(T)と、入射されるEUV光(L)を所定の方向に反射するマジックミラー(3)と、マジックミラー(3)によって反射されたEUV光をシンクロトロン(1)の外部に取り出す出力ポート(4)とを備え、複数のターゲット(T)の各々が、他のターゲット(T)から発生するEUV光(L)を遮らないように配置され、マジックミラー(3)によって反射されたEUV光が集光光または平行光である。

2. 发明专利

JP2010032341A X-ray analyzer 审中-公开
标题翻译： X射线分析仪
公开(公告)号：JP2010032341A
公开(公告)日：2010-02-12
申请号：JP2008194363
申请日：2008-07-29
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , MORITA MASAKI
IPC分类号： G01N23/08 , G01N23/201 , G21K1/06 , H05G2/00 , H05H13/04
摘要： PROBLEM TO BE SOLVED: To provide an analyzer, especially an XAFS analyzer or a small angle scattering X-ray analyzer having a short beam line and high resolving power and capable of measuring a two-dimensional region in a short time.
SOLUTION: The X-ray analyzer is equipped with a charged particle turning means (1) for turning the charged particles produced by a charged particle producing means to the inside, a spectral means (2) for spectrally separating X rays generated by colliding the turned charged particles against the oblong target (14) arranged on the turning track (13) of the turned charged particles to generate monochromatic X ray, and a measuring means (3) for irradiating a measuring target sample (4) with the monochromatic X rays outputted from the spectral means (2) and measuring the X rays outputted from the sample (4).
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有短束线和高分辨能力并且能够在短时间内测量二维区域的分析仪，特别是XAFS分析仪或小角度散射X射线分析仪。解决方案：X射线分析仪装备有用于将由带电粒子产生装置产生的带电粒子转向内部的带电粒子转动装置（1），用于将由X射线产生的X射线进行光谱分离的光谱装置（2）将转动的带电粒子碰到布置在转向带电粒子的转向轨道（13）上的长圆形靶（14）上以产生单色X射线;以及测量装置（3），用于将测量目标样品（4）与单色从光谱装置（2）输出的X射线并测量从样品（4）输出的X射线。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2007035495A Magnetic circuit device and synchrotron device using it 有权
标题翻译：使用它的磁电路装置和同步装置
公开(公告)号：JP2007035495A
公开(公告)日：2007-02-08
申请号：JP2005218617
申请日：2005-07-28
申请人： Nec Tokin Corp , Necトーキン株式会社 , Photon Production Laboratory Ltd , Tokin Machinery:Kk , Hiroshige Yamada , 山田廣成 , 株式会社トーキンマシナリー , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , TOYOSUGI NORIO , MATSUMOTO NORIYUKI
IPC分类号： H05H13/04 , H01F7/02
摘要： PROBLEM TO BE SOLVED: To provide a magnetic circuit device efficiently accumulating electron beams by easily removing a fringe magnetic field without disturbing a controlled field distribution area even in a limited space. SOLUTION: In this compact synchrotron device, a coil 2 inside a yoke 1, and a coil (a schematic drawing) inside a pole piece 3 make up a bipolar electromagnet as well as a magnetic circuit device for removing a fringe magnetic field generated by a controlled magnetic field in the vicinity of the controlled magnetic field distribution area E B satisfying conditions of a stable revolution trajectory for accumulating electron beams. A magnetic field generator (generating a magnetic field for removing the fringe magnetic field) is arranged, which is made by combining and arranging magnet blocks (made by combining the given number of permanent magnets with different magnifying directions) 6 to 12 along a magnetic flux line of the controlled magnetic field distribution area E B in a circular shape so as to be extended in the vicinity of incident and irradiating routes of electron beams along the stable revolution trajectory. Gaps to be light paths for accepting and irradiating the electron beams are provided at the magnetic block 6, 11. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：即使在有限的空间中，也可以通过容易地去除边缘磁场而不扰乱受控的场分布区域来提供有效地积聚电子束的磁路装置。解决方案：在该紧凑型同步加速装置中，磁轭1内的线圈2和极靴3内部的线圈（示意图）构成双极型电磁铁以及用于去除边缘磁场的磁路装置通过满足用于积聚电子束的稳定旋转轨迹的条件的受控磁场分布区域E B 附近的受控磁场产生。布置磁场发生器（产生用于去除边缘磁场的磁场），其通过沿着磁通量组合和布置磁体块（通过组合给定数量的具有不同放大方向的永久磁铁制成）6-12 该受控磁场分布区域E B 的圆弧形状沿着稳定的旋转轨迹在电子束的入射和照射路线附近延伸。作为用于接收和照射电子束的光路的间隙设置在磁块6,11处。（C）2007，JPO＆INPIT

4. 发明专利

JP2006017653A Radiation generator 有权
标题翻译：辐射发生器
公开(公告)号：JP2006017653A
公开(公告)日：2006-01-19
申请号：JP2004197734
申请日：2004-07-05
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , OKAZAKI RYOKO , TOYOSUGI NORIO , SENKAWA JUNICHI
IPC分类号： G21K5/08 , G21K1/00 , G21K1/06 , H01J35/06 , H01J35/08 , H05H7/00 , H05H11/00 , H05H13/04 , H05H13/10
CPC分类号： G21K1/06 , H01J35/08 , H01J2235/086 , H01J2235/087 , H05H6/00
摘要： PROBLEM TO BE SOLVED: To provide a radiation generator capable of converging all generated radiation in a specific direction at the location, drastically raising utilization efficiency of the radiation, and raising the intensity.
SOLUTION: In the radiation generator used by bombarding charged particle beams to targets 13, 14 and generating radiation, means 13 and 14 having converging effect or dispersing effect of radiation are used as a radiation generation target placed on a charged particle beam orbit to converge or disperse radiation.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种辐射发生器，其能够使位于所述位置处的特定方向上的所有生成的辐射会聚，从而显着提高辐射的利用效率并提高强度。解决方案：在用于将带电粒子束轰击到目标13,14并产生辐射的辐射发生器中，使用具有辐射的会聚效应或分散效应的装置13和14作为放置在带电粒子束轨道上的辐射产生目标会聚或分散辐射。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2010025740A X-ray condensing device 审中-公开
标题翻译： X射线冷凝装置
公开(公告)号：JP2010025740A
公开(公告)日：2010-02-04
申请号：JP2008187243
申请日：2008-07-18
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , MORITA MASAKI
IPC分类号： G21K1/06 , H05H13/04
摘要： PROBLEM TO BE SOLVED: To provide an X-ray condensing device for generating X-rays that has a photon density higher than before, has narrow energy width, and is substantially monochromatic.
SOLUTION: This X-ray condensing device condenses white X-rays, and includes a plurality of crystal elements (11). The direction of the crystal lattice plane of each crystal element (11) is formed so that the X-rays (13) emitted from the light source positioned at one focus (A) of an ellipse (12) are Bragg-reflected by the crystal elements (11) and condensed to the other focus (B) of the ellipse (12).
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种用于产生具有比以前更高的光子密度的X射线的X射线聚焦装置，其能量宽度窄，并且基本上是单色的。解决方案：该X射线聚焦装置冷凝白色X射线，并且包括多个晶体元件（11）。每个晶体元件（11）的晶格面的方向被形成为使得从位于椭圆（12）的一个焦点（A）处的光源发射的X射线（13）被晶体（Bragg）反射元件（11）并且被冷凝到椭圆（12）的另一焦点（B）。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2009250910A X-ray condensing device 审中-公开
标题翻译： X射线冷凝装置
公开(公告)号：JP2009250910A
公开(公告)日：2009-10-29
申请号：JP2008102078
申请日：2008-04-10
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , MORITA MASAKI
IPC分类号： G21K1/06 , G01N23/04 , G01N23/207 , G21K1/00
摘要： PROBLEM TO BE SOLVED: To provide an X-ray condensing device, capable of generating monochromatic X-ray higher in photon density than in the past and changing the wavelength of the monochromatic X-ray.
SOLUTION: The device comprises a plurality of crystal elements 11a and 11b, with the crystal elements being disposed on a circular arc, having a chord of length 2L located on x-axis and the circular arc being represented by equation x
2 +(y-L/tanα)
2 =L
2 (1-1/tan
2 α), when a straight line passing through a light source and a focal point is the x-axis; a direction orthogonal to the x-axis is y axis; and a parameter for determining incident angle is α. The light source is located at one end point A of the chord, the focal point on the other end point B of the chord, and the crystal lattice planes of the crystal elements are determined so that X-ray emitted from the light source is reflected by the crystal elements and are made to converge at the focal point.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够产生比以前更高的光子密度的单色X射线并且改变单色X射线的波长的X射线聚焦装置。解决方案：该装置包括多个晶体元件11a和11b，晶体元件设置在圆弧上，具有位于x轴上的长度为2L的弦，圆弧由等式x 2 +（yL /tanα） 2 = L 2 （1-1 / tan 2 α）通过光源和焦点的线是x轴; 与x轴正交的方向是y轴; 用于确定入射角的参数为α。光源位于弦的一个端点A，和弦的另一端B上的焦点，并且确定晶体元件的晶格面，使得从光源发射的X射线被反射通过晶体元件使其在焦点处会聚。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2009043657A X-ray generator, and its method 审中-公开
标题翻译： X射线发生器及其方法
公开(公告)号：JP2009043657A
公开(公告)日：2009-02-26
申请号：JP2007209735
申请日：2007-08-10
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE
IPC分类号： H05G2/00 , H01J35/02 , H01J35/08
摘要： PROBLEM TO BE SOLVED: To provide an X-ray generator capable of generating an X-ray having intensity higher than that of a conventional one; and its method.
SOLUTION: This X-ray generation method includes: a first step of forming an electron beam e by accelerating electrons by using an acceleration device; and a second step of making the electron beam e pass in parallel to a surface of a flat target T at a distance of 10-100 nm from the surface of the flat target T. The X-ray generation method is characterized in that at least a surface layer part of the target T is formed of a substance easily generating an X-ray X by transition radiation by being polarized by interaction with the electron beam e.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够产生强度高于常规X射线的X射线的X射线发生器; 及其方法。解决方案：该X射线产生方法包括：通过使用加速装置加速电子而形成电子束e的第一步骤; 以及使电子束e平行于平坦靶T的表面与平坦靶T的表面成10-100nm的距离平行的第二步骤.X射线产生方法的特征在于至少目标T的表层部分由容易通过与电子束e相互作用而偏振的过渡辐射产生X射线X的物质形成。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP4206977B2 Radiation generator 有权
公开(公告)号：JP4206977B2
公开(公告)日：2009-01-14
申请号：JP2004197734
申请日：2004-07-05
申请人：山田廣成 , 株式会社光子発生技術研究所
发明人：千川純一 , 廣成山田 , 良子岡崎 , 典生豊杉
IPC分类号： G21K5/08 , G21K1/00 , G21K1/06 , H01J35/06 , H01J35/08 , H05H7/00 , H05H11/00 , H05H13/04 , H05H13/10
CPC分类号： G21K1/06 , H01J35/08 , H01J2235/086 , H01J2235/087 , H05H6/00

9. 发明专利

JP2008298492A Target unit, electromagnetic wave generating device, and method therefor 审中-公开
标题翻译：目标单元，电磁波发生装置及其方法
公开(公告)号：JP2008298492A
公开(公告)日：2008-12-11
申请号：JP2007142743
申请日：2007-05-30
申请人： Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社光子発生技術研究所
发明人： YAMADA HIROSHIGE , TOYOSUGI NORIO
IPC分类号： G21K5/08 , H05G2/00 , H05H13/04
摘要： PROBLEM TO BE SOLVED: To provide a target unit, an electromagnetic wave generating device, and a method therefor, capable of acquiring an X-ray or EUV light having the same intensity as that of the theoretical value or an intensity similar thereto, and which is radiated in a conical form.
SOLUTION: This target unit generating transition radiation or parametric radiation, by being irradiated with an electron beam having a curved orbit is equipped with a planar target T, having a material that tends to generate transition radiation or parametric radiation by the interaction with the electron beam, and a first holding part M1 and a second holding part M2 for holding respectively both ends of the target T. At least either the first holding part M1 or the second holding part M2 generates a second magnetic field H1 that cancels a first magnetic field H for forming a curved orbit in a region A which is to be irradiated with the electron beam in the target T.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够获取具有与理论值相同的强度的X射线或EUV光的目标单元，电磁波产生装置及其方法，或与其类似的强度，并以锥形的形式辐射。解决方案：通过用具有弯曲轨道的电子束照射产生过渡辐射或参数辐射的目标单元配备有平面靶T，其具有倾向于通过与...的相互作用产生过渡辐射或参数辐射的材料电子束，以及分别保持目标T的两端的第一保持部M1和第二保持部M2。第一保持部M1或第二保持部M2中的至少一个产生第二磁场H1，该第二磁场H1抵消磁场H用于在要被靶T中的电子束照射的区域A中形成弯曲轨道。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2004031871A Electromagnet 审中-公开
公开(公告)号：JP2004031871A
公开(公告)日：2004-01-29
申请号：JP2002189757
申请日：2002-06-28
申请人： Fujikin Inc , Japan Science & Technology Corp , Photon Production Laboratory Ltd , Hiroshige Yamada , 山田廣成 , 株式会社フジキン , 株式会社光子発生技術研究所 , 科学技術振興事業団
发明人： YAMADA HIROSHIGE , HASEGAWA DAISUKE , KITAZAWA TAIJI
IPC分类号： G01R33/381 , A61B5/055 , G21K1/093 , H01F7/06 , H05H7/04 , H05H13/04
摘要： PROBLEM TO BE SOLVED: To provide an electromagnet which generates a prescribed magnetic field distribution by installing permanent magnets within a magnetic field generated by the electromagnet. SOLUTION: Regarding the electromagnet, a required magnetic field distribution is accurately and easily generated and design is facilitated by arranging a pair of the permanent magnets which generate double polar components in an axially symmetrical specified space. It can be applied to a synchrotron which is a perfect circle, a cyclotron, a betatron, and a microtron, etc., as well. COPYRIGHT: (C)2004,JPO

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