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    • 6. 发明专利
    • Planar-stage moving device of machinery
    • 机械平台移动装置
    • JP2009060782A
    • 2009-03-19
    • JP2008226536
    • 2008-09-03
    • Korea Inst Of Machinery & Materialsコリア インスティチュート オブ マシナリー アンド マテリアルズ
    • RO SEUNG-KOOKPARK JONG-KWEON
    • H02K41/03B23Q1/38B23Q1/62H02K41/02
    • B23Q1/62B23Q5/28H02K7/08H02K11/22H02K41/031H02K2201/18
    • PROBLEM TO BE SOLVED: To provide a planar-stage moving device of machinery with a more compact stage-moving system capable of performing more accurate transfer movement. SOLUTION: The planar-stage moving device of machinery has a linear motor to activate a moving force in between a base as a steady body and a table as a moving body. The stator core of the linear motor with a coil wound therearound is fixed to the base, and the core of its removal actuator mounted onto a permanent magnet is fixed to the table. Four linear motors are combined with two sets comprising two linear motors each for movement in the lateral and longitudinal directions (X-axis and Y-axis directions) of the table, respectively. First and third linear motors for lateral movement are disposed in the lower and upper parts of the table, and second and fourth linear motors for longitudinal movement are mounted on both left and right sides of the table. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种具有能够执行更准确的传送运动的更紧凑的平台移动系统的机械平面移动装置。 解决方案:机械的平面平台移动装置具有线性电动机,以在作为稳定体的基座和作为移动体的工作台之间激活移动力。 线圈电机的定子铁芯绕线绕线固定在基座上,安装在永久磁铁上的拆卸执行器的铁心固定在工作台上。 四个线性电动机与两组线性电动机组合,两组线性电动机分别用于在工作台的横向和纵向(X轴和Y轴方向)上移动。 用于横向运动的第一和第三线性电动机设置在工作台的下部和上部中,并且用于纵向运动的第二和第四直线电动机安装在工作台的左右两侧。 版权所有(C)2009,JPO&INPIT