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    • 85. 发明专利
    • BONDING TOOL
    • JPH0567651A
    • 1993-03-19
    • JP23009691
    • 1991-09-10
    • SUMITOMO ELECTRIC INDUSTRIES
    • TANAKA KATSUYUKINAKAMURA TSUTOMUNAKAI TETSUO
    • H01L21/60
    • PURPOSE:To make it possible to relax a thermal stress due to the difference in thermal expansion coefficient by a method wherein stress relaxation layers are provided between a tool tip part formed with a bonding surface and a shank. CONSTITUTION:A bonding tool is formed by bonding a tool tip part A to a shank 4 interposing two layers of stress relaxation layers B1 and B2 between the tip part A and the shank 4. The tip part A is constituted of a sintered body containing Si, Si3N4 or the like as its main component and/or a material obtainable by applying a polycrystalline diamond, which is made to deposit by a vapor-phase synthesis method, on a base body consisting of these composite materials or the like. The first layer of the layers B1 and B2 is constituted of a material having a thermal expansion coefficient of 10X10 / deg.C or smaller between a room temperature and 600 deg.C and the second layer of the layers B1 and B2 is constituted of one kind or more of materials chosen from among Au, Cu, Ag and Ta. As a result, as the materials having a small Young's modulus are adopted for the layers B1 and B2, a thermal stress caused by thermal strain can be lessened.