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    • 71. 发明专利
    • Method of manufacturing semiconductor element including triple well structure
    • 制造三元结构的半导体元件的方法
    • JP2003332461A
    • 2003-11-21
    • JP2002379437
    • 2002-12-27
    • Hynix Semiconductor Inc株式会社ハイニックスセミコンダクター
    • OH JAE-GEUN
    • H01L21/761H01L21/265H01L21/8238H01L27/092
    • H01L27/0928H01L21/823892
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device which is suitable for controlling the deterioration of threshold voltage and refresh characteristic of a transistor formed on the p-well surrounded by the n-well among the triple wells.
      SOLUTION: The method of manufacturing the semiconductor element comprises the steps of forming, on the surface of a semiconductor substrate, a profiled first conductivity type firs well (44) in a concentration reduced below the preset value in order to isolate the adjacent second conductivity type second wells (45, 43) and forming a profile second conductivity type second wells (45, 43) in a concentration increased above the preset value consisting of a first region (45) surrounded by the first well and a second region (43) isolated from the first region with the first well.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种制造半导体器件的方法,该半导体器件适用于控制在三阱中由n阱包围的p阱上形成的晶体管的阈值电压和刷新特性的劣化。 解决方案:制造半导体元件的方法包括以下步骤:在半导体衬底的表面上形成浓度降低到预设值以下的成型的第一导电类型的第一阱(44),以隔离相邻 第二导电类型第二阱(45,43),并且以高于由第一阱包围的第一区域(45)和第二区域(45)组成的预定值形成分布第二导电类型第二阱(45,43) 43)与第一个井分离第一个区域。 版权所有(C)2004,JPO
    • 72. 发明专利
    • Semiconductor device and its manufacturing method
    • 半导体器件及其制造方法
    • JP2003318113A
    • 2003-11-07
    • JP2002120623
    • 2002-04-23
    • Toyota Industries Corp株式会社豊田自動織機
    • NONAKA YOSHINORI
    • H01L21/761H01L21/205H01L21/76
    • PROBLEM TO BE SOLVED: To provide a semiconductor device where occurrence of a defect in an epitaxial layer of a device forming region, which is caused by formation of a buried layer, can be prevented and can be easily manufactured, and its manufacturing method.
      SOLUTION: An n-type buried layer is formed on a semiconductor substrate 1 in a device forming region A. In a region B adjacent to the region A, a buried region 9 for causing the defect, which consists of an n-type impurity diffusion region 7 and a p-type impurity diffusion region 8 located to contact with both sides of the n-type impurity diffusion region 7, is formed. An n-type epitaxial layer 2 is grown on both of the device forming region A and the adjacent region B. In the adjacent region B, a stress concentrates on the n-type epitaxial layer 2 grown from the interface portion between the impurity diffusion regions 7 and 8 to cause the defect 10, thereby, the excellent n-type epitaxial layer 2 in which the occurrence of defect is inhibited can be formed in the device forming region A.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种半导体器件,其可以防止并且容易地制造由形成掩埋层而引起的器件形成区域的外延层中的缺陷的发生,并且其制造 方法。 解决方案:在器件形成区域A中的半导体衬底1上形成n型掩埋层。在与区域A相邻的区域B中,用于引起缺陷的掩埋区域9由n- 形成与n型杂质扩散区域7的两侧接触的p型杂质扩散区域7和p型杂质扩散区域8。 在器件形成区域A和相邻区域B两者上生长n型外延层2.在相邻区域B中,应力集中在从杂质扩散区域之间的界面部分生长的n型外延层2上 如图7和图8所示,导致缺陷10,从而能够在器件形成区域A中形成抑制缺陷发生的优异的n型外延层2.权利要求(C)2004,JPO