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71. 发明专利

JPH04370447A FRICTION TYPE POWER TRANSMISSION DEVICE 失效
公开(公告)号：JPH04370447A
公开(公告)日：1992-12-22
申请号：JP14297491
申请日：1991-06-14
申请人： HITACHI LTD
发明人： SATO SATOYUKI , MIZUMOTO MUNEO
IPC分类号： F16H13/10
摘要： PURPOSE:To provide the stable contact state of a friction roller even when the change of an interaxis distance is produced by wear and thermal deformation of the friction roller of a friction type power transmission device. CONSTITUTION:A friction roller 5 fixed on a rotary shaft 6 is supported to support bearings 7a and 7b and fixed to bearing holders 8a and 8b. The bearing holders 8a and 8b are mounted on device casings 4a and 4b such that they are movable in a direction to press friction rollers 1 and 5. The bearing holders 8a and 8b are pressed along grooves 11a and 11b formed in device casings 4a and 4b, through the force of resilient bodies 9a and 9b located between a device casing 10 and the bearing holders, and the friction roller 5 is forced into pressure contact with the friction roller 1. This constitution maintains the pressure contact state of the friction roller through resilient deformation of the resilient body even when a distance between the rotary shafts is changed by wear of the friction rollers and thermal deformation of the device casings.

72. 发明专利

JPH02246202A MAGNETIC LEVITATION DEVICE 失效
公开(公告)号：JPH02246202A
公开(公告)日：1990-10-02
申请号：JP6621189
申请日：1989-03-20
申请人： HITACHI LTD
发明人： OOTAKE SEIJI , OGATA HISANAO , SAHO NORIHIDE , MIZUMOTO MUNEO , MATSUSHITA OSAMI
IPC分类号： H01F6/00 , B60L13/04 , H01L39/00
摘要： PURPOSE:To shorten the time required for reaching a superconducting state and make the superconducting state easier to maintain by suppressing radiation of heat to a low level and prevent humidity as well as adhesion of dust and then obtain stable magnetic levitation by coating the whole surface of a high temperature superconducting material with a non-magnetic material that is superior in thermal conductivity and hold a low coefficient of radiation. CONSTITUTION:The whole surface of a high temperature superconducting material 1 is treated by coating 2 with a non-magnetic material that is superior in thermal conductivity and hold a low coefficient of radiation and a thermal conductive rod that is superior in thermal conductivity is immersed in a cooling medium in order to lead the said coated superconducting material 1 to a low temperature that is up to a critical temperature. The said material 1 which is cooled through the thermal conductive rod 4 is thus cooled efficiently and the time required for reaching a superconducting state is shortened. Then radiation of heat by the said material 1 is suppressed to a low level to avoid humidity of its material. In this way stable magnetic levitation is achieved by obtaining a uniform magnetic repelling force.

73. 发明专利

JPH02131304A CONTACTLESS LEVITATION CARRIER 失效
公开(公告)号：JPH02131304A
公开(公告)日：1990-05-21
申请号：JP28125188
申请日：1988-11-09
申请人： HITACHI LTD
发明人： SAHO NORIHIDE , OGATA HISANAO , OOTAKE IKUJI , MATSUSHITA OSAMI , MIZUMOTO MUNEO
IPC分类号： B65G54/02 , B60L13/04 , B65G43/00
摘要： PURPOSE:To prevent generation of dust from a guide way when a wafer holder is moved by driving the wafer holder through a linear motor mechanism. CONSTITUTION:Permanent magnets 3 are fixed at lower end sections and left/ right end sections of a wafer holder 2. Diamagnetic bodies 5 are arranged at the positions of a guide way 4 corresponding to the permanent magnets 3, and a pipe 6 for cooling the diamagnetic body 5 to a temperature for exhibiting diamagnetism is arranged in the guide way 4. A magnet 7 is arranged in the center of the guide way, and a transmitter 7a comprising a wafer holder position sensing means and a wafer moving direction indicating means is provided. A photo-electric generating means 8 such as a solar cell, a switching means 9, conductive wires 10 and a supporting rod 11 are arranged at the lower section of the wafer holder 2.

74. 发明专利

JPS6475943A METHOD FOR IRRADIATION WITH LASER BEAM 失效
公开(公告)号：JPS6475943A
公开(公告)日：1989-03-22
申请号：JP23221187
申请日：1987-09-18
申请人： HITACHI LTD
发明人： MASUDA TOSHIO , MIZUMOTO MUNEO
IPC分类号： G01N21/84 , G01N15/02 , G01N21/88 , G01N21/94 , G02B27/09
摘要： PURPOSE:To obtain laser beam uniform in intensity distribution without attenuating and blocking the laser beam, by allowing a plurality of laser beams each having an long oval cross-sectional shape to coincide in their long axes with each other and overlapping both beams so as to provide an interval before irradiation. CONSTITUTION:The laser beams 2, 2' emitted from two laser tubes 1, 1' arranged in parallel are magnified into a long oval sheet shape by objective lenses 3, 3' and a cylindrical lens 4 and the long axes of the long ovals of both magnified beams are allowed to coincide with each other on a focal surface and both beams are overlapped so as to provide an interval to be allowed to irradiate to obtain laser beam 6. The region 8 to be measured under a particle generating source 7 is irradiated with the laser beam 6 and the scattering beam 10 formed when fine particles 9 pass through the region 8 to be measured is condensed by a condensing lens 11 and processed by a signal processor 13 to detect and count the fine particles. By this method, the wide region 8 to be measured can be uniformly irradiated with the laser beam 6.

75. 发明专利

JPS6287484A RING SUSCEPTOR FOR MOLECULAR BEAM EPITAXIAL APPARATUS 失效
公开(公告)号：JPS6287484A
公开(公告)日：1987-04-21
申请号：JP22638285
申请日：1985-10-11
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , UEDA SHINJIRO , TAKAHASHI KUNIHIRO
IPC分类号： C30B29/42 , C30B23/08 , C30B25/12 , H01L21/203
摘要： PURPOSE:To facilitate mounting and demounting of a substrate from a susceptor, by providing a ring guide engaging and supporting the substrate on the outer peripheral part of a ring formed into a diameter for carrying the substrate. CONSTITUTION:A flange-like ring guide (12a) is fixed on the outer periphery of a ring susceptor 12 having a smaller inside diameter than a substrate 8 and almost the same outside diameter as the substrate 8 and the substrate 8 is engaged with the ring susceptor 12 with a crystal growth surface (8b) down so as to drop in. The susceptor 12 with the substrate 8 is then engaged and placed in a stepped part (13a) formed on a fork 13 of a transfer manipulator to push up the fork 13 in the direction of arrow (A) by a pusher 16 and fix the fork 13 with a stopper 17. The fork 13 in a horizontally placed state is then transferred to a rotating manipulator 14 in a growth chamber and held by substrate holding pawls 15 and tilted at a smaller angle than 90 deg. to the vertical line to oppose the substrate 8 to molecular beams and grow crystals of GaAs.

76. 发明专利

JPS6223102A SUBSTRATE HOLDER OF MOLECULAR BEAM EPITAXY EQUIPMENT 失效
公开(公告)号：JPS6223102A
公开(公告)日：1987-01-31
申请号：JP16182685
申请日：1985-07-24
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO
IPC分类号： H01L21/203 , H01L21/26
摘要： PURPOSE:To fix and remove a substrate to and from a substrate holder main body much easily by a method wherein several holding means actuated by spring force are provided on the substrate holder main body holding the substrate. CONSTITUTION:Several hooks 4 are free-rotatably fixed to a fitting surface 2A of substrate 1 and the periphery of backside 2B using hinges 3. The edges 4A of hooks 4 extend so that the substrate 1 may be caught by the periphery of fitting surface 2A. Besides, the edges 4A are pressed upon the fitting surface 2A by spring coil 5 provided between the spring 4B of hooks 4 and the substrate holder main body 2. In order to fix the substrate 1 to the substrate holder main body 2, the edges 4A of hooks 4 may have only to be moved outward against the coil springs 5. Through these procedures, the substrate 1 can be fixed to the substrate holder main body 2 much more easily than the other processes using indium or spring stops 4B.

77. 发明专利

JPS6112021A Molecular-beam epitaxy device 失效
标题翻译：分子束外观设备
公开(公告)号：JPS6112021A
公开(公告)日：1986-01-20
申请号：JP13102584
申请日：1984-06-27
申请人： Hitachi Ltd
发明人： MIZUMOTO MUNEO , FUJIOKA KAZUMASA , OKUNO SUMIO , YAMAGUCHI SUMIO , TAMURA NAOYUKI
IPC分类号： H01L21/268 , H01L21/203 , H01L21/26
摘要： PURPOSE: To shorten a cooling time when a temperature is lowered up to a temperature where a susceptor can be extracted to the outside from a temperature at a point of time when the growth of a substrate crystal is completed, and to shorten time per one cycle of crystal growth by forcibly cooling the susceptor.
CONSTITUTION: When a signal from a thermocouple 31 is inputted to a controller 34 at a point of time when the growth of a substrate crystal is completed, the controller 34 outputs the signal of valve opening to electric ON-OFF valves 33A, 33B. When the electric ON-OFF valves 33A, 33B are opened by the signal, a cooling fluid flows in cooling pipes 32, and a substrate holder 3 containing a susceptor 5 is cooled. When the temperature of the susceptor lowers up to a temperature where the susceptor is extracted by the cooling, the controller 34 outputs the signal of valve closing to the electric ON-OFF valves 33A, 33B, and the electric ON-OFF valves 33A, 33B are closed. Accordingly, the susceptor 5 is cooled forcibly by a cooling device 30 during a period up to the temperature where the susceptor is extracted from a temperature at the point of time when the growth of the substrate crystal is completed, thus largely shortening a cooling time.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：为了缩短温度降低到从基材晶体生长完成时的温度将基座提取到外部的温度的冷却时间，并缩短每个循环的时间通过强制冷却感受器来实现晶体生长。构成：当在基板晶体生长完成的时刻将来自热电偶31的信号输入到控制器34时，控制器34将电磁开关阀33A，33B的开阀信号输出。当通过信号打开电开关阀33A，33B时，冷却流体在冷却管32中流动，并且包含基座5的基板保持件3被冷却。当基座的温度降低到通过冷却提取基座的温度时，控制器34输出关闭阀的信号到电动开关阀33A，33B和电动开关阀33A，33B 关闭。因此，在从基板晶体的生长完成的时刻的温度到达基座的温度的期间内，通过冷却装置30强制地冷却基座5，从而大大缩短了冷却时间。

78. 发明专利

JPS6086819A MOLECULAR-BEAM EPITAXY DEVICE 失效
公开(公告)号：JPS6086819A
公开(公告)日：1985-05-16
申请号：JP19424683
申请日：1983-10-19
申请人： HITACHI LTD
发明人： YAMAGUCHI SUMIO , TAMURA NAOYUKI , SHIRAKI YASUHIRO , SATOU KAZUO , KONDOU YOSHIMASA , MIYATA TOSHIMITSU , TAKAHASHI TOSHIO , MIZUMOTO MUNEO
IPC分类号： H01L21/203
摘要： PURPOSE:To execute a process for molecular-beam epitaxial growth efficiently by fulfilling the functions of the introduction and carry-out of a substrate in an independent vacuum chamber. CONSTITUTION:Gate valves 15 are closed at a point of time when a substrate completely grown is transferred to a carrying path 12 while a substrate not treated is transported to an analyzing chamber 13 or a growth chamber 14. A gate valve 16 is opened, the substrate completely treated is transferred to a carry-out chamber 17 by a carry-out mechanism 18, the gate valve 16 is closed again, and the inside of the carry-out chamber 17 is opened to atmospheric air and the substrate is extracted. Accordingly, the substrates completely treated are carried out rapidly to the outside of a device, and can be treated separately as required, and a process of molecular-beam epitaxy can be incorporated efficiently into the stream of a series of substrate treatment.

79. 发明专利

JPS5712168A SHAFT SEALING DEVICE 失效
公开(公告)号：JPS5712168A
公开(公告)日：1982-01-22
申请号：JP8510480
申请日：1980-06-25
申请人： HITACHI LTD
发明人： MIZUMOTO MUNEO , MISUMI YOUJI
IPC分类号： F16J15/44
摘要： PURPOSE:To prevent leakage of the fluid from a shaft sealing device of sliced sleeve type likely to arise when the shaft in this sleeve rotates at a low speed or remains at a standstill by supporting at least one of those slices, provided with a groove femalethreaded, in such a way that it can rotate freely along the circumferential direction. CONSTITUTION:When the number of revolutions of the shaft 1, N, drops to attain the preset value N0, a comparator 17 gives a motor drive signal to a motor 15, which will actuate a sleeve 3b into rotation with the aid of a gear 14 and a sector gear 12. This rotation of sleeve 3b is transmitted to another sleeve 3d through a pin shaft 7, and the sleeve 3d turns for the same angle as the sleeve 3b. By this rotation of sleeves 3b, 3d, the groove part 4b of screw groove 4 provided in the inside surface of each sleeve 3a-3d is blocked by the top 4a. Consequently, the fluid can be prevented from leakage through following the screw groove 4.

80. 发明专利

JPS56167963A MECHANICAL SEAL 失效
公开(公告)号：JPS56167963A
公开(公告)日：1981-12-23
申请号：JP7012480
申请日：1980-05-28
申请人： HITACHI LTD
发明人： INOUE KOU , MIZUMOTO MUNEO , SUZUKI SATOSHI , KOJIMA KAZUO
IPC分类号： F16J15/34
摘要： PURPOSE:To maintain the sealing sliding surface normally even if the fluid pressure difference between the outside and the inside of the sealing sliding surface is reversed in positive and negative, by forming the reverse pressure acting space part on the inner surface side of the contact surface between a following ring and a rubber bellows. CONSTITUTION:The annular notched part 10 formed on the back end surface 4a of a following ring 4 serves as the reverse pressure acting space part 11 for the inside fluid for the sealing sliding surfaces. Into the reverse pressure acting space part 11, the inside fluid can penetrate easily, passing through the gas between the inner peripheral surface of the following ring 4 and the inner peripheral part 5a of a holding device 5. As a result of this, if the inside fluid pressure increases higher than the outside fluid pressure, contrary to the normal case, the following ring 4 is pushed onto a sheet ring 3 by the spring 6 force and the inside fluid pressure which acts onto the annular notched part 10 of the following ring 4, and thus the sealing sliding surface S can develop the sealing performance.

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