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    • 78. 发明专利
    • THIN FILM MANUFACTURING DEVICE
    • JPS60221564A
    • 1985-11-06
    • JP7668184
    • 1984-04-18
    • SHINGIJUTSU KAIHATSU JIGYODANMIZOGUCHI TADASHI
    • MIZOGUCHI TADASHI
    • C23C14/22C23C14/24C23C14/50C23C14/54C23C14/56
    • PURPOSE:To provide a titled device which manufactures efficiently and economically many thin films having reliability by providing a top cap having an eccentric hole to a vacuum vessel and a substrate holder which is made rotatable and vertically movable to the position deviated from the center to the top cap provided in said hole. CONSTITUTION:The discoid 1st top cap 8 having the hole 9 made into an eccentric circular shape is provided to the vacuum vessel 1 provided with single or plural sources 2 for generating a thin film material such as gun type sputter source, evaporating boat or the like. The substrate holder 3 which is made rotatable and vertically movable to the position deviated from the center of the 2nd top cap 10 provided in said hole 9 and to which many substrates 4 can be set simultaneously as well as a mask holder 7 for moving vertically a mask 6 are attached to said 2nd cap. A rotatable shutter 5 is further mounted thereto. The positions, directions, timings, speeds, etc. of said caps 8, 10, holder 3, holder 7, shutter 5, etc. are controlled according to the prescribed program by a microcomputer device 11 by which thin homogeneous laminated films having various thicknesses are manufactured on the substrates 4.