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    • 66. 发明专利
    • Spring system for mems device
    • 用于MEMS器件的弹簧系统
    • JP2014160070A
    • 2014-09-04
    • JP2014024723
    • 2014-02-12
    • Freescale Semiconductor Incフリースケール セミコンダクター インコーポレイテッド
    • ANDREW C MCNEILGARY G LI
    • G01C19/574B81B3/00B81C1/00H01L29/84
    • G01C19/5684G01C19/574G01C25/00Y10T29/49002
    • PROBLEM TO BE SOLVED: To provide a spring system for a MEMS device.SOLUTION: A spring system includes stiff beams 76, 78, 80, 82 oriented to form a parallelogram arrangement 84 linking a pair of drive masses 30, 32 of a MEMS device 72. The beams are oriented diagonal to a drive direction 56 of the masses 30, 32. Diagonally opposing corners 86, 88 of the parallelogram arrangement 84 are coupled to the drive masses 30, 32. A spring 90 is coupled to a corner 94 of the parallelogram arrangement, and a spring 92 is coupled to a diagonally opposing corner 96. The springs 90, 92 are interconnected with a sense frame 34 surrounding the drive masses. The beams and side springs are stiff to substantially prevent in-phase motion of the drive masses. Rotationally compliant flexures 102, 104, 106, 108, allow the arrangement 84 to collapse and expand to enable anti-phase motion 60 of the drive masses.
    • 要解决的问题:提供一种用于MEMS器件的弹簧系统。解决方案:弹簧系统包括刚性梁76,78,80,82,其被定向成形成平行四边形布置84,其将MEMS器件的一对驱动块30,32连接起来 梁相对于质量块30,32的驱动方向56定向。平行四边形装置84的对角相对的角86,88联接到驱动块30,32。弹簧90联接到 平行四边形布置和弹簧92联接到对角相对的角部96.弹簧90,92与围绕驱动块的感测框架34互连。 梁和侧弹簧是刚性的,以基本上防止驱动块的同相运动。 旋转兼容的挠曲件102,104,106,108允许装置84折叠和膨胀以使驱动质量块能够进行反相运动。