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61. 发明专利

JPS62149012A COMPOSITE FLOATING MAGNETIC HEAD 失效
公开(公告)号：JPS62149012A
公开(公告)日：1987-07-03
申请号：JP29120785
申请日：1985-12-24
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： G11B5/265 , G11B5/105 , G11B5/48 , G11B5/60
摘要： PURPOSE:To improve the recording/reproducing density by providing each one slot to two loading faces and providing a magnetic head core chip exclusive for recording and a magnetic head core chip exclusive for reproduction in the slot. CONSTITUTION:The magnetic head core chip 5 exclusive for recording is provided to one side of the floating face 3 and the magnetic head core chip 4 exclusive for reproduction is provided to the floating face other side. The length 9 of the gap 8 of the magnetic head core chip 5 exclusive for recording is increased to improve the recording efficiency and the length 7 of the gap 6 of the magnetic head core chip 4 exclusive for reproduction is formed smaller to improve the frequency characteristic at reproduction. Since the magnetic head core chip exclusive for recording and the magnetic head core chip exclusive for reproduction are provided respectively in this way, the recording/ reproducing density is improved, the tolerance of each chip is increased to improve the yield.

62. 发明专利

JP2014212410A 振動子、発振器、電子機器、移動体、および振動子の製造方法审中-公开
标题翻译：振动器，振动器，电子设备，移动体和振动器的制造方法
公开(公告)号：JP2014212410A
公开(公告)日：2014-11-13
申请号：JP2013087208
申请日：2013-04-18
申请人：セイコーエプソン株式会社 , Seiko Epson Corp
发明人： INABA SHOGO , IWAMOTO OSAMU
IPC分类号： H03H9/24 , B81B3/00 , B81C1/00 , H03B5/30 , H03H3/007 , H03H9/02
CPC分类号： H02N1/006 , B81B3/001 , B81B3/0013 , B81B3/0045 , B81B2203/0118 , Y10T29/49155
摘要：【課題】振動子の梁(ビーム)の長さを長くすることなく、小型化に対応し、製造歩留まりが安定した、より低い駆動周波数の梁型振動子を提供する。【解決手段】MEMS振動子100は、基板1と、基板1の主面上に設けられた下部電極10と、前記主面上に設けられた固定部23と、基板1から遊離し、固定部23に支えられた上部電極20と、を備え、上部電極20は、基板1を平面視したときに、下部電極10と重なる領域を有する振動体であり、前記振動体としての上部電極20の振動の腹部を含む領域D1に錘部50を備えている。【選択図】図1
摘要翻译：要解决的问题：提供一种在不增加振动器的梁的长度的情况下实现小型化，稳定的制造成品率和降低驱动频率的梁型振动器。解决方案：MEMS振动器100包括：基板1; 设置在基板1的主表面上的下电极10; 设置在主表面上的固定部23; 以及与基板1分离并被固定部23支撑的上部电极20.上部电极20是当平面观察基板1时具有与下部电极10重叠的区域的振动器，并且包括重量部在包括用作振动器的上电极20的振动的腹部的区域D1处。

63. 发明专利

JP2013239894A Manufacturing method of vibrator 有权
标题翻译：振动器制造方法
公开(公告)号：JP2013239894A
公开(公告)日：2013-11-28
申请号：JP2012111571
申请日：2012-05-15
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： IWAMOTO OSAMU , EBINA AKIHIKO , YAMAZAKI TAKASHI , ISHII MASAHIRO
IPC分类号： H03H3/02 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a method for stably and easily manufacturing a highly accurate vibrator.SOLUTION: A manufacturing method of a vibrator includes the steps of: forming an oxide silicon layer 11 on a silicon substrate 10; patterning the oxide silicon layer 11 to form a cavity formation part 11p; laminate a polysilicon layer 12 on the silicon substrate 10 so as to include and cover at least a part of the cavity formation part 11p; forming a driving part 200 including an electrode and a piezoelectric material layer so as to laminate on the polysilicon layer 12 in a region that overlaps with at least the part of the cavity formation part 11p when the silicon substrate 10 is viewed in a plane view; patterning the polysilicon layer 12 to form a support part 100 and a vibration part 300 extending from the support part 100 and on which the driving part 200 is laminated and exposing the part of the cavity formation part 11p; and removing the cavity formation part 11p and forming a cavity part between the vibration part 300 and the silicon substrate 10.
摘要翻译：要解决的问题：提供一种用于稳定且容易地制造高精度振动器的方法。解决方案：振动器的制造方法包括以下步骤：在硅衬底10上形成氧化物硅层11; 图案化氧化硅层11以形成空腔形成部分11p; 在硅衬底10上层叠多晶硅层12，以包括并覆盖空腔形成部分11p的至少一部分; 形成包括电极和压电材料层的驱动部200，以便在平面图中观察硅基板10时，在与多孔层形成部11p的至少一部分重叠的区域中层叠多晶硅层12。图案化多晶硅层12以形成支撑部分100和从支撑部分100延伸并且其上驱动部分200被层压并暴露空腔形成部分11p的部分的振动部分300; 除去空腔形成部11p，在振动部300与硅基板10之间形成空腔部。

64. 发明专利

JP2010074840A Piezoelectric vibrating piece, and method of manufacturing the same 审中-公开
标题翻译：压电振动片及其制造方法
公开(公告)号：JP2010074840A
公开(公告)日：2010-04-02
申请号：JP2009254769
申请日：2009-11-06
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： IWAMOTO OSAMU
IPC分类号： H03H9/02 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/253 , H01L41/332 , H03H3/04 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating piece capable of adjusting a vibration frequency of the piezoelectric vibrating piece while measuring it, securing a great adjusting amount of a vibration frequency and reducing aging in vibration frequency, and to provide a method of manufacturing the same. SOLUTION: A vibration frequency adjusting film 34 is provided on a vibrating electrode of a piezoelectric vibrating piece 30 having a vibrating part 31 for which a central portion is thinned, and an exciting electrode 32 formed in a central portion of the vibrating part. Thus, since a vibration frequency of the piezoelectric vibrating piece can be made lower than a prescribed value at all the time, when adjusting the vibration frequency of the piezoelectric vibrating piece, it is enough only to reduce the thickness of the vibration frequency adjusting film 34. Thus, it is possible to secure a great adjusting amount for the vibration frequency of the piezoelectric vibrating piece and to suppress aging in vibration frequency. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在测量压电振动片的同时调节压电振动片的振动频率的压电振动片，确保振动频率的大调节量并减少振动频率的老化，并提供一种方法的制造相同。解决方案：在具有中心部分变薄的振动部31的压电振动片30的振动电极上设置有振动频率调节膜34，形成在振动部的中心部的激励电极32 。因此，由于可以将压电振动片的振动频率始终低于规定值，因此在调整压电振动片的振动频率时，只要减小振动频率调节膜34的厚度就足够了因此，可以确保压电振动片的振动频率的大调整量，并且抑制振动频率的老化。版权所有（C）2010，JPO＆INPIT

65. 发明专利

JP2001349785A INFRARED DETECTING ELEMENT AND THERMOMETER 失效
公开(公告)号：JP2001349785A
公开(公告)日：2001-12-21
申请号：JP2000169695
申请日：2000-06-06
申请人： SEIKO EPSON CORP
发明人： SATO SHIGEMI , IWAMOTO OSAMU , SHIOBARA YASUHIRO , ODA YUJI
IPC分类号： G01J1/02 , G01J5/00 , G01J5/02 , G01J5/10 , G01J5/12 , G01J5/14 , G01J5/16
摘要： PROBLEM TO BE SOLVED: To provide an infrared detecting element capable of improving the precision of temperature measurement while reducing the size and cost by the application of a thermopile form, and a thermometer using it. SOLUTION: This infrared detecting element comprises a semiconductor substrate, a thermopile formed on the main surface of the semiconductor substrate to generate a voltage on the basis of the temperature of a heat absorber for receiving infrared ray, a lens connected onto the main surface of the semiconductor substrate to converge the infrared ray to the heat absorber, and a reference temperature detecting means for detecting the reference temperature of the thermopile. The thermosensitive part of the reference temperature detecting means is arranged in the vicinity of the joint part of the semiconductor substrate to the infrared lens.

66. 发明专利

JP2001251160A PIEZOELECTRIC VIBRATING REED AND ITS MANUFACTURE 失效
公开(公告)号：JP2001251160A
公开(公告)日：2001-09-14
申请号：JP2000062300
申请日：2000-03-07
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： H01L41/09 , H01L41/22 , H01L41/253 , H03H3/04 , H03H9/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating reed whose oscillation frequency can be adjusted while measuring the oscillation frequency and whose oscillation frequency can be adjusted by a large quantity and made stable over aging, and to provide its manufacturing method. SOLUTION: Oscillation frequency adjustment films 34 are provided on the exciting electrodes 32 of a piezoelectric vibrating reed 30 provided with a vibrating part 31 whose central part is made thin and the exciting electrodes 32 formed on the central part of the vibrating part. Because the oscillation frequency of the piezoelectric vibrating reed can always be made lower than prescribed due to this structure, only the thickness of the oscillation frequency adjustment films has to be reduced in the case of adjusting the oscillation frequency of the piezoelectric vibrating reed so that the adjustment quantity of the oscillation frequency of the piezoelectric vibrating reed can be made large and that the deterioration with age of the oscillation frequency can also be suppressed.

67. 发明专利

JP2001251154A MANUFACTURE OF PIEZOELECTRIC VIBRATING REED 失效
公开(公告)号：JP2001251154A
公开(公告)日：2001-09-14
申请号：JP2000062304
申请日：2000-03-07
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： H01L41/22 , H01L41/253 , H03H3/04 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrating reed by which the oscillation frequency of a piezoelectric vibrating reed is adjusted to a target frequency with high accuracy. SOLUTION: In the case of manufacturing a piezoelectric vibrating reed 30 in which the center of a vibrating part 31 is made of a thin plate, first electrodes 32 are formed at one part of the vibrating part, oscillation frequency is measured by applying voltage to the first electrodes to vibrate the vibrating part, part of the center of the vibrating part is removed on the basis of the measured oscillation frequency obtained by measurement so as to make the vibration of the vibrating part the target frequency, and a second electrode 33 is formed at the center of the vibrating part. In this way, it is possible to adjust the oscillation frequency of the vibrating part to a target frequency with high accuracy because the oscillation frequency is directly measured to modify the vibrating part in a manufacturing process.

68. 发明专利

JP2001221638A OSCILLATOR AND ANGULAR VELOCITY DETECTOR 失效
公开(公告)号：JP2001221638A
公开(公告)日：2001-08-17
申请号：JP2000029211
申请日：2000-02-07
申请人： SEIKO EPSON CORP
发明人： FUNASAKA TSUKASA , IWAMOTO OSAMU
IPC分类号： G01C19/56 , G01C19/5607 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide an oscillator and an angular velocity detector that are small-sized and can detect electrical signals. SOLUTION: The oscillator 110 comprises a pair of vibration pieces 112, 112' on a vibration side, that are vibrated by applying a voltage and a pair of vibration pieces 113, 113' on a detecting side that are vibrated corresponding to the vibration pieces on the vibration side-Interference preventing parts 113, 113' are arranged at each space between a plurality of electrode parts 114c, 114c' and 114c'', 114c''', placed at the vibration pieces 113, 113' on the detection side.

69. 发明专利

JP2001062733A GRINDING WHEEL 失效
公开(公告)号：JP2001062733A
公开(公告)日：2001-03-13
申请号：JP24161999
申请日：1999-08-27
申请人： SEIKO EPSON CORP
发明人： HAMA TOMOFUMI , IWAMOTO OSAMU
IPC分类号： B24D5/16 , B24D3/28
摘要： PROBLEM TO BE SOLVED: To prevent the deformation caused by the fastening when a grindstone is mounted on a cutting device and to reduce the vibration in the rotation of the grindstone by radially forming a cut from an outer circumferential part of an annular tooth tool to its inner circumferential part, and providing the annular tooth tool with a starting end part and a finish end part in the circumferential direction. SOLUTION: This grinding wheel 1 includes the abrasive grain composed of diamond and a binding material composed of a resin. The grinding wheel 1 is provided with a cut 10. The cut 10 is radially formed from an outer circumferential part of a tooth tool 2 to its inner circumferential part to divide the tooth tool 2. Whereby the tooth tool 2 is provided with a starting end part 3 and a finishing end part 4. The cut is formed by using a rotary grinding wheel. The length in the circumferential direction of a gear 2, of the cut 10 is approximately 300 micrometer. The grinding wheel 1 includes a resin as a binder material, and diamond as abrasive grain for cutting. An outer diameter of the grinding wheel 1 is 56 millimeter, and its inner diameter is 50 millimeter. The thickness of the grinding wheel 1 is 0.25 millimeter.

70. 发明专利

JP2000223996A CRYSTAL VIBRATOR AND MANUFACTURE THEREFOR 失效
公开(公告)号：JP2000223996A
公开(公告)日：2000-08-11
申请号：JP2455899
申请日：1999-02-02
申请人： SEIKO EPSON CORP
发明人： TANAYA HIDEO , IWAMOTO OSAMU
IPC分类号： H03H3/02 , H03H3/04 , H03H9/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To perform miniaturization and to improve impact resistance. SOLUTION: This crystal vibrator 10 is provided with a vibrator substrate 20 where a pair of vibration electrodes are formed, a base substrate 30 for supporting the vibrator substrate 20 and a lid substrate 40 for covering the vibrator substrate 20. The vibrator substrate 20, the base substrate 30 and the lid substrate 40 are constituted of flat substrates, anode-joined and airtightly sealed. Then, the vibrator substrate 20 is provided with a vibrator piece where first and second vibration electrodes are formed and a frame part thicker than the vibrator piece for supporting the crystal vibrator piece where a first wiring electrode connected to the first vibration electrode is formed almost over the entire surface of one surface and a second wiring electrode connected to the second vibration electrode is formed almost over the entire surface of the other surface. On the corner part side wall of the frame part, first and second external electrodes respectively continued to the first wiring electrode and the second wiring electrode are formed.

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