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1. 发明专利

JP2015002548A 振動素子、振動子、発振器、電子機器および移動体审中-公开
标题翻译：振动元件，振动器，振荡器，电子设备和移动单元
公开(公告)号：JP2015002548A
公开(公告)日：2015-01-05
申请号：JP2013127980
申请日：2013-06-18
申请人：セイコーエプソン株式会社 , Seiko Epson Corp
发明人： YAMADA AKINORI , IWAMOTO OSAMU
IPC分类号： H03H9/19 , H03B5/32 , H03H9/10 , H03H9/215
CPC分类号： H03B5/32 , H03H9/0547 , H03H9/1021 , H03H9/21
摘要：【課題】対象物へ搭載した状態での固定部材同士の接触を低減することのできる振動素子、並びに、この振動素子を備える振動子、発振器、電子機器および移動体を提供すること。【解決手段】振動素子2は、基部4と、基部4と一体に設けられ、基部4の先端からY軸方向に延出している一対の振動腕5、6と、基部4と一体に設けられ、振動腕5、6の間に位置し、基部4の先端からY軸方向に延出している保持腕7とを含み、基部4の一方の主面には第1固定部R1が設けられ、保持腕7の一方の主面には第2固定部R2が設けられ、第1固定部R1および第2固定部R2にて固定部材を介して対象物に固定される。【選択図】図3
摘要翻译：要解决的问题：提供一种振动元件，其能够在固定构件安装在物体上的状态和具有振动元件的振动器，振荡器，电子设备和移动单元的状态下，将固定构件彼此接触。解决方案：振动元件2包括：基座4; 一对与基座4一体设置并从基座4的前端沿Y轴方向延伸的振动臂5,6; 以及与基座4一体设置的位于振动臂5,6之间并从基座4的前端沿Y轴方向延伸的保持臂7.第一固定部分R1设置在基座的一个主表面上如图4所示，第二固定部分R2设置在保持臂7的一个主表面上，第一固定部分R1和第二固定部分R2通过固定部件固定到物体上。

2. 发明专利

JP2013239895A Manufacturing method of vibrator 审中-公开
标题翻译：振动器制造方法
公开(公告)号：JP2013239895A
公开(公告)日：2013-11-28
申请号：JP2012111572
申请日：2012-05-15
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： IWAMOTO OSAMU , EBINA AKIHIKO , YAMAZAKI TAKASHI , ISHII MASAHIRO
IPC分类号： H03H3/02 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a method for stably and easily manufacturing a highly accurate vibrator.SOLUTION: A manufacturing method of a vibrator includes the steps of: forming an oxide silicon layer 11 on a silicon substrate 10; patterning the oxide silicon layer 11 to form a cavity formation part 11p; laminate a polysilicon layer 12 on the silicon substrate 10 so as to cover at least a part of the cavity formation part 11p; patterning the polysilicon layer 12 to form a support part 100 and a vibration part 300 extending from the support part 100 to a region overlapping with at least the part of the cavity formation part 11p when the silicon substrate 10 is viewed in a plane view and exposing the part of the cavity formation part 11p; forming a driving part 200 including at least an electrode and a piezoelectric material layer on a side surface 300a of the vibration part 300; and removing the cavity formation part 11p and forming a cavity part between the vibration part 300 and the silicon substrate 10.
摘要翻译：要解决的问题：提供一种用于稳定且容易地制造高精度振动器的方法。解决方案：振动器的制造方法包括以下步骤：在硅衬底10上形成氧化物硅层11; 图案化氧化硅层11以形成空腔形成部分11p; 在硅衬底10上层叠多晶硅层12以覆盖空腔形成部分11p的至少一部分; 图案化多晶硅层12以形成支撑部分100和从支撑部分100延伸到与空腔形成部分11p的至少一部分重叠的区域的振动部分300，当在平面图中观察硅衬底10并暴露时空腔形成部分11p的部分; 在振动部300的侧面300a形成至少包括电极和压电体层的驱动部200; 除去空腔形成部11p，在振动部300与硅基板10之间形成空腔部。

3. 发明专利

JP2001349783A INFRARED DETECTING ELEMENT AND THERMOMETER 失效
公开(公告)号：JP2001349783A
公开(公告)日：2001-12-21
申请号：JP2000169694
申请日：2000-06-06
申请人： SEIKO EPSON CORP
发明人： SATO SHIGEMI , IWAMOTO OSAMU , SHIOBARA YASUHIRO , ODA YUJI
IPC分类号： G01J1/02 , G01J5/00 , G01J5/02 , G01J5/10 , G01J5/12 , G01J5/14 , G01J5/16
摘要： PROBLEM TO BE SOLVED: To provide an infrared detecting element capable of improving the precision of temperature measurement while reducing the size and cost by the application of a thermopile form, and a thermometer using it. SOLUTION: This infrared detecting element comprises a semiconductor substrate, a thermopile formed on the main surface of the semiconductor substrate to generate a voltage on the basis of the temperature of a heat absorber for receiving infrared ray, and a reference temperature detecting means for detecting the reference temperature of the thermopile. The reference temperature detecting means has, as a thermosensitive part sensitive to the temperature change of the reference temperature, a plurality of semiconductor elements, whose the input and output characteristics are changed according to the temperature change to detect the reference temperature on the basis of the output from the semiconductor elements.

4. 发明专利

JP2001077647A MANUFACTURE OF PIEZOELECTRIC VIBRATING REED 失效
公开(公告)号：JP2001077647A
公开(公告)日：2001-03-23
申请号：JP24765399
申请日：1999-09-01
申请人： SEIKO EPSON CORP
发明人： NAKAMURA HIDEAKI , KASUGA KOJI , IWAMOTO OSAMU , KITAMURA FUMITAKA
IPC分类号： G03F7/00 , G03F7/20 , H03H3/02 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To provide the method for manufacturing a piezoelectric vibrating reed with high work efficiency. SOLUTION: In this method, corrosion resistant films 42 and 43 and a photoresist film 44 are formed on the substrate 41 of the piezoelectric vibrating reed the unwanted part of the photoresist film is exposed, developed and removed corresponding to the outer shape of the piezoelectric vibrating reed, the unwanted part of the corrosion resistant film corresponding to the outer shape of the piezoelectric vibrating reed is etched and removed, the unwanted part of the photoresist film is exposed, developed and removed corresponding to the center shape of the piezoelectric vibrating reed, the exposed part of the substrate is etched, the unnecessary part of the corrosion resistant film corresponding to the center shape of the piezoelectric vibrating reed is etched and removed, and the exposed part of the substrate is etched, thereby forming the shape containing the center part of the piezoelectric vibrating reed. Thus, the new photoresist film is dispensed with to be formed/peeled as in the conventional method, so that a process is simplified, work efficiency is improved, and work cost is reduced.

5. 发明专利

JP2000156553A FORMING METHOD OF ELECTRIC WIRING AND ELECTRONIC COMPONENT 失效
公开(公告)号：JP2000156553A
公开(公告)日：2000-06-06
申请号：JP33103498
申请日：1998-11-20
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU , UMETSU KAZUNARI
IPC分类号： H05K1/18 , B81C1/00 , C25D11/04 , G01C19/56 , G01C19/5628 , H01L21/3205 , H01L21/768 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a forming method of electric wiring which can form a predetermined electric wiring accurately on the side surface of base material having a solid form or on base material having irregularities. SOLUTION: This method contains a first process wherein a first thin film layer 400 and a second thin film layer 401 which turn to electric conduction parts are formed on base material, and sequentially a metal thin film capable of anodic oxidation, as a third thin film layer 310, is formed on the second thin film layer 401, a second process wherein a notch 351 is formed in a thin film layer 300 composed of the three layers 400, 401, 310, and the thin film is divided into a part 330 to be turned into electric wiring and a part 331 to be eliminated, a third process wherein a barrier type anodic oxidation layer 301 is formed by anodizing the surface of the part 331 to be eliminated, and a process which selectively eliminates the part 331 to be eliminated. The above processes are performed in this order and wiring 201 is formed.

6. 发明专利

JP2000156381A FORMING METHOD OF ELECTRIC WIRING AND ELECTRONIC COMPONENT 失效
公开(公告)号：JP2000156381A
公开(公告)日：2000-06-06
申请号：JP33103598
申请日：1998-11-20
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU , UMETSU KAZUNARI
IPC分类号： H01L21/3205 , B81C1/00 , G02F1/1333 , G02F1/1343 , H01L23/52 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a forming method of an electric wiring capable of accurately forming a specified electric wiring on the side surface of a base member having a solid shape and on a base member having unevenness. SOLUTION: In this forming method of an electric wiring, (a) a first process forming a metal thin film 300 which can be anodized, (b) a second process which forms a notch 351 on the metal thin film 300 and divides it into a part 330 to be made an electric wiring and a part 331 to be eliminated, (c) a third process which anodizes the part 331 to be eliminated and changes it to a porous anodic oxidation film 301, and (d) a fourth process which selectively eliminates the part 331 to be eliminated are performed in this order, and an electric wiring is formed.

7. 发明专利

JPH11346137A MANUFACTURE OF QUARTZ OSCILLATOR 失效
公开(公告)号：JPH11346137A
公开(公告)日：1999-12-14
申请号：JP34553198
申请日：1998-12-04
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU , KAYANO TAMAKO
IPC分类号： H03H3/04 , H03H9/19
摘要： PROBLEM TO BE SOLVED: To manufacture a quartz oscillator of high reliability by an inexpensive method of high productivity at high yield. SOLUTION: An electrode forming process to form an electrode of three layers where a chromium film 22, a gold film 23 and an aluminum film 24 are heaped on a quartz oscillator piece 21 and a frequency adjustment process to perform frequency adjustment by decreasing the thickness of the quartz oscillator piece by a dry etching are performed in this order.

8. 发明专利

JPH11205070A SURFACE ACOUSTIC WAVE ELEMENT AND PRODUCTION THEREOF 失效
公开(公告)号：JPH11205070A
公开(公告)日：1999-07-30
申请号：JP354998
申请日：1998-01-09
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： H03H3/08 , H03H3/10 , H03H9/145 , H03H9/25
摘要： PROBLEM TO BE SOLVED: To reduce insertion loss and to provide satisfactory characteristics by providing a reflector electrode and an exciting electrode which are composed of first materials, applying a weight adding part composed of second materials to the surface of the reflector electrode and enlarging the weight of the reflector electrode, in comparison with the weight of the exciting electrode. SOLUTION: A surface acoustic wave(SAW) element 100 is constituted of a piezoelectric substrate 101, an exciting electrode 110 for the piezoelectric conversion of an electric signal into a SAW, exciting electrode 110 for enclosing the excited SAW inside the element, and two sets of reflector electrodes 111 and 112 installed on both the sides of the exciting electrode 110 which are electrically disconnected. The exciting electrode 110 and the reflector electrodes 111 and 112 are constituted of aluminum as the first materials and furthermore, the reflector electrodes 111 and 112 are composed of a single electrode composed of aluminum and the weight adding part composed of aluminum oxide as the second materials. Thus, since the reflection coefficient of the reflector electrodes 111 and 112 to the SAW can be enlarged, the insertion loss can be reduced.

9. 发明专利

JPH0879002A SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH0879002A
公开(公告)日：1996-03-22
申请号：JP21145194
申请日：1994-09-05
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： H03H7/54 , H03H9/145 , H03H9/25
摘要： PURPOSE: To realize the highly precise operation of the surface acoustic wave device without disturbing the characteristic of the device by using a thermoelectric element so as to control temperature of the surface acoustic wave device. CONSTITUTION: A SAW filter is made up of an interdigital electrode transducer 2 and grating reflectors 3.4 formed on a surface of a piezoelectric substrate 1. A thermosensing element 5 is formed on the surface of the piezoelectric substrate 1 and the surface temperature of the piezoelectric substrate 1 is measured by means of a resistance change in the element 12. A Peltier element 6 is adhered to the rear side of the piezoelectric substrate 1 and the middle part of the Peltier element 6 is supported by a support section 7a of a support base 7. A drive voltage of the Peltier element 6 is controlled depending on the surface temperature of the photoelectric substrate 1 measured by the thermosensing element 5 to keep the temperature of the piezoelectric substrate 1 constant.

10. 发明专利

JPH0879001A SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH0879001A
公开(公告)日：1996-03-22
申请号：JP21145094
申请日：1994-09-05
申请人： SEIKO EPSON CORP
发明人： IWAMOTO OSAMU
IPC分类号： H03H7/54 , H03H9/145 , H03H9/25
摘要： PURPOSE: To realize the highly precise operation of the surface acoustic wave device without disturbing the characteristic of the device by using a thermoelectric element so as to control temperature of the surface acoustic wave device. CONSTITUTION: A SAW filter is made up of interdigital electrode transducers 3,4 and a sound absorbing material 5 formed on a surface 2 of a piezoelectric substrate 1. A thermosensing element 12 is formed on the surface 2 of the piezoelectric substrate 1. The surface temperature of the piezoelectric substrate 1 is measured by means of a resistance change in the element 12. A Peltier element 6 is adhered to the surface of the sound absorbing material 5. A drive voltage of the Peltier element 6 is controlled depending on the surface temperature of the photoelectric substrate 1 measured by the thermosensing element 12 to keep the temperature of the piezoelectric substrate 1 constant.

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