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61. 发明专利

JPH01276149A ELECTROPHOTOGRAPHIC SENSITIVE BODY AND PRODUCTION THEREOF 失效
公开(公告)号：JPH01276149A
公开(公告)日：1989-11-06
申请号：JP10428588
申请日：1988-04-28
申请人： HITACHI LTD , HITACHI CHEMICAL CO LTD
发明人： KONUMA SHIGEHARU , WAKAGI MASATOSHI , ISHIKAWA NORITOSHI , TAMAHASHI KUNIHIRO , SHIMAMURA YASUO , YAMAGISHI TOMOAKI , HANAZONO MASANOBU
IPC分类号： G03G5/08 , G03G5/082
摘要： PURPOSE:To obtain the photosensitive body which has high performance and a long life and is free from film exfoliation by forming a photosensitive layer consisting of an amorphous silicon hydride system having ruggedness on the surface and a layer consisting of an amorphous carbon hydride system existing in the recesses thereof. CONSTITUTION:The photosensitive layer is formed by forming the ruggedness on a conductive aluminum substrate and laminating the layer (b) consisting of the amorphous silicon hydride system and the layer (a) consisting of the amorphous carbon hydride system by vacuum vapor deposition on the surface thereof. The projecting parts of the layer (a) on the surface of the photosensitive layer are cut by a blade, by which the photosensitive body is obtd. The deterioration of setting performance is generated in the recesses of the layer (b) but are compensated by the layer (a) which is exposed in the part Ec and is highly resistant to moisture and corona; in addition, the wear generated by iterative use is decreased by the layer (b) which is exposed in the part Es and is highly hard. The exfoliation of the photosensitive layer is prevented by the anchor effect having rugged shapes. The photosensitive body which has the high performance and the long life and is free from the exfoliation is thereby obtd.

62. 发明专利

JPH01252970A ELECTROPHOTOGRAPHIC SENSITIVE BODY 失效
公开(公告)号：JPH01252970A
公开(公告)日：1989-10-09
申请号：JP7804288
申请日：1988-04-01
申请人： HITACHI LTD , HITACHI CHEMICAL CO LTD
发明人： WAKAGI MASATOSHI , TAMAHASHI KUNIHIRO , KONUMA SHIGEHARU , ISHIKAWA NORITOSHI , HANAZONO MASANOBU , SHIMAMURA YASUO , YAMAGISHI TOMOAKI
IPC分类号： G03G5/08 , G03G5/082
摘要： PURPOSE:To enhance electric chargeability of a photosensitive body by adding a specified element to an amorphous silicon (a-SiC:H) to regulate its Fermi level. CONSTITUTION:The photosensitive body superior is electric chargeability is obtained by forming on a conductive substrate 1 a layer 2 made of the amorphous silicon as a base and containing H, halogen, and carbon elements, and further that of group III or V of the periodic table in a concentration distribution ununiform in the thickness direction, i.e., adding an element, such as B of group III, or P of group V to a C-containing a-Si:H (a-Si1-xCx:H) film, regulating the Fermi level, and controlling the resistivity and conduction type of the film.

63. 发明专利

JPH01229265A ELECTROPHOTOGRAPHIC SENSITIVE BODY AND ITS PRODUCTION 失效
公开(公告)号：JPH01229265A
公开(公告)日：1989-09-12
申请号：JP5354588
申请日：1988-03-09
申请人： HITACHI LTD , HITACHI CHEMICAL CO LTD
发明人： SHIMAMURA YASUO , YAMAGISHI TOMOAKI , WAKAGI MASATOSHI , ISHIKAWA NORITOSHI , KONUMA SHIGEHARU , TAMAHASHI KUNIHIRO , CHIKAZAKI MITSUO
IPC分类号： G03G5/08 , G03G5/082 , G03G5/147
摘要： PURPOSE:To prevent generation of image flow even in high humidity, and to permit its use for a long time by laminating a surface layer consisting of hydrogenated amorphous carbon contg. a hydrocarbon having a triple bond on a photosensitive layer comprising hydrogenated amorphous silicon. CONSTITUTION:After forming a photosensitive layer 208 comprising hydrogenated amorphous silicon on an electroconductive base body 201, glow discharge is caused at a discharge electric power density in C2H2 gas and He gas flowed at a specified flow rate ratio and gaseous pressure, and the layer 208 is brought into contact with generated plasma. Then, the layer 208 is treated with hydrogen plasma by causing glow discharge at a discharge electric power density in gaseous H2 flowed at a specified flow rate, thus a surface layer 206 consisting of hydrogenated amorphous carbon contg. hydrocarbon having a triple bond is laminated on the layer 208. By this method, an electrophotographic sensitive body causing no image flow even if it is used in high humidity for a long time, is obtd.

64. 发明专利

JPH01215982A DEVICE FOR FORMING FILM 失效
公开(公告)号：JPH01215982A
公开(公告)日：1989-08-29
申请号：JP3939988
申请日：1988-02-24
申请人： HITACHI LTD , HITACHI CHEMICAL CO LTD
发明人： KONUMA SHIGEHARU , ISHIKAWA NORITOSHI , WAKAGI MASATOSHI , ONO TOSHIYUKI , SHIMAMURA YASUO , YAMAGISHI TOMOAKI , TAMAHASHI KUNIHIRO , CHIKAZAKI MITSUO
IPC分类号： C23C16/24 , C23C16/30 , C23C16/50 , G03G5/08 , H01L21/205 , H01L31/0248
摘要： PURPOSE:To improve film formation efficiency and also to reduce contamination of a reaction vessel by impressing high-frequency voltage to both a base body holder and an electrode and also grounding the reaction tank in a reduced- pressure plasma vapor phase growing device. CONSTITUTION:A reduced-pressure plasma vapor phase growing device is provided with a cylindrical reaction vessel 1 housing a rotary cylindrical base body holder 3, a cylindrical electrode 2 and a reactive gas feeder 4, etc. In this device, both the electrode 2 and the base body holder 3 are impressed with high-frequency voltage via a matching circuit 6 with a high-frequency electric source 5 respectively and one electrode of the high-frequency electric source 5 is grounded. Further the reaction vessel 1 is grounded via a cylindrical base plate 10. Thereby the electric field between the electrode 2 and the base body holder 3 is made larger than the electric field between the inner wall of the grounded reaction vessel and the electrode 2 and the caused plasma is concentrated between the electrode 2 and the base body holder 3 and film formation efficiency on the base body holder part is improved and contamination in the reaction vessel 1 is reduced.

65. 发明专利

JPH01123244A ELECTROPHOTOGRAPHIC SENSITIVE BODY 失效
公开(公告)号：JPH01123244A
公开(公告)日：1989-05-16
申请号：JP28285187
申请日：1987-11-09
申请人： HITACHI LTD
发明人： TAMAHASHI KUNIHIRO , ISHIKAWA NORITOSHI , KONUMA SHIGEHARU , WAKAGI MASATOSHI , CHIKAZAKI MITSUO , ONO TOSHIYUKI
IPC分类号： H01L31/08 , G03G5/043 , G03G5/08 , G03G5/147
摘要： PURPOSE:To prevent oxidation of a photosensitive layer formed on a conductive base by a corona discharge and to obtain the photosensitive layer having high moisture resistance and high electric resistance by coating the surface of the photosensitive layer with an amorphous phosphorus nitride film. CONSTITUTION:Amorphous silicon hydride carbide is laminated as a blocking layer 2 and amorphous silicon hydride as an electric charge transfer layer 3 successively on an Al substrate 1, following which a surface protective layer 4 is laminated thereon. The surface protective layer 4 consists of the amorphous phosphorus nitride film or the amorphous phosphorus nitride contg. >=1 elements among hydrogen, oxygen, fluorine, carbon, boron, and silicon. Said layer is hardly oxidized at the time of corona charge and is capable of maintaining a high water repelling property even under high humidity. In addition, the photosensitive layer has a wide optical band gap and high hardeness; therefore, the sharp image which is not blurred even under the high humidity is formed.

66. 发明专利

JPS63290927A PHOTODETECTON BY SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPS63290927A
公开(公告)日：1988-11-28
申请号：JP12586987
申请日：1987-05-25
申请人： HITACHI LTD
发明人： NAKAYAMA TAKAHIRO , TAMAHASHI KUNIHIRO , FUYAMA MORIAKI
IPC分类号： G01R33/035 , G01D5/26 , G01J1/00 , G01J5/08 , G01R19/00 , G02F1/01
摘要： PURPOSE:To use a superconducting material as various detecting elements by using the superconducting material in detecting parts by various detecting mechanism, detecting a magnetic field, temp., impressed current, and pressure by the superconduction-normal conduction transition thereof and optical reading out the same. CONSTITUTION:A thin superconducting film 3 is formed by sputtering on a transparent holding body 4. Incident light 5 is reflected by the thin superconducting film 3 and reflected light 6 is detected. Whether the thin superconducting film 3 is of a normal conduction phase or superconduction phase is discriminated by this reflected light 6. The thin superconducting film 3 moves on a magnetic material 7 and quickly generates the superconduction- normal conduction transition by the magnetization condition of the magnetic material 7. The change thereof is detected by the reflected light 6. The magnetization state of the magnetic material 7 is readable as 0 or 1 by forming the detecting element into such construction. Detection of a micropart of a magnetic reader or the like is thus enabled.

67. 发明专利

JPS63236050A ELECTROPHOTOGRAPHIC SENSITIVE BODY 失效
公开(公告)号：JPS63236050A
公开(公告)日：1988-09-30
申请号：JP6889287
申请日：1987-03-25
申请人： HITACHI LTD
发明人： ISHIKAWA NORITOSHI , TAMAHASHI KUNIHIRO , CHIKAZAKI MITSUO , KONUMA SHIGEHARU , WAKAGI MASATOSHI , ONO TOSHIYUKI
IPC分类号： G03G5/08 , G03G5/082 , G03G5/147 , H01L31/08
摘要： PURPOSE:To obtain an electrophotographic sensitive body freed of deterioration of print characteristics under high humidity and long in life by forming a surface protective layer of laminate structure obtained by laminating a carbon type film on a silicon type film and inserting a buffer layer between both films. CONSTITUTION:The electrophotographic sensitive body is obtained by successively laminating on an aluminum pipe 1 as an a-Si:H photosensitive body, an a-SiC:H blocking layer 2, an electric charge transfer layer 3, a charge generating layer 4, and finally as the surface protective layer 5, the a-SiC:H film 6, the a-SiC:H:F buffer layer 7, and the a-C:H:F film 8. the surface protective layer 5 is hardly oxidizable at the time of corona charging, it retains high water repellency even under high humidity, has strong adhesion to the photosensitive layer, and does not cause peeling from the photosensitive layer, thus permitting the obtained photosensitive body not to deteriorate image quality under high humidity, and have a life as long as capable of printing more than 1.5 million sheets.

68. 发明专利

JPS6355557A ELECTROPHOTOGRAPHIC SENSITIVE BODY 失效
公开(公告)号：JPS6355557A
公开(公告)日：1988-03-10
申请号：JP9077387
申请日：1987-04-15
申请人： HITACHI LTD , HITACHI CHEMICAL CO LTD
发明人： FUJIKURA MAKOTO , ONO TOSHIYUKI , KONUMA SHIGEHARU , TAMAHASHI KUNIHIRO , CHIKAZAKI MITSUO , SHIMAMURA YASUO
IPC分类号： G03G5/08 , G03G5/082
摘要： PURPOSE:To alleviate energy level difference between a surface layer and a photoconductive layer and interface energy level by forming a first intermediate layer made of amorphous silicon containing Ge and C between both of said layers. CONSTITUTION:An electrophotographic sensitive body is composed of a conductive substrate 1, and a barrier layer 2, the photoconductive layer 3, and the surface layer 4 laminated on the conductive substrate 1. The photoconductive layer 3 has the 3-layer structure composed of a lower layer 33 made of amorphous silicon containing both of Ge and C, a middle layer 32 made of amorphous silicon containing Ge and to be used as an electric charge generating layer, and a lower layer 31 made of amorphous silicon and to be used as a charge transfer layer. The formation of said upper layer 33 between the surface layer 4 and the middle layer 32 permits energy level difference and interface energy level to be alleviated.

69. 发明专利

JPS62112784A DEVICE FOR FORMING PHOTOSENSITIVE DRUM 失效
公开(公告)号：JPS62112784A
公开(公告)日：1987-05-23
申请号：JP25276085
申请日：1985-11-13
申请人： HITACHI LTD
发明人： ISHIKAWA NORITOSHI , KONUMA SHIGEHARU , TAMAHASHI KUNIHIRO , CHIKAZAKI MITSUO
IPC分类号： C23C16/24 , C23C16/50 , G03G5/08
摘要： PURPOSE:To suppress the generation of the pulverized powder of polysilylene and to improve film formability with a plasma vapor growth device utilizing glow discharge by commonly using a vacuum vessel and gas blowing device as an electrode. CONSTITUTION:A reactive gas entering from a gas introducing port 16 provided to the outside wall of the vacuum vessel 14 is supplied into the vacuum vessel 14 through an introducing hole provided to the inside wall of the vacuum vessel 14. High-frequency electric power is impressed from a power source 8 to a terminal 14 provided to the vacuum vessel 14 to discharge electricity between the vacuum vessel 14 and a substrate holder 1. The vacuum vessel 14 and the electrode as well as the gas introducing device of the above-mentioned device are commonly used and the construction in the vacuum vessel 14 is simplified. The gas introducing holes are disposed around the substrate 6, by which the generation of the pulverized powder of the polysilylene is suppressed in the case of forming an a-Si:H film. The uniform film is thus obtd.

70. 发明专利

JPS62103371A PLASMA CHEMICAL VAPOR DEPOSITION METHOD 失效
公开(公告)号：JPS62103371A
公开(公告)日：1987-05-13
申请号：JP24149085
申请日：1985-10-30
申请人： HITACHI LTD
发明人： NIHEI MASAYASU , CHIKAZAKI MITSUO , SUWA MASATERU , TAMAHASHI KUNIHIRO , ISHIKAWA NORITOSHI
IPC分类号： C23C16/50 , C23C16/515
摘要： PURPOSE:To form a laminar film, composite film and alloy film and to obtain a composite effect having optional characteristics by changing supply electric power impulsively, etc. thereby depositing films having different characteristics. CONSTITUTION:A continuous high-frequency signal is supplied from a high-frequency oscillator 14 to an initial stage high-frequency amplifier 9 and the signal programmed in a setting circuit is compared and amplified with the detection signal from a power detector 7 by a differential amplifier 10 in order to convert the above-mentioned signal to the impulsive low-frequency power or the high-frequency changing with time. The differential signal is supplied to the amplifier 9 which drives a high-frequency power amplifier 8 so as to obtain always the set power. The high-frequency is supplied via a matching circuit 2 to electrodes 4, 5 to generate glow discharge. More specifically, the peak power is changed periodically or with time to change the reaction and cracking of the gaseous raw material by plasma, by which the films having the different characteristics are successively deposited and the laminar film, composite film and alloy film are formed.

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