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    • 62. 发明专利
    • CONTINUOUS VACUUM VAPOR-DEPOSITION DEVICE
    • JPH0488171A
    • 1992-03-23
    • JP19902090
    • 1990-07-30
    • MITSUBISHI HEAVY IND LTD
    • TAKEOKA YASUYOSHIOKITA HAJIMEHOSHI YOUNOSUKEKAMIKAWA SUSUMU
    • C23C14/56
    • PURPOSE:To instantaneously change the area of an opening and to prevent the burning of a substrate due to the radiant heat when a vapor-deposition material is heated by moving the nozzle plate of first and second goes constituting the nozzle plate from outside a vacuum chamber. CONSTITUTION:A couple of nozzle plates 11 constituting a first gate and a couple of nozzle plates 12 constituting a second gate are provided on a heating element 06 furnished around the opening 05a of a vacuum-deposition material container 05. The opening of a slit nozzle is formed by the part surrounded by the tip sides of the plates 11 and 12. Protrusions 11a and 12a with the tips expanded are provided on the lower surface of the plates 11 and 12 respectively in the moving direction and engaged free to slide with a slide groove 13 formed on the upper surface of the heating element 06. A notch 11b is formed on the lower side of the tip of the plate 11 so that the tip of the plate 11 and the plate 12 are overlapped with each other. A shaft 15 is rotated by a driving source 17 outside a vacuum chamber 01 to move the plates 11 and 12 in the longitudinal direction along the groove 13.
    • 63. 发明专利
    • CONTINUOUS VACUUM VAPOR DEPOSITION DEVICE
    • JPH03191062A
    • 1991-08-21
    • JP32738089
    • 1989-12-19
    • MITSUBISHI HEAVY IND LTD
    • TAGUCHI TOSHIOOKITA HAJIMEMAKIHARA KATSUMIKAMIKAWA SUSUMU
    • C23C14/56
    • PURPOSE:To prevent flapping, flawing and damaging of a substrate in the device having differential pressure chambers partitioned by sealing rolls to plural stages by providing tendency rolls and liquid floating and supporting devices in the differential pressure chambers and winding the substrate on the sealing rolls. CONSTITUTION:A pressure gradient is generated stepwise from the atm. side to a vacuum vapor deposition chamber 2 by a discharge pump unit 29 connected to the differential pressure chambers 16a to 16f partitioned by three pieces one set of the sealing rolls 15a to 15f. Guide rolls 20 are provided in the respective chambers 16. The tendency rolls 30 are provided in the chambers 16 of =5 Torr pressure. The band-shaped substrate 1 is passed successively in the spacings of two pieces on one side among 3 pieces of the respective rolls 15 and is carried into the vapor deposition chamber 2 where the substrate is subjected to vapor deposition; thereafter, the substrate is made to travel backward in the spacings of the two pieces on the opposite side of the respective rolls 15 and is carried out into the atm. from a sealing device 14.
    • 64. 发明专利
    • CONTINUOUS VACUUM VAPOR DEPOSITION DEVICE
    • JPH03126869A
    • 1991-05-30
    • JP26194789
    • 1989-10-09
    • MITSUBISHI HEAVY IND LTD
    • TAGUCHI TOSHIOOKITA HAJIMEKAMIKAWA SUSUMU
    • C23C14/56
    • PURPOSE:To minimize the burn of a vessel for sucking out a material for vapor deposition by hermetically closing the vessel for sucking out the material for vapor deposition and inserting the front end of a sucking-out pipe into the material for vapor deposition in a vessel for housing the material for vapor deposition, then communicating the vessel for sucking out with a discharge device so that the material for vapor deposition can be discharged in several seconds. CONSTITUTION:The inside of a reduced pressure chamber 11 and a vapor deposition chamber 2 is evacuated by a vacuum discharge device 13. A substrate 1 for vapor deposition is transferred successively in the reduced pressure chamber 11, the vapor deposition chamber 2 and the reduced pressure chamber 11 from the atm. and again into the atm. The material 5 for vapor deposition housed in the vessel (crucible) 4 for housing the material for vapor deposition evaporates and is deposited by evaporation on the substrate 1. The above-mentioned device is provided with the vessel 21 for sucking out the material for vapor deposition, the sucking-out device 26 and means for putting the other end of this pipe 26 into and out of the above-mentioned crucible 4. The above mentioned vessel 21 can be hermetically closed and the inside thereof is communicated via a valve 24 with the above-mentioned discharge device 13.
    • 69. 发明专利
    • BRIQUETTE SEPARATING MACHINE
    • JPS62224643A
    • 1987-10-02
    • JP6705786
    • 1986-03-27
    • MITSUBISHI HEAVY IND LTD
    • ITANO SHIGEOOTAWA KIMIAKIKOBAYASHI MASAHIKOKAMIKAWA SUSUMU
    • C22B1/248
    • PURPOSE:To increase the productivity of a briquette installation by increasing bottom edges formed to the bottom end of the chute of a separating machine and increasing the impact plates of the rolls of the separating machine so as to conform thereto. CONSTITUTION:The nose provided to the bottom edge 318 at the bottom end of the chute 300 of the briquette separating machine is increased from the previous one piece to 2 pieces (33, 34). The impact plates of the roll 200 of the separating machine are increased to 3 pieces (30, 31, 32). The briquette belts arrayed in horizontal 4 rows are separated by the impact plates 30-32 and the bottom edge 318 to 4 pieces of the briquette group in one horizontal row from the briquette belts. Four pieces one set of the briquette group is then separated to 4 pieces of single briquettes 310 by the impact plates 30-32 and L-shaped noses 33, 34. The briquettes 310 arrayed in one horizontal row are separated to the single briquettes by the interaction of the projecting parts C, A and barrel parts D, B of the impact plates 30-32 and the L-shaped noses 33, 34.