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    • 53. 发明专利
    • X-ray exposure device, and instrument for measuring x-ray
    • X射线曝光装置和用于测量X射线的仪器
    • JP2003075373A
    • 2003-03-12
    • JP2001263974
    • 2001-08-31
    • Rigaku Corp理学電機株式会社
    • YAMAZAKI HIDETOYOSHIDA HISAFUMISATO TAKAHISA
    • G01N23/207G21K1/04G21K1/06G21K5/02
    • PROBLEM TO BE SOLVED: To accurately partition an X-ray exposing area to a sample as desired.
      SOLUTION: This X-ray exposing device has an X-ray source for generating an X-ray, a shutter 6 operated based on a shutter opening and closing pulse signal Ps to open and close advance of the X-ray, and a sample rotating device 8 for rotating the sample to change an incident angle of the X-ray onto the sample S, based on a sample-rotating pulse signal Pω. A controller 4 included in the X-ray exposing device delays a leading timing of the sample-rotating pulse signal Pω compared with a leading timing of the shutter opening and closing pulse signal Ps. The situation not irradiated with the X-ray is hereby edvaded in spite of scanning rotation moving of the sample.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:根据需要精确地将X射线曝光区域分割成样品。 解决方案:该X射线曝光装置具有用于产生X射线的X射线源,基于快门打开和关闭脉冲信号Ps操作的快门6以打开和关闭X射线的前进,并且样品旋转 装置8,用于基于取样旋转脉冲信号Pω旋转样品以将X射线的入射角度改变到样品S上。 包括在X射线曝光装置中的控制器4与快门打开和关闭脉冲信号Ps的前导定时相比延迟了采样旋转脉冲信号Pω的前导定时。 尽管扫描样品的旋转移动,但是没有照射X射线的情况也是如此。