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    • 41. 发明专利
    • Flow path opening/closing apparatus
    • 流路打开/关闭装置
    • JP2012092966A
    • 2012-05-17
    • JP2011180134
    • 2011-08-22
    • Canon Anelva Corpキヤノンアネルバ株式会社
    • HIROISHI TSUTOMUJO KA
    • F16K1/22
    • F16K51/02F16K1/222H01L21/67727
    • PROBLEM TO BE SOLVED: To provide a flow path opening/closing apparatus that can improve airtightness to be usable for high-speed processing under high pressure, while keeping advantages, which are a non-contact valve element, high exhausting capability, and high response speed.SOLUTION: A butterfly valve includes a body 20 having a flow path 21 for running a fluid therethrough; and a valve element 23 that can rotate, in the flow path 21, around a rotation axis vertical to the flow path 21, wherein a seal length extending wall 66 for extending a seal length L in a direction of the flow path at a space (a) between the body 20 and the valve element 23 formed when the valve element 23 is fully closed, is projected along an edge of the valve element 23.
    • 解决问题的方案为了提供一种流路开闭装置,能够提高在高压下高速加工的气密性,同时保持作为非接触阀元件的优点,排气性能高, 响应速度快。 解决方案:蝶阀包括具有用于使流体流过其中的流路21的主体20; 以及可以在流路21中围绕与流路21垂直的旋转轴线旋转的阀体23,其中,密封长度延伸壁66用于在空间方向(沿流动路径的方向)延伸密封长度L a)在主体20和阀元件23完全关闭时形成的阀元件23之间沿着阀元件23的边缘突出。(C)2012年,JPO和INPIT
    • 44. 发明专利
    • Gate valve, film manufacturing apparatus, and film manufacturing method
    • 闸阀,电影制造设备和电影制作方法
    • JP2011144922A
    • 2011-07-28
    • JP2010270748
    • 2010-12-03
    • Canon Anelva Corpキヤノンアネルバ株式会社
    • NISHIO KAZUTOSHIAONUMA DAISUKE
    • F16K3/02F16K51/02
    • F16K51/02
    • PROBLEM TO BE SOLVED: To provide a gate valve securing sealing performance in a state of clamping a film and valve closing in regard to a gate valve opening and closing a conveying passage providing communication between a film roll feeding chamber and a film roll take-up chamber.
      SOLUTION: The film manufacturing apparatus includes a feed machine, a take-up machine, and a processing part performing a predetermined process to the film 10. The feed machine, the take-up machine and the processing part are disposed in interiors of vacuum chambers having openings capable of passing the film 10, and the opening has the gate valve 18 capable of sealing the vacuum chamber by carrying out sealing while clamping the film 10. In a seal member 20 of a valve element 22 of the gate valve 18, a recessed part is formed, having a linear part of a size larger than a width of the film in a direction orthogonal to a conveying direction of the film and a moving direction of the valve element.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种在阀门打开和关闭输送通道的夹紧膜和闭阀的状态下确保密封性能的闸阀,所述输送通道提供胶卷供给室和胶卷之间的连通 吸收室。 解决方案:膜制造设备包括进给机,卷取机和对薄膜10执行预定处理的处理部分。进料机,卷取机和加工部分设置在内部 具有能够通过膜10的开口的真空室,并且开口具有能够通过在夹持膜10的同时进行密封来密封真空室的闸阀18.在闸阀的阀元件22的密封件20中 如图18所示,形成凹部,其具有大于膜的宽度的直线部分,其尺寸与膜的输送方向正交的方向以及阀元件的移动方向。 版权所有(C)2011,JPO&INPIT
    • 46. 发明专利
    • Flap transfer valve having valve cover
    • 具有阀盖的阀瓣传动阀
    • JP2011093711A
    • 2011-05-12
    • JP2010237296
    • 2010-10-22
    • Vat Holding Agバット ホールディング アーゲー
    • GEISER FRIEDRICH
    • B65G49/00H01L21/677
    • H01L21/67126F16K1/2007F16K1/2028F16K1/205F16K51/02
    • PROBLEM TO BE SOLVED: To provide a transfer valve replaceable without removing a transfer valve from a process chamber in maintenance and repairing, and generating an equal contact force and an equal sealing force over the total length of a valve closing part, in the transfer valve having a slot-shaped opening part. SOLUTION: A valve closing beam 4, a rotary bearing and a shaft 11 are arranged on a valve cover 20 in an airtight valve housing 14, and the shaft 11, the rotary bearing, and the valve closing beam 4, are separated from the valve housing 14 by separating and moving the valve cover 20. The rotary bearing is formed of at least three bearing elements 27 dispersed by mutually separating by a predetermined distance along the shaft axis in the valve housing 14, and having the valve closing beams 4 and the shaft 11 attached thereto. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供可更换的转换阀,在维护和修理中不从处理室中移除转移阀,并且在阀关闭部件的总长度上产生相等的接触力和相等的密封力, 所述转移阀具有槽形开口部。 解决方案:气门关闭梁4,旋转轴承和轴11布置在气密阀壳体14中的阀盖20上,并且轴11,旋转轴承和闭合梁4被分离 通过分离和移动阀盖20从阀壳体14旋转。旋转轴承由至少三个轴承元件27形成,所述至少三个轴承元件27通过在壳体14中的轴线相互分离预定距离而分散,并且具有闭合梁 4和安装在其上的轴11。 版权所有(C)2011,JPO&INPIT