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41. 发明专利

JPS61186838A CONCENTRATION MEASURING INSTRUMENT BY X-RAYS 失效
公开(公告)号：JPS61186838A
公开(公告)日：1986-08-20
申请号：JP2807285
申请日：1985-02-14
申请人： MITSUBISHI HEAVY IND LTD
发明人： MURATA MASAYOSHI , KURODA MASAHIRO , NODA SHOHEI , TOKUDA KIMIYO , KANEKO SHOZO , IMAMOTO TOSHIHIKO
IPC分类号： G01N23/06
摘要： PURPOSE:To identify sharply a coal concn. by irradiating X-rays on a COM (coal-petroleum slurry), providing X-ray detectors on the opposite side, turning the X-ray irradiator and X-ray detectors to change angles and detecting the X-rays. CONSTITUTION:The COM which is a sample is put into an acrylic vessel 4 having X-ray transmittance. X-ray beams 7 are irradiated from ray tubes 6 on the vessel 4. The transmittance of the X-rays is smaller in the part 3 where the coal concn. is large in the vessel 4 than in the part 2 where the concn. is small. The X-ray intensity detectors 8 which detect the transmitted X-ray beams are provided on the opposite side of the vessel 4. The X-ray tubes 6 and the detectors 8 which are paralleled to face each other are turned around an axis 12 of rotation as a reference to change the rotating angles, then the transmitted X-rays are detected. The coal concn. is determined by arithmetic processing in a computer 10. Since the transmitted X-rays are detected by turning the X-ray tubes and the X-ray intensity detectors, the identification of the coal concn. with good accuracy is made possible and the clogging of the injection nozzle for the COM is prevented.

42. 发明专利

JP2006100551A Plasma deposition method, plasma processing device, solar cell and manufacturing method thereof 有权
标题翻译：等离子体沉积方法，等离子体处理装置，太阳能电池及其制造方法
公开(公告)号：JP2006100551A
公开(公告)日：2006-04-13
申请号：JP2004284659
申请日：2004-09-29
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： KAWAMURA KEISUKE , MIYAHARA HIROOMI , MASHIMA HIROSHI , NISHIMIYA TATSUYUKI , TAKANO GIYOUMI , TAKEUCHI YOSHIAKI , NODA SHOHEI
IPC分类号： H01L21/205 , C23C16/24 , C23C16/505 , H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide a plasma deposition method which enables improvement of film quality and uniformity of film quality, and also can correspond to enlargement of an area of a substrate. SOLUTION: In the plasma deposition method, a thin film of raw gas is generated on a substrate 3 by plasma chemical deposition. High frequency electric field is applied by introducing hydrogen gas into vacuum, and hydrogen radical is generated wherein hydrogen gas is excited to a plasma state. A film is manufactured on the substrate 3 by supplying raw gas from a system different from the hydrogen gas, and the raw gas and the hydrogen radical are made to react with each other in a space which is free from plasma. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够提高膜质量和膜质量均匀性的等离子体沉积方法，并且还可以对应于基板的面积的放大。解决方案：在等离子体沉积方法中，通过等离子体化学沉积在基板3上产生原料气体的薄膜。通过将氢气引入真空中施加高频电场，产生氢气，其中氢气被激发到等离子体状态。通过从不同于氢气的系统提供原料气体，在基板3上制造膜，并且使原料气体和氢自由基在不含等离子体的空间中相互反应。版权所有（C）2006，JPO＆NCIPI

43. 发明专利

JP2005072102A Cvd equipment, plasma formation method and solar cell 审中-公开
标题翻译： CVD设备，等离子体形成方法和太阳能电池
公开(公告)号：JP2005072102A
公开(公告)日：2005-03-17
申请号：JP2003296748
申请日：2003-08-20
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： NODA SHOHEI , KAWAMURA KEISUKE , TAKEUCHI YOSHIAKI
IPC分类号： H05H1/46 , C23C16/505 , H01L21/205 , H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide CVD equipment whose productivity improves when a thin film is formed. SOLUTION: The CVD equipment is provided with a vacuum container with which gaseous species are filled, a driving electrode arranged in the vacuum container and a ground electrode disposed in the vacuum container. A film creating substrate where the thin film is formed by plasma generated in the vacuum container is installed between the driving electrode and the ground electrode. The driving electrode includes a plurality of ladder electrodes, and a plurality of the ladder electrodes are disposed at equal intervals. Grooves (13) are made in a plurality of the ladder electrodes so that the thin films are uniformly formed. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供当形成薄膜时生产率提高的CVD设备。解决方案：CVD设备设置有填充气体的真空容器，布置在真空容器中的驱动电极和设置在真空容器中的接地电极。通过在真空容器中产生的等离子体形成薄膜的成膜基板安装在驱动电极和接地电极之间。驱动电极包括多个梯形电极，并且多个梯形电极以相等的间隔设置。沟槽（13）制成多个梯形电极，使得薄膜均匀地形成。版权所有（C）2005，JPO＆NCIPI

44. 发明专利

JPH11183261A TEMPERATURE MONITORING DEVICE OF ROTARY HEAT EXCHANGER 失效
公开(公告)号：JPH11183261A
公开(公告)日：1999-07-09
申请号：JP34939397
申请日：1997-12-18
申请人： MITSUBISHI HEAVY IND LTD
发明人： KAI TOKIO , NODA SHOHEI , ARAOKA MAMORU , HASHIMOTO AKIRA , TAKEGAWA TOSHIYUKI , IDE YUICHI , YOSHIKAWA KEIJI , WATANABE NOBUYA
IPC分类号： G01J5/48 , F23L15/04 , F23N5/08 , F28F27/00
摘要： PROBLEM TO BE SOLVED: To provide a temperature monitoring device of a rotary heat exchanger that can equally monitor the total monitoring area without causing any non-monitored point. SOLUTION: The temperature monitoring device is provided with a mirror 40 that is arranged above a rotary heat exchanger and receives infrared rays and reflects them outward in the radius direction, a lens 42 for condensing reflection infrared rays, and an infrared sensor 43 that receives condensed infrared rays and outputs an infrared intensity signal according to the intensity. The mirror is linearly driven by a motor 57 along the radius direction of the rotary heat exchanger. Also, the temperature monitoring device is provided with a rotary angle sensor 61 for outputting a rotary position signal according to the rotary angle of a rotary shaft 13 of the rotary heat exchanger, an imaging processing device 58 that perform speed regulation drive of the operation of the motor 57 and calculates a position where the mirror is being sent according to the amount of drive, receives the above rotary position signal and the infrared intensity signal, and changing an infrared intensity distribution to an imaging signal, and a display 59 for displaying the infrared intensity distribution by receiving the imaging signal.

45. 发明专利

JPH08278251A MEASURING APPARATUS BY LASER-INDUCED FLUORESCENCE METHOD 失效
公开(公告)号：JPH08278251A
公开(公告)日：1996-10-22
申请号：JP8015095
申请日：1995-04-05
申请人： MITSUBISHI HEAVY IND LTD
发明人： DEGUCHI YOSHIHIRO , NODA SHOHEI
IPC分类号： G01P5/18 , G01N21/64 , G01P13/00
摘要： PURPOSE: To provide an apparatus in which a density and a flow velocity can be measured simultaneously by a laser-induced fluorescence method and in which the flow velocity can be measured two-dimensionally. CONSTITUTION: A measuring apparatus is provided with means 1, 2 which output a dye pulsed laser beam at a wavelength corresponding to an electron energy difference, with a means 3 which branches the laser beam, with two cylindrical lenses 5a, 5b to which a plurality of linear reflection coatings have been executed and with a means 4 by which two striped sheet beams passed through the cylindrical lenses 5a, 5b are incident on a measuring field 12 at different angles. In addition, the measuring apparatus is provided with means 6, 7, 8 by which mesa-shaped light and dark parts formed on the measuring field 12 are measured and with a computing unit 10 by which the density of measured molecules is decided on the basis of the fluorescent intensity of the bright parts out of the measured mesh-shaped bright and dark parts and by which the flow velocity of the measured molecules and their movement direction are found two- dimensionally on the basis of the movement, in terms of time, of the crossing of the dark parts.

46. 发明专利

JPH0882518A SLAG THICKNESS MEASURING APPARATUS 失效
公开(公告)号：JPH0882518A
公开(公告)日：1996-03-26
申请号：JP21862594
申请日：1994-09-13
申请人： MITSUBISHI HEAVY IND LTD
发明人： KURODA MASAHIRO , NODA SHOHEI
IPC分类号： G01B17/02 , G01N29/00 , G01N29/18
摘要： PURPOSE: To achieve a higher accuracy by preventing the generation of a delay echo in an apparatus for measuring the thickness of a slag adhering to an internal wall of a furnace of a combustion furnace. CONSTITUTION: A slag 2 adheres to the furnace interior 10 side of a furnace wall 1, a retarding material 4 with a part thereof on the furnace interior 10 side tapered is inserted into the furnace wall 1 and an ultrasonic wave from an ultrasonic transmitter/receiver 5 is emitted from a probe 3. A part of the transmitted wave 7 of the ultrasonic wave is reflected at an end face 8 on the furnace interior side to generate an end face echo and further passes through the slag 2 to generate a slag surface echo being reflected totally on the furnace interior side surface 9 of the slag. The thickness of the slag 2 is measured from a time interval between both the echoes. But the tapered shape of the retarding material 4 eliminates reflection on the side in the course of the retarding material 4, thereby enabling accurate measurement without eventual generation of a delay echo nor overlapping of the echoes.

47. 发明专利

JPH07234185A POTASSIUM CONCENTRATION MEASURING INSTRUMENT FOR RECOVERY BOILER 失效
公开(公告)号：JPH07234185A
公开(公告)日：1995-09-05
申请号：JP2654794
申请日：1994-02-24
申请人： MITSUBISHI HEAVY IND LTD
发明人： ETSU MIYUKI , NODA SHOHEI
IPC分类号： G01N21/71
摘要： PURPOSE:To contribute to the long-term continuous operation of a recovery boiler by preventing combustion ash from adhering to the economizer, etc., of the collection boiler. CONSTITUTION:One edge of an optical fiber 18 is installed so that light in an oven which is applied to a fiber mirror cylinder installed on the oven wall of a recovery boiler 2 is focused by a focusing lens in side the fiber mirror cylinder to receive flame due to the combustion of a char bed 3 inside the recovery boiler 2. The other edge of the optical fiber 8 is connected to a spectroscope 19 and performs the spectral analysis of light sent from the optical fiber 18 by the spectroscope 19. The result is processed by an operation device 20 to continuously measure the concentration of potassium generated by a char bed 3.

48. 发明专利

JPH07218436A METHOD FOR MEASURING OH CONCENTRATION USING LASER-INDUCED FLUORESCENCE METHOD 失效
公开(公告)号：JPH07218436A
公开(公告)日：1995-08-18
申请号：JP2727194
申请日：1994-01-31
申请人： MITSUBISHI HEAVY IND LTD
发明人： DEGUCHI YOSHIHIRO , NODA SHOHEI
IPC分类号： G01N21/64
摘要： PURPOSE:To measure the OH concentration in a measuring field higher than the atmospheric pressure with high accuracy by matching the wavelength of a laser beam to the absorption band characteristic to OH at the time of starting measurement. CONSTITUTION:At the time of making a laser beam 3 incident to a measuring field 5 higher than the atmospheric pressure, the wavelength of the laser beam is matched to the (2, 0)-band 260-270mm) or (2, 1)-band (280-290mm) of the absorption bands of OH so that the OH concentration in the measuring field can be measured by detecting fluorescence generated by the laser beam. In the bands 260-270mm and 280-290mm, overlapping of absorption lines does not occur, because absorption lines of other molecules, such as O2, etc., scarcely exist. When the field 5 is irradiated with the laser beam 3, the intensity of the beam 3 is little damped, because the quantity of background fluorescence is small and the beam 3 is not absorbed much.

49. 发明专利

JPH0743303A METHOD AND DEVICE FOR CONCENTRATION MEASUREMENT BY LIF 失效
公开(公告)号：JPH0743303A
公开(公告)日：1995-02-14
申请号：JP18995393
申请日：1993-07-30
申请人： MITSUBISHI HEAVY IND LTD
发明人： DEGUCHI YOSHIHIRO , NODA SHOHEI
IPC分类号： G01N21/64
摘要： PURPOSE:To make concentration measurement possible by LIF(laser inductive fluorescence method) even in liquid combustion site, solid combustion site, etc. CONSTITUTION:The first and second pigment lasers 13a and 13b are oscillated by an excitation pulse laser 11, and two laser lights of different wave lengths are outputted with a slight time lag. The two laser lights are, after combination, applied on a measurement field 18 through a beam expander. At this time, two excited to-be-measured molecule and fluorescence occurring from a background part are imaged with two CCD cameras 20a and 20b which are synchronized with the pigment lasers 13a and 13b. At that time, the CCD camera 20a images the background light and fluorescence from the to-be-measured molecule and the other camera 20b images only the background light. By subtracting the output of one CCD camera from that of the other, only the fluorescence emitted from the to-be-measured molecule is extracted, so that two dimensional concentration distribution of the to-be-measured molecule is obtained.

50. 发明专利

JPH0582893B2 失效
公开(公告)号：JPH0582893B2
公开(公告)日：1993-11-22
申请号：JP25610085
申请日：1985-11-15
申请人： MITSUBISHI HEAVY IND LTD , DENGEN KAIHATSU KK , FURUKAWA ELECTRIC CO LTD
发明人： IDE JUICHI , NODA SHOHEI , OKADA MASAMI , OOTAKE KAZUTOMO , HIRAI TAKEO , KIMURA NAOKAZU , TANAKA YOSHIO , UEDA SHIGEHIKO
IPC分类号： G01J5/00 , F23M11/04 , G01J5/10

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