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41. 发明专利

JPH09139816A SCANNER HEAD CARTRIDGE, AND INFORMATION PROCESSING UNIT LOADING THE SCANNER HEAD CARTRIDGE 失效
公开(公告)号：JPH09139816A
公开(公告)日：1997-05-27
申请号：JP23642296
申请日：1996-09-06
申请人： CANON KK
发明人： FUKAZAWA HIDEO , TANAKA HIROYUKI , KIKUCHI SHOJI , ASANO SHINYA , TORIGOE MAKOTO , KANEKO YUICHI , NAKAYA AKIHIKO
IPC分类号： B41J3/44 , B41J2/01 , B41J25/304 , B41J25/34 , H04N1/04
摘要： PROBLEM TO BE SOLVED: To position and load a cartridge to a carriage simply with high accuracy. SOLUTION: The cartridge 10 replaces an ink head cartridge and supported onto a carriage to move the ink head cartridge of an information processing unit recording information onto a recording medium. The cartridge has a lower case 1 containing an optical component required for reading in the interior, an upper case 2 formed to be engaged so as to cover an open face of the lower case 1, and a positioning guide means when the cartridge is inserted to the carriage provided to the upper face of the upper case 2.

42. 发明专利

JPH08300680A CLEANING DEVICE BUILT-IN INK TANK, RECORDING APPARATUS AND CLEANING METHOD OF INK TANK CONNECTION PART 失效
公开(公告)号：JPH08300680A
公开(公告)日：1996-11-19
申请号：JP10960195
申请日：1995-05-08
申请人： CANON KK
发明人： NAGOSHI SHIGEYASU , TORIGOE MAKOTO , TAJIKA HIROSHI , SUGIMOTO HITOSHI
IPC分类号： B41J2/175 , B41J29/17
摘要： PURPOSE: To provide a cleaning device built-in ink tank automatically cleaning the ink tank connection part of a recording apparatus having a recording head and a separable and replaceable ink tank. CONSTITUTION: An ink supply part cleaning member 32a is arranged in an ink supply port 31a and an ink container plug 33 is provided to the deep part of the ink supply port 31a. An ink supply part 36a pierces the ink supply part cleaning member 32a to reach the ink container plug 33 to be further inserted in an ink container 34. The ink supply part cleaning member 32a is constituted of material quality easy to absorb a liquid such as ink. When the ink supply part 36a pierces the ink supply part cleaning member 32a, the ink remaining on the periphery of the ink supply part 36a is absorbed and removed. Since the ink supply part comes into contact with the ink supply part cleaning member 32a in the same way even when an ink tank 31 is detached from a recording head, the ink is absorbed and removed.

43. 发明专利

JPH08132724A INK-JET RECORDING METHOD AND ITS DEVICE 失效
公开(公告)号：JPH08132724A
公开(公告)日：1996-05-28
申请号：JP27322894
申请日：1994-11-08
申请人： CANON KK
发明人： TAJIKA HIROSHI , SUGIMOTO HITOSHI , TORIGOE MAKOTO , NAGOSHI SHIGEYASU
IPC分类号： B41J2/01 , B41J2/015 , B41J29/00 , B41M5/00 , C09D11/00 , C09D11/322 , C09D11/326 , C09D11/328 , C09D11/38
摘要： PURPOSE: To stabilize formation of dots, by a method wherein recording is performed at a time when a printing surface side of a recording medium is under a fixed temperature of at least the melting point of wax particle by making use of dispersion ink produced by dispersing the wax particles into water, a solvernt and additive. CONSTITUTION: Particles produced by kneading and attaching dyes to wax particles are dispersed into a solvent consisting mainly of water and used as ink. Since the dyes are not dissolved directly into the solvent, a coating is free from a fear of sticking, and an image which has more high density and sharpness can be provided by improving density of the coating. Recording is performed when a printing surface side of a recording medium has a fixed temperature of at least the melting point of wax particle. Since the solvent and particles are in coexistence in a form wherein they are separated functionally from each other, at a moment when the ink arrives at the upper part of the recording medium, only the solvent is permeated through the recording medium, a particle component is left behind on the upper part of the recording medium, since formation of the dot is performed stably irrespective of a complicated form of a fiber of the recording medium, formation of a character having few feathering is performed when dispersing ink has been stuck to the recording medium.

44. 发明专利

JPH07329315A LIQUID VOLUME DETECTING METHOD, RECORDER AND INFORMATION PROCESSING SYSTEM APPLIED THE SAME METHOD 失效
公开(公告)号：JPH07329315A
公开(公告)日：1995-12-19
申请号：JP12285094
申请日：1994-06-03
申请人： CANON KK
发明人： TORIGOE MAKOTO , NAGOSHI SHIGEYASU , KATO MASAO
IPC分类号： B41J2/175 , G01F23/28
摘要： PURPOSE:To detect the ink residual amount of an ink tank of different color by a single light source by disposing the source at a predetermined angle to the first surface of a vessel, and providing a photodetector on an optical path of the light to be irradiated from the second surface of the vessel when the liquid volume is zero. CONSTITUTION:Liquid volume detecting means having a photodetector 4 for detecting the wavelength of a light to be irradiated from a light source 3 is provided in an ink tank 1 having an atmosphere communication port 8 at its upper part to supply ink 2 to a recording head 5 via a supply port 7 of an ink jet recorder. In this case, if the incident point of the light to the surface of the tank 1 is higher than the liquid level of the ink 2, the source 3 is so obliquely disposed that an incident angle theta becomes theta>arcsine (1/n) (n: the refractive index of the ink) so as to allow the light to be incident to the first surface and then arrive at the second surface of the tank 1. If the liquid volume is zero, a photodetector 4 such as a CCD, etc., is disposed on the optical path of the light to be irradiated from the second surface of the tank 1.

45. 发明专利

JPH06326000A PROJECTION ALIGNER 失效
公开(公告)号：JPH06326000A
公开(公告)日：1994-11-25
申请号：JP13688693
申请日：1993-05-14
申请人： CANON KK
发明人： TORIGOE MAKOTO , SUZUKI AKIYOSHI
IPC分类号： G02B13/00 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To print a projected pattern image having a stable high resolution by a method wherein a spherical aberration measuring means measures the spherical aberration of a projection optical system and signals derived therefrom are used to control the spherical aberration of the projection optical system so as to control the aberration at a specific value by controlling means. CONSTITUTION:Circuit patterns on a reticle 30 are reduced to a size of 1/5, a reduced image is formed on a wafer 32 on an X-Y-Z stage 34 by a projection optical system 31, and exposure is performed. At this time, the spherical aberration of the projection optical system 31 is measured by spherical aberration measuring means. Based on the amount of this spherical aberration, a pair of optical wedges 43, 44 are driven to change the plate thickness as a parallel plate for a light beam to control the amount of this spherical aberration of the reduction projection lens 31. By such a control of the aberration to a predetermined valve, inclination of pivotal is effectively supported, making it possible to print a projection pattern image having a stable high resolution.

46. 发明专利

JPH065660B2 失效
公开(公告)号：JPH065660B2
公开(公告)日：1994-01-19
申请号：JP220385
申请日：1985-01-11
申请人： CANON KK
发明人： TORIGOE MAKOTO , KONO MICHIO , SUZUKI AKYOSHI
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027

47. 发明专利

JPH0560254B2 失效
公开(公告)号：JPH0560254B2
公开(公告)日：1993-09-01
申请号：JP15534985
申请日：1985-07-15
申请人： CANON KK
发明人： TORIGOE MAKOTO , SATO HIROSHI
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027

48. 发明专利

JPH0542806B2 失效
公开(公告)号：JPH0542806B2
公开(公告)日：1993-06-29
申请号：JP1054484
申请日：1984-01-24
申请人： CANON KK
发明人： TORIGOE MAKOTO , KONO MICHIO , SUZUKI AKYOSHI
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027

49. 发明专利

JPH0545889A PROJECTION TYPE EXPOSURE DEVICE 失效
公开(公告)号：JPH0545889A
公开(公告)日：1993-02-26
申请号：JP22522091
申请日：1991-08-09
申请人： CANON KK
发明人： TORIGOE MAKOTO
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To obtain a projection type exposure device which is suitable for manufacturing a semiconductor device which realizes high accurate TTL automatic focusing by changing 2 illuminating method for TTL automatic focusing according to the change of the using state of a projection optical system when the illuminating method is changed according to the direction or the line width or the like of a pattern form. CONSTITUTION:This device is provided with a projection optical system 31 which projects the image of the circuit pattern of an original plate 30 illuminated by a secondary beam from a secondary radiation source formed by a beam from a radiation source, an irradiation means which projects the image of the pattern of the plate 30 on a reference surface 81 by the optical system 31 while the surface 81 is moved to an optical axis direction in the optical axis direction of the optical system 31 by a holding means, a detection means 53 which detects the image forming state of the pattern on the surface 81 and an optical system whose illumination optical system 12 is constituted so that the form of the secondary radiation source can be changed and which supplies the secondary radiation source whose form can be changed so as to project the image of the secondary radiation source which is almost identical to the image of the secondary radiation source on the pupil of the optical system 31 by the irradiation means.

50. 发明专利

JPH02126629A PRODUCTION ALIGNER 失效
公开(公告)号：JPH02126629A
公开(公告)日：1990-05-15
申请号：JP28068788
申请日：1988-11-07
申请人： CANON KK
发明人： TORIGOE MAKOTO , INE HIDEKI
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
摘要： PURPOSE:To perform focusing in a state that variations of focus because of fluctuations in environmental temperature or atmospheric pressure as well as in oscillation wavelengths of a light source are corrected by measuring heights of respective chips on the face of a wafer with non-sensitizing light of a photoresist and further, by performing focusing of a reference face with an exposure light through a projection optical system after solving problems such as absorption of the photoresist or sensitization. CONSTITUTION:Heights of respective chips or optional chips on a wafer 5 with respect to a reference face 10 located on a wafer chuck 4 are measured by a laser length measuring device 14 that is the first detecting means for the heights in a state that the wafer chuck 4 and the wafer 5 are set on a measuring stage 8 and measured data are memorized in a memory 130. Then the wafer 5 is moved to an exposure stage 6 that is a part of an exposure system while leaving the wafer 5 as it is being attracted by the wafer chuck 4. After that, focusing is performed so that the wafer is positioned on a prescribed face. In such a case, forcusing corresponding to height detection is performed by making use of the reference face 10 with the second detection means 100.

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