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31. 发明专利

JPH0510897A X-RAY PHOTOELECTRON SPECTRAL IMAGING APPARATUS 失效
公开(公告)号：JPH0510897A
公开(公告)日：1993-01-19
申请号：JP16157591
申请日：1991-07-02
申请人： JEOL LTD
发明人： SEKINE SATORU , SHIGEMATSU MINORU , TAZAWA TOYOHIKO
IPC分类号： G01N23/227 , H01J37/285 , H01J49/48
摘要： PURPOSE:To obtain the apparatus using a concentric semispherical type electron energy spectroscope capable of simply obtaining the two-dimensional spectral image of the surface of a sample to be analyzed within a short time. CONSTITUTION:The photoelectron distribution image emitted from a sample S is formed on the incident slit 11 extending in a y-direction of a concentric semispherical type electron energy spectroscope 1 by an input lens system 5 and only the photoelectron passed through the incident slit 11 is spectrally diffracted by the spectroscope 1 to be detected by the multichannel detector 12 arranged at least in the y-direction of the focus surface of the spectroscope. A pair of deflectors 10 capable of deflecting the photoelectron distribution image in an x-direction is arranged in the input lens system and the distribution in the y-direction is simultaneously taken in by a detector and the distribution in the x-direction is successively taken in by the deflection due to a pair of the deflectors 10 to obtain the two-dimensional photoelectron distribution image from the sample.

32. 发明专利

JPH04351839A MASS SPECTROMETER FOR FOCUS ION BEAM 失效
公开(公告)号：JPH04351839A
公开(公告)日：1992-12-07
申请号：JP12603991
申请日：1991-05-29
申请人： KOBE STEEL LTD
发明人： ISHIBASHI KIYOTAKA , INOUE KENICHI , KAWADA YUTAKA
IPC分类号： H01J49/28 , H01J37/05 , H01J49/48
摘要： PURPOSE:To facilitate setting of a small type and an electromagnetic field crossing type by burying a part of an electrode pair having an electrode width that surpasses an ion beam passing region width, in a similar magnetic pole pair, so as to reduce inter-magnetic pole gap and an inter-electrode gap. CONSTITUTION:A magnetic pole 21 and a permanent magnet 22 for magnetizing the magnetic pole are formed in a window, and a vacuum duct 26 is arranged in the center. A part of an electrode 23 is buried in the magnetic pole 21. Electric resistance between each electrode is of MOMEGAunit, and insulation is retained between each electrode 23. A gap is reduced to a large degree to the vacuum duct 26 which is a passing region of ion beam, without sacrificing cross sectional aperture ratio, and cross arrangement of the electrode 23 and the magnetic pole 21 is also carried out with good accuracy.

33. 发明专利

JPH04277460A SUPERPOSED FIELD DEVICE 失效
公开(公告)号：JPH04277460A
公开(公告)日：1992-10-02
申请号：JP6258191
申请日：1991-03-04
申请人： JEOL LTD
发明人： YAMADA TAKAHISA , NAITO NORIHIRO
IPC分类号： G01N27/62 , H01J49/32 , H01J49/48
摘要： PURPOSE:To offer a device, in which the magnetic flux density is enlarged by minimizing they spacing of magnetic pole pieces and with which the mass number to be analyzed on the double convergence condition is increased. CONSTITUTION:No.1 magnetic pole pieces 2a1, 2b1 are furnished between yokes 1a, 1b so as to pinch a pair of non-magnetic members 3a, 3b located oppositely, and are welded with the inside kept at a vacuum. No.2 magnetic pole pieces 2a2, 2b2 are pinched by insulative rings 5a, 5b, ones 7a, 7b, ones 9a, 9b, and ones 10a, 10b to be insulated from the surrounding, and are secured to the top and bottom of electrodes 4a, 4b by screws 8a, 8b and ones 11a, 11b. The distance between the magnetic pole pieces can be shortened by impressing an appropriate potential to the magnetic pole pieces so that they work also as a correction electrode.

34. 发明专利

JPH04242063A ANALYZER FOR MIXED GAS 失效
公开(公告)号：JPH04242063A
公开(公告)日：1992-08-28
申请号：JP9973591
申请日：1991-04-05
申请人： IONENTEHINIKU GMBH
发明人： BUERUNAA RINDEINGAA
IPC分类号： G01N27/62 , H01J49/28 , H01J49/48
摘要： PURPOSE: To selectively convey ions to a reaction chamber after one kind of ions is selected from several kinds of ions simultaneously generated in an ion generator. CONSTITUTION: A mixed gas analyzer comprises an ion generator 1 for generating various kinds of ions, a reaction chamber 2 where components of a mixed gas to be examined react with the ions, and a mass spectrometer 3 for examining reaction products. After one kind of the ions is selected from several kinds of the ions simultaneously generated in the ion generator 1, these ions are selectively conveyed to the reaction chamber 2. In this case, a Wien filter 4 is arranged between the ion generator 1 and the reaction chamber 2 so that the other kind of the ions cannot be conveyed.

35. 发明专利

JPH04233145A ENERGY FILTER 失效
公开(公告)号：JPH04233145A
公开(公告)日：1992-08-21
申请号：JP21935991
申请日：1991-08-06
申请人： PHILIPS NV
发明人： HARARUDO ROOZE
IPC分类号： G21K3/00 , H01J37/05 , H01J49/44 , H01J49/48
摘要： PURPOSE: To heighten the degree of distribution of beams with a charged particle beam device having allowable length without requiring very stable electromagnetic field in order to convert a charged particle beam into a monochromatic beam. CONSTITUTION: An energy selection filter has four hemispherical curved structures for continuously passing charged particle beams to be filtered. The curved structures are symmetrically arranged to a symmeric plane into which an energy selecting element such as a slit or knife edge is introduced. In the charged particle beam device such as a high resolution electron microscope, by only slightly lengthening the device, without introducing any beam deviation, the spread of energy introduced from a beam source can be adjusted so as to reduce to 0.1eV or less for example.

36. 发明专利

JPH0421307B2 失效
公开(公告)号：JPH0421307B2
公开(公告)日：1992-04-09
申请号：JP2213589
申请日：1989-01-30
申请人： SHIMADZU CORP
发明人： DAIMON HIROSHI , INO SHOZO
IPC分类号： H01J49/44 , G01N27/62 , G01Q80/00 , H01J37/05 , H01J37/244 , H01J37/285 , H01J49/48

37. 发明专利

JPH0479138A EXB-TYPE ENERGY FILTER 失效
公开(公告)号：JPH0479138A
公开(公告)日：1992-03-12
申请号：JP19192790
申请日：1990-07-20
申请人： JEOL LTD
发明人： TSUNO KATSUSHIGE
IPC分类号： H01J37/05 , H01J49/48
摘要： PURPOSE:To satisfy imaging codition without astigmatism constantly for an unkown effective filter length by installing a means to apply either positive or negative optional voltage between magnetic poles. CONSTITUTION:Magnetic poles l, 1' which are tilted are connected with a yoke 3 through an electrical insulator 4 and the magnetic poles and the yoke are connected magnetically, and voltage -V2 from an electric power source is applied between the magnetic poles 1, 1'. Working voltage +V1, -V1 from an electric power source 7 is applied between electrodes 2, 2', and if the voltage -V1 applied to said electrode 2' satisfies -V1>-V2, quadrupole components of an electric field are generated and a1 term to obtain images without astigmatism in a Wien filter is obtained. The value of the a1 term is able to be altered from outside by adjusting the voltage to applied to the magnetic poles 1, 1'. The conditions for imaging without astigmatism for an unkown effective filter length are thus satisfied.

38. 发明专利

JPH041462B2 失效
公开(公告)号：JPH041462B2
公开(公告)日：1992-01-13
申请号：JP6510987
申请日：1987-03-19
申请人： NIPPON ELECTRON OPTICS LAB
发明人： TSUNO KATSUSHIGE
IPC分类号： H01J49/20 , G01N27/62 , H01J49/48

39. 发明专利

JPH03266350A EXB TYPE ENERGY FILTER 失效
公开(公告)号：JPH03266350A
公开(公告)日：1991-11-27
申请号：JP6385590
申请日：1990-03-14
申请人： JEOL LTD
发明人： TSUNO KATSUSHIGE , KATO MAKOTO
IPC分类号： H01J37/05 , H01J49/48
摘要： PURPOSE:To satisfy the Wien condition in a wide range around an optical axis by distribute the magnetic and electric fields nearly in the same shape on the surface vertical to the optical axis. CONSTITUTION:The materials forming electric poles 2, 2' use non-magnetic materials such as copper and aluminum as ever, while the materials forming the yokes or pole pieces of magnetic poles 1, 1' use a ferromagnetic material of fully high electric resistance and imperfect insulation such as ferrite. The magnetic poles 1, 1' negligibly influence the electric field, and the magnetic and electric fields both become two-pole structures so that each of the magnetic and electric fields can uniformly distribute around an optical axis Z over a wide range. This easily enables the satisfaction of the Wien condition even in a fringe field.

40. 发明专利

JPH0360151B2 失效
公开(公告)号：JPH0360151B2
公开(公告)日：1991-09-12
申请号：JP171585
申请日：1985-01-09
申请人： KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
发明人： OOSHIMA CHUHEI , ISHIZAWA YOSHIO
IPC分类号： G01N27/62 , H01J49/48

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