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    • 40. 发明专利
    • Method for fabricating vertical device using metal support film
    • 使用金属支持薄膜制造垂直装置的方法
    • JP2014168078A
    • 2014-09-11
    • JP2014081148
    • 2014-04-10
    • Lg Innotek Co Ltdエルジー イノテック カンパニー リミテッド
    • YOO MYUNG CHEOL
    • H01L33/02H01L33/32H01L21/306H01L33/00H01L33/40H01L33/46H01L33/64
    • H01L33/32H01L33/0079H01L33/04H01L33/14H01L33/38H01L33/405H01L33/42H01L33/46H01L33/54H01L33/60H01L33/62H01L33/641
    • PROBLEM TO BE SOLVED: To provide a method for fabricating a semiconductor device such as a GaN LED on an insulation substrate such as a sapphire.SOLUTION: A semiconductor layer 120 is formed on an insulation substrate using usual techniques. A trench defining boundaries of individual devices is preferably formed in the insulation substrate through the semiconductor layer by means of inductive coupling plasma reactive ion etching. A first support structure 200 is attached to the semiconductor layer. The rigid substrate is replaced with a second support structure preferably having conductivity, and the first support structure is removed. Then, the individual devices are diced by etching preferably through the second support structure. A protective photoresist layer 196 can protect the semiconductor layer so that the first support structure does not adhere. A lower contact 192 having conductivity (in some cases, reflectivity) may be inserted between the second support structure and the semiconductor layer.
    • 要解决的问题:提供在诸如蓝宝石的绝缘基板上制造诸如GaN LED的半导体器件的方法。解决方案:使用常规技术在绝缘基板上形成半导体层120。 通过电感耦合等离子体反应离子蚀刻,优选通过半导体层在绝缘衬底中形成限定各个器件的界限的沟槽。 第一支撑结构200附接到半导体层。 刚性基板被优选地具有导电性的第二支撑结构代替,并且去除第一支撑结构。 然后,通过优选通过第二支撑结构的蚀刻来切割各个装置。 保护光致抗蚀剂层196可以保护半导体层,使得第一支撑结构不粘附。 可以在第二支撑结构和半导体层之间插入具有导电性的下接触192(在一些情况下为反射率)。