会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 39. 发明专利
    • Probe
    • 探测
    • JP2011242377A
    • 2011-12-01
    • JP2010129386
    • 2010-05-19
    • Kimoto Gunsei軍生 木本
    • KIMOTO ISAO
    • G01R1/067G01R31/26H01L21/66
    • G01R1/06727G01R1/06733
    • PROBLEM TO BE SOLVED: To provide a probe capable of securing large overdrive and minutely controlling scrubbing amount.SOLUTION: This probe comprises a first deforming section which includes a linkage mechanism formed of a vertically extending vertical probe, and a plurality of horizontal beams which extend in a direction perpendicular to the vertical direction, and are connected to a fixed end at one ends and to the vertical probe at the other ends. In this probe, a vertically extended section of the vertical probe extending from the horizontal beams forms a second deforming section which includes a horizontal beam portion extending toward the fixed end from a substantial center of the vertical length of the vertically extended section; and, with the overdrive, bending moment is simultaneously applied to the horizontal beam portion of the second deforming section in a direction of offsetting bending moment applied to the vertical probe of the first deforming section, so that the scrubbing amount of the vertical probe can be minutely controlled in the whole operating range of the overdrive.
    • 要解决的问题:提供能够确保大的过驱动和精细控制洗涤量的探针。 解决方案:该探头包括第一变形部分,其包括由垂直延伸的垂直探针形成的连杆机构和沿垂直于垂直方向延伸的多个水平梁,并且连接到固定端 一端和另一端的垂直探头。 在该探针中,垂直探测器的从水平光束延伸的垂直延伸部分形成第二变形部分,该第二变形部分包括从垂直延伸部分的垂直长度的大致中心向固定端延伸的水平光束部分; 并且通过过驱动,弯曲力矩在施加到第一变形部的垂直探针的偏移弯矩的方向上同时施加到第二变形部的水平梁部,使得垂直探针的洗涤量可以 在超速运行的整个运行范围内进行微调。 版权所有(C)2012,JPO&INPIT