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31. 发明专利

JPH0590886A SURFACE ACOUSTIC WAVE ELEMENT 失效
公开(公告)号：JPH0590886A
公开(公告)日：1993-04-09
申请号：JP24802491
申请日：1991-09-26
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： NAKAHATA HIDEAKI , SHIKADA SHINICHI , YAGOU AKIHIRO , FUJIMORI NAOHARU
IPC分类号： H03H9/25
摘要： PURPOSE:To reduce the propagation loss of surface acoustic wave by using polycrystal diamond film whose surface grain diameter is less than a predetermined value. CONSTITUTION:A polycrystal diamond film 22, a tandem type electrode 23, a ZnO film 24, and so on are laminated on a Si substrate 21 to form a surface acoustic wave element 5. This film 22 is formed of polycrystal fine grain diamond film, whose surface grain diameter is predetermined to be smaller than 1/5 of the elastic wave length. This fine grain diameter reduces the influence of grain boundary scattering, whereby scattering of surface acoustic wave can be radically reduced due to the grain boundary, and whereby the propagation loss can be reduced.

32. 发明专利

JPH0590872A SURFACE ACOUSTIC WAVE ELEMENT 失效
公开(公告)号：JPH0590872A
公开(公告)日：1993-04-09
申请号：JP24974791
申请日：1991-09-27
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： SHIKADA SHINICHI , NAKAHATA HIDEAKI , YAGOU AKIHIRO , FUJIMORI NAOHARU
IPC分类号： H03H9/145 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/25
摘要： PURPOSE:To obtain a surface acoustic wave element that has a sufficiently guaranteed reliability and that does not required the use of package for covering the surface of the element. CONSTITUTION:The present surface acoustic wave element is provided with a pair of tandem type electrodes 2a and 2b laid opposite to each other and a piezoelectric body 4 having at least a section between the pair of tandem type electrodes 2a and 2b where surface acoustic wave is propagated. This piezoelectric body 4, in addition to the section where surface acoustic wave is propagated, is provided with an air bridge 13 that covers at least the pair of interdigital electrodes 2a and 2b to form surface acoustic wave element 20.

33. 发明专利

JPH0548383A SURFACE ACOUSTIC WAVE ELEMENT AND ITS MANUFACTURE 失效
公开(公告)号：JPH0548383A
公开(公告)日：1993-02-26
申请号：JP19905291
申请日：1991-08-08
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： YAGOU AKIHIRO , FUJIMORI NAOHARU , IMAI TAKAHIRO , NAKAHATA HIDEAKI
IPC分类号： H03H3/08 , H03H9/145 , H03H9/25
摘要： PURPOSE:To obtain the surface acoustic wave element operated at a high frequency region without polishment by forming a dielectric thin film so that its growing-finished face forms an outer face thereby increasing the sound velocity more than the sound velocity of the piezoelectric substance. CONSTITUTION:A finished face of a dielectric thin film 2 in the surface acoustic wave element comprising a piezoelectric substrate 1, a comb-shaped electrode 3 and the thin film 2 forms an outer face of the surface acoustic wave element. The comb-shaped electrode 3 is formed on the surface of the substrate 1, and the dielectric thin film 2 whose sound velocity is faster than that of the piezoelectric body is formed on the electrode 3. Then the border face between the piezoelectric substrate 1 and the dielectric thin film 2 is smooth and does not require polishment. Furthermore, the dielectric thin film 2 is made of a diamond using a gas from which halogen atoms are supplied and a chemical compound including hydrogen atoms and the film is formed even at a low temperature or at a high temperature. Then the thin film 2 whose polishment is difficult and having a high sound velocity does not need polishment, and the surface acoustic wave element operated at a high frequency region without use of the film forming substrate is realized.

34. 发明专利

JPH059512B2 失效
公开(公告)号：JPH059512B2
公开(公告)日：1993-02-05
申请号：JP448585
申请日：1985-01-14
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： FUJIMORI NAOHARU , IMAI TAKAHIRO , HARADA KEIZO , YOSHIOKA TAKESHI , DOI AKIRA
IPC分类号： C23C16/30 , B23B27/14 , B32B9/00 , C23C16/24 , C23C16/26 , C23C16/27

35. 发明专利

JPH0519126A OPTICAL FILTER HAVING PERIODIC STRUCTURE 失效
公开(公告)号：JPH0519126A
公开(公告)日：1993-01-29
申请号：JP17267491
申请日：1991-07-12
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： YAGOU AKIHIRO , FUJIMORI NAOHARU
IPC分类号： G02B5/28 , G02B6/00 , G02B6/12
摘要： PURPOSE:To provide an optical filter having a periodic structure which is an element taking out only the light of specified frequency ranging from IR to near-UV. CONSTITUTION:This optical filter consists of an insulating diamond layer 1 or is formed by laminating a substance 3 having a lower refractive index than diamond on the diamond layer 1, and the refractive index of the surface is periodically changed. The single-crystal or polycrystal natural or synthetic diamond and insulating and semiconducting diamond are used as the diamond. This filter takes out only the light of specified frequency ranging from IR to near-UV. Meanwhile, since the refractive index difference and the periodic length of the refractive index change are increased, its accuracy is enhanced.

36. 发明专利

JPH04365853A FORMATION OF COMPOSITE OXIDE SUPERCONDUCTING THIN FILM 失效
公开(公告)号：JPH04365853A
公开(公告)日：1992-12-17
申请号：JP16780491
申请日：1991-06-12
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： NAGAISHI RYUKI , OTA YUKIHIRO , FUJIMORI NAOHARU
IPC分类号： C23C14/08 , C23C14/06 , C23C14/24 , C23C14/28 , C30B29/22 , H01B12/06 , H01L39/24
摘要： PURPOSE:To allow the execution of a film forming process at a lower temp. by arranging an electrode between a substrate and a target and executing a laser vapor deposition treatment while impressing a bias voltage between this electrode and the target as another electrode. CONSTITUTION:The substrate 1, the target 3 and the electrode 5 formed with metallic meshes are placed in a vacuum chamber 6. The target 3 is irradiated via a condenser lens 8 with the laser beam generated by a laser generator 7. The electrode 5 is placed in the position enclosing the bloom generated from the target 3 toward the substrate 1. The cathode of a bias power source 5a is connected to the target 3 and the anode to the electrode 5. The superconduction critical temp. of the sample formed by the specific impressed voltage increases if the laser vapor deposition is executed by changing the impressed bias power voltage. The execution of the film forming process at the lower temp. is executed and the film having the excellent film characteristics and superconductive characteristics is formed.

37. 发明专利

JPH04358410A SURFACE ACOUSTIC WAVE ELEMENT AND PRODUCTION THEREOF 失效
公开(公告)号：JPH04358410A
公开(公告)日：1992-12-11
申请号：JP13423991
申请日：1991-06-05
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： IMAI TAKAHIRO , NAKAHATA HIDEAKI , YAGOU AKIHIRO , FUJIMORI NAOHARU
IPC分类号： H03H3/08 , H03H9/02 , H03H9/25
摘要： PURPOSE:To easily produce a surface acoustic wave element that is available even in a high frequency area by composing a diamond layer on a substrate by a vapor-phase growth process and providing a piezoelectric layer and an electrode on the surface of the diamond layer at the side touching the substrate after eliminating the substrate. CONSTITUTION:A diamond film is grown on a base material with 40mum thickness, for example, by a thermal filament CVD process. Then Si of the base materialis dissolved away by fluoronitric acid. A piezoelectric layer 3 and an inter digital electrode are vapor-deposited with Al on the interface where the diamond film eliminated the Si has been brought into contact with the Si. Thus two pairs of interdigital electrodes 4 are obtained by the ordinary photolithography. Then a ZnO film is formed by an RF magnetron sputtering process with 2.5mum thickness for example. Thus it is possible to obtain a surface acoustic wave element of a GHz band that can improve the sigma value of an X-ray rocking curve, the electric resistivity and the maximum resonance frequency.

38. 发明专利

JPH04311565A FORMATION OF MULTIPLE OXIDE SUPERCONDUCTING THIN FILM 失效
公开(公告)号：JPH04311565A
公开(公告)日：1992-11-04
申请号：JP10465491
申请日：1991-04-10
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： NAGAISHI RYUKI , OTA YUKIHIRO , FUJIMORI NAOHARU
IPC分类号： C04B41/87 , C01G1/00 , C23C14/34 , C23C14/46 , H01L21/268 , H01L39/24
摘要： PURPOSE:To form a high-quality multiple oxide superconducting thin film at a low temp. by impressing a magnetic field traversing between a target and a substrate and applying laser vapor deposition to the substrate in the presence of ECR plasma. CONSTITUTION:A magnetic field traversing between a substrate 2 and a target 4 is generated in a vacuum vessel 1 by a couple of ring magnets 6a and 6b. Under such conditions, a microwave of the same frequency as the cyclotron frequency of the electron from a microwave guide 7 is injected in parallel with the magnetic field, and high-density plasma is produced by the cyclotronic movement of the electron and the resonance with the microwave. The target 4 is then irradiated with a laser beam from a laser 9 through a transparent window 1a. At this time, the oxygen partial pressure when the film is formed is preferably controlled to about 10 -10 Torr and the microwave power to be impressed to >= about 50W. A high-quality multiple oxide superconducting thin film is formed on the substrate 2 in this way with good reproducibility.

39. 发明专利

JPH04238895A DIAMOND FILM AND ITS PRODUCTION 失效
公开(公告)号：JPH04238895A
公开(公告)日：1992-08-26
申请号：JP1238091
申请日：1991-01-10
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： CHIKUNO TAKASHI , NISHIBAYASHI YOSHIKI , IMAI TAKAHIRO , FUJIMORI NAOHARU
IPC分类号： C30B29/04 , H01L21/205
摘要： PURPOSE:To provide a practical n type diamond film, excellent in crystallinity and having a shallow level and a method for synthesizing the aforementioned diamond film. CONSTITUTION:A signal crystal or polycrystal diamond film is grown on diamond or other substrates and characterized in that 1 to 1000ppm nitrogen and phosphorus or sulfur in an amount of 0.1 to 50% based on the nitrogen content are doped. The aforementioned diamond film can effectively be produced by using a single or mixed gas capable of feeding carbon, nitrogen and phosphorus or sulfur corresponding to the amounts of doping and hydroden and, as necessary, a halogen element as a raw material and carrying out vapor synthesis.

40. 发明专利

JPH04223807A POLYCRYSTAL DIAMOND TOOL AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH04223807A
公开(公告)日：1992-08-13
申请号：JP8151491
申请日：1991-03-19
申请人： SUMITOMO ELECTRIC INDUSTRIES
发明人： TANABE KEIICHIRO , FUJIMORI NAOHARU
IPC分类号： B23B27/14 , B23B27/20 , B23P15/28 , C23C16/26 , C23C16/27
摘要： PURPOSE:To enhance wear resistance and deficiency resistance by providing complementarity in the thickness direction of a diamond film, and forming a rake face of a non-diamond component or film quality of little defectiveness while inversely toughness is increased in a base material face side. CONSTITUTION:A diamond film 2 is blazed at a cutting edge face of a tool base material 1 via a fitting-fixing layer 3 to constitute a polycrystal diamond tool. The polycrystal diamond film 2 is 40mum or more in film thickness and is provided with complementarity by varying diamond film quality in the thickness direction. A rake face is formed of a non-diamond component or film quality of little defectiveness by means of a filament CVD method, microwave plasma CVD method, thermal CVD method, thermal plasma CVD method and the like or a combination thereof so as to enhance individual crystalline quality. Inversely a base material face side is increased in toughness and is fixed to the base material 1 via a metallized layer 8.

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