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31. 发明专利

JP2002071719A PROBE CARD AND PRODUCTION METHOD THEREOF 失效
公开(公告)号：JP2002071719A
公开(公告)日：2002-03-12
申请号：JP2000266294
申请日：2000-09-01
申请人： KOBE STEEL LTD , GENESIS TECHNOLOGY KK
发明人： HIRANO TAKAYUKI , GOTO YASUSHI , YONEDA YASUSHI , KATSUMI KUNIO
IPC分类号： G01R31/26 , G01R1/073 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a probe card which enables measuring of electric performance of a semiconductor device having a number of electrodes arranged at a higher density by a fast signal and is made highly practicable with a sufficient stroke and a scrubbing function, and a production method thereof which enables production of the probe card with a higher machining accuracy without reguiring a microscopic assemling work. SOLUTION: The probe card is constituted of a base material 1, a wiring part 2 and an extended wiring part 3. The wiring part 2 is formed in a shape of a cantilever beam. The wiring part 2 is provided with a fixing part 11 for fixing it on a substrate 6, an intermediate part 10a erected from the fixing part 11, a protruded support 10 for supporting a probe 9 following the intermediate part 10a and the probe 9 which is brought into contact with an electrode of a semiconductor device to be measured, thereby allowing the probe 9 to have a sufficient stroke and a scrubbing mechanism.

32. 发明专利

JP2001066121A SURFACE SHAPE MEASURING DEVICE 失效
公开(公告)号：JP2001066121A
公开(公告)日：2001-03-16
申请号：JP23927799
申请日：1999-08-26
申请人： KOBE STEEL LTD
发明人： TAKAHASHI EIJI , MORIMOTO TSUTOMU , TAKAMATSU HIROYUKI , YONEDA YASUSHI
IPC分类号： G01B9/02 , G01B11/24
摘要： PROBLEM TO BE SOLVED: To measure the surface shape of a large-sized measuring object at high speed with a simple and low-cost formation, by providing optical interference measuring means on each partial region, and by installing the optical interference measuring means fixedly relative to the placed position of the measuring object. SOLUTION: Parallel light outputted from a light source 1 is trisected by a mirror 2, and enlarged by a floodlight lens system 3, and thereafter irradiated toward a measuring object P. A part of parallel light irradiated from the floodlight lens system 3 is transmitted through a reference plane 4 and reflected on the back the measuring object P, and two kinds of parallel light having different optical lengths is synthesized again, and interference fringes are generated at that time. Synthesized reflected light is reduced by a light-receiving lens system 5 and thereafter reaches a light-receiving part 7 through a mirror 6, and the interference fringes are observed thereon. This measuring device Z1 has only one light-receiving part 7, therefore at the time of actual measurement, an illumination switching means, such as a shutter or the like, is installed, for example, on a part of the floodlight lens system 3, and measurement of each partial region is executed successively.

33. 发明专利

JPH11258183A INSPECTION APPARATUS FOR SEAL PART 失效
公开(公告)号：JPH11258183A
公开(公告)日：1999-09-24
申请号：JP5635198
申请日：1998-03-09
申请人： KOBE STEEL LTD
发明人： AKAMATSU MASARU , YONEDA YASUSHI , MAEDA SHIZUO , MIZOKAWA TAKUMI
IPC分类号： G01N21/90
摘要： PROBLEM TO BE SOLVED: To obtain an inspection apparatus by which the seal part of a packaging bag can be inspected stably and with high precision. SOLUTION: An inspection apparatus inspects the seal part 1a of a retort pack 1 which is sealed so as to house its contents in a sealed-up state. The inspection apparatus is provided with a suction panel 9 which sucks the rear surface of the seal part 1a of the retort pack 1 and which corrects the seal part 1 to be a flat shape, with a first pressure member 12 which presses the seal part 1a of the retort pack 1 from its surface and which is brought into contact with the suction panel 9 so as to be then retreated, with a camera 19 which photographs the surface of the seal part 1a sucked by the suction panel 9 and with a control device 20 which judges the existence of a flaw in the seal part 1a on the basis of a photographed image which is photographed after the first pressure member 12 is retreated.

34. 发明专利

JPH10104671A PATTERN RECOGNITION SYSTEM USING MULTIPLE CORRELATION 失效
公开(公告)号：JPH10104671A
公开(公告)日：1998-04-24
申请号：JP25485896
申请日：1996-09-26
申请人： AGENCY IND SCIENCE TECHN , OSAKA KAGAKU GIJUTSU CENTER , SEIKO INSTR INC , SUMITOMO OSAKA CEMENT CO LTD , KUBOTA KK , KOBE STEEL LTD , SANYO ELECTRIC CO , SHARP KK , ICHIOKA YOSHIKI , NISHIHARA HIROSHI , NISHIDA NOBUO
发明人： MATSUOKA KATSUNORI , IWAKI TADAO , KASAMA NOBUYUKI , TAKEI TOSHIJI , YAMAMOTO MASAMI , YONEDA YASUSHI , MATSUMOTO MITSUHARU , KATO HIROMI , ICHIOKA YOSHIKI , NISHIHARA HIROSHI , NISHIDA NOBUO
IPC分类号： G02F3/00 , G06T1/00
摘要： PROBLEM TO BE SOLVED: To provide an optical information processing system which performs pattern recognition precisely at a high speed and an image parallel light input device which can store input image information in a semiconductor storage element in a short time. SOLUTION: This system is equipped with a reflection type image input means 5 which stores an input image of the optical information processing system for pattern recognition and reflects 1st read light, a split irradiating means which emits the 1st read light in the opposite direction from the direction where the input image is inputted and converges it on the input means 5 through a Fourier transforming lens 3, a means which performs multiple correlation operation between the input image included in the 1st read light that is reflected by the input means and travels through the Fourier transforming lens 3 and a discrimination pattern, a correlation image composing means which composes one discrimination pattern image of multiple correlative images included in 2nd read light that travels in the opposite direction from the direction of the correlation operation and is transmitted through the said Fourier transforming lens, and an optical detecting means 9 which stores the composite discrimination pattern image in a semiconductor storage element.

35. 发明专利

JPH03265815A PLOTTING DEVICE USING LASER BEAM 失效
公开(公告)号：JPH03265815A
公开(公告)日：1991-11-26
申请号：JP6428690
申请日：1990-03-16
申请人： KOBE STEEL LTD
发明人： HATTORI SHUZO , HANE KAZUHIRO , NISHIMOTO YOSHIRO , SUZUKI AKIO , JIN YASUHARU , YONEDA YASUSHI , TAKAMATSU HIROYUKI , NISHIKAWA KOHEI
IPC分类号： G02B26/10 , G03H1/08 , H01L21/027
摘要： PURPOSE:To make plotting line width and the extent of exposure uniform, and to improve the plotting accuracy by reflecting a scanning position, and the projection intensity, spot size, and scanning speed of a laser beam upon intensity modulation control over the laser beam. CONSTITUTION:The scanning position, and the projection intensity and spot size of the laser beam are detected by a scanning position detecting means 8, and a projection intensity detecting means 9 and a spot size detecting means 4, and the scanning speed is calculated by the scanning speed arithmetic means in a signal processing part 10. The control means in the signal processing part 10 adjusts the gain and timing of modulation by an optical modulation 2 according to the detection results and arithmetic result, so the intensity variation, scanning speed variation, and spot size variation of the laser beam are reflected on plotting control. Consequently, the plotting line width comes to uniform, the extent of exposure also becomes uniform, and the plotting accuracy is improved.

36. 发明专利

JPH0346047B2 失效
公开(公告)号：JPH0346047B2
公开(公告)日：1991-07-15
申请号：JP303485
申请日：1985-01-10
申请人： KOBE STEEL LTD
发明人： MORIKAWA SATORU , YONEDA YASUSHI , AOKI TAICHI
IPC分类号： G01B11/08 , G01B21/10

37. 发明专利

JPH0368805A CURVATURE MEASURING APPARATUS 失效
公开(公告)号：JPH0368805A
公开(公告)日：1991-03-25
申请号：JP20462989
申请日：1989-08-09
申请人： KOBE STEEL LTD
发明人： ONISHI YOSHIHIKO , NAKAGAMI AKIMITSU , TACHIBANA HIROYUKI , INOUE TAKAYOSHI , NAKAI YASUHIDE , NISHIMOTO YOSHIRO , YONEDA YASUSHI , IMAOKA SHINICHI
IPC分类号： G01B11/24 , G01B11/255
摘要： PURPOSE:To make it possible to measure the curvature of a body under test without scanning driving and switching of a light source by obtaining an output current value which is proportional to the incident position of reflected light from the end part of an optoelectronic transducer and an output current value which is proportional to the square of the incident position with the optoelectronic transducer, and performing operation based on the output current values. CONSTITUTION:A light beam L from a light source 1 is projected on the surface of a body under test 4. The reflected light R is guided to a DIP sensor as an optoelectronic transducer. The DIP sensor 5 is formed as a photodiode comprising three layers. An output which is proportional to a distance X from the left end part of the DIP sensor and an output which is proportional to the root-mean square value of the distance X are obtained based on current values i1 - i3 which are detected at three optoelectronic transducer planes 5a - 5c. The dispersion of the reflected light R which is inputted into the DIP sensor 5 is computed in an operating part 6 based on the outputs. The curvature of the surface of the body under test 4 is operated based on the dispersion. Therefore the scanning driving and the switching of the light source of the apparatus are not required, and the curvature can be measured readily in a short time.

38. 发明专利

JPS63279147A SURFACE DEFECT INSPECTOR 失效
公开(公告)号：JPS63279147A
公开(公告)日：1988-11-16
申请号：JP11394587
申请日：1987-05-11
申请人： KOBE STEEL LTD
发明人： NAKAI YASUHIDE , NISHIMOTO YOSHIRO , YONEDA YASUSHI , ARAI AKIO
IPC分类号： G01B11/30 , G01N21/88 , G01N21/95 , G11B5/84
摘要： PURPOSE:To achieve a highly accurate measurement of a surface roughness eliminating effect due to vibration of an object to be inspected, by detecting several reflected beams of beams irradiating different positions of the surface of an object to be inspected from several light sources to determine a distance therebetween. CONSTITUTION:Two laser beams L1 and L2 from a laser light source are made to irradiate vertical to the surface of an object 2 to be inspected such as magnetic disc through a polarized beam splitter 1 at an interval of a distance l. Reflected beams R1 and R2 on the surface of the object 2 being inspected of the beams L1 and L2 are reflected with the splitter 1 to be incident respectively into brightness position detectors 3a and 3b such as PSD. Then, the reflected beam R1 is checked to deviate in the incident position from a reflected beam R01 with no deffect due to a defect on the surface of the object 2 being inspected, hence detecting a surface defect. Thus, a difference between the positional deviation thus obtained and that of the other reflected beam R2 is detected with a comparator 4, thereby enabling the removal of effect due to vibration of the object 2 being inspected.

39. 发明专利

JPS63103952A SURFACE DEFECT DETECTING METHOD 失效
公开(公告)号：JPS63103952A
公开(公告)日：1988-05-09
申请号：JP25039786
申请日：1986-10-20
申请人： KOBE STEEL LTD
发明人： MORIYAMA TAKASHI , NAKAI YASUHIDE , NISHIMOTO YOSHIRO , YONEDA YASUSHI , TAKAMATSU HIROYUKI
IPC分类号： G01N21/88 , G01N21/95 , G01N21/956
摘要： PURPOSE:To accurately identify the kind of a defect, etc., at a high speed with small memory capacity by finding specific index data as the index of the distribution state of photodetection data in a unit area and performing defect detection on the basis of the data. CONSTITUTION:The surface 2 of a body 1 to be inspected is irradiated with irradiation light L from a light source 3. A photodetecting deice 6 equipped with a lens 4 and a photodetecting element 5 converts the reflected optical image of the object surface 2 into electric photodetecting signals of respective picture elements, which are transferred to a photodetection signal processor 7. Then the photodetection signal processor 7 divides the range of the image on the object surface 2 into an array of unit areas consisting of a set of a specific number of picture elements and finds specific index data as the index of the distribution state of photodetection data in each unit area on the basis of photodetection data on picture elements belonging to the unit area. Thus, a defect present on the object surface 2 is detected on the basis of respective index data of those unit area.

40. 发明专利

JPS6321541A SURFACE DEFECT INSPECTION 失效
公开(公告)号：JPS6321541A
公开(公告)日：1988-01-29
申请号：JP16650286
申请日：1986-07-14
申请人： KOBE STEEL LTD
发明人： YONEDA YASUSHI , NAKAI YASUHIDE , NISHIMOTO YOSHIRO , MORIYAMA TAKASHI , MANABE TOMOTAKA , MIZUGUCHI OSAMU , HASEGAWA ICHIJI
IPC分类号： H01L21/66 , G01N21/88 , G01N21/93 , G01N21/95 , G01N21/956
摘要： PURPOSE:To determine the correspondence between a defect detection data obtained and positions of defects on the surface of a rotating object to be inspected easily, by detecting the angle of rotation of the object being inspected at the start of inspection and at the end thereof to make an angular correction based thereon. CONSTITUTION:An object 5 to be inspected such as original magnetic disc panel is placed on a turntable 4 to be rotated with rotary motor 3 installed on a slide table 6 and the table 6 is moved horizontally in translation with a motor 7. The surface of the object 5 being inspected is irradiated with a light beam 8 and a detector 9 is arranged to detect a surface defect of the object 5 being inspected from the reflected light or the like thereof. With the rotary translation of the tables 4 and 6, a rotary detection pulse is outputted to an arithmetic control section 12 from a rotary encoder 10. The control section 12 converts counts of the detection pulse into the angle of rotation to be memorized into a memory 12b and a data from the detector 9 is compared with a specified reference value to detect a surface defect. An angular correction is performed according to a difference between the angle of rotation at the start of inspection and that at the end thereof to determine the correspondence between the detection data and the position of a defect.

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