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31. 发明专利

JP2001093459A SCANNING TRANSMISSION TYPE ELECTRON MICROSCOPE 失效
公开(公告)号：JP2001093459A
公开(公告)日：2001-04-06
申请号：JP26735599
申请日：1999-09-21
申请人： HITACHI LTD
发明人： UEDA KAZUHIRO , KAJI KAZUTOSHI , AOYAMA TAKASHI , TAYA TOSHIMICHI , ISAGOZAWA SHIGETO
IPC分类号： H01J37/22 , H01J37/147 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning transmission type electron microscope which can get a mapping image of an element at real time without discrepancy in energy near the field of vision and without cutting of the field of vision even at a low magnification. SOLUTION: In a scanning transmission type electron microscope comprising an electron beam source 1, a scanning coil 3, an object lens 4, an image focus lens 8, an electronic spectral equipment 11, an energy slit 14, and a mapping detector 15, a swing-back coil 7 is provided so as to scan the electron beam by the scanning coil 3. Therefore, a moving amount 19 of an electron beam which appears in the electron beam at a position of the energy slit 14 is set off and decreased by a deflection of the electron beam owing to the swing-back coil 7, computations of outputs of the mapping detector 15 are executed one after another in synchronism with the scanning of the electron beam by the scanning coil 3, then displayed as pictures. Therefore, decrease in an energy drift of spectrum accompanied by a scanning of the electron beam becomes small when getting a mapping image of an element of a low magnification at real time, and discrepancy in energy of the mapping image of the element and restriction of the field of vision can be prevented.

32. 发明专利

JP2000097883A LAMINATE STRUCTURE INSPECTING METHOD, DEPOSITION CONTROLLING METHOD, DEPOSITION DEVICE, AND MAGNETIC RECORDING REPRODUCING DEVICE 失效
公开(公告)号：JP2000097883A
公开(公告)日：2000-04-07
申请号：JP27116098
申请日：1998-09-25
申请人： HITACHI LTD
发明人： HIRANO TATSUMI , USAMI KATSUHISA , HOSHIYA HIROYUKI , IMAGAWA TAKAO , UEDA KAZUHIRO
IPC分类号： G11B5/39 , G01B15/02 , G01N23/207 , G01R33/09 , G21K1/06
摘要： PROBLEM TO BE SOLVED: To provide a laminate structure inspecting method to allow highly precise laminate structure evaluation using X-rays of two or more of wave lengths. SOLUTION: At least two kinds out of Kβ rays of two or more of elements constituting a laminate are used as X-rays incident into the laminate, in a laminate structure inspecting method wherein the X-rays are incident with low angles θ into the laminate with two or more layers of thin films formed on a substrate, X-ray reflectances from the laminate are measured, and the reflectances are analyzed to inspect layer structure of the laminate. The reflectances are measured using two kinds of wave lengths λ1, λ2 as X-ray wave lengths, the angles θ in the respective reflectances are converted into scattered spectra levels (q) (=4π sin θ/λ), then, the (q) dependency of reflectance ratio relating to the same level (q) is calculated, and the dependency is optimized to inspect the layer structure of the laminate.

33. 发明专利

JPH07134133A SCANNING TYPE PROBE MICROSCOPE 失效
公开(公告)号：JPH07134133A
公开(公告)日：1995-05-23
申请号：JP28331093
申请日：1993-11-12
申请人： HITACHI LTD
发明人： UEDA KAZUHIRO
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/04 , G01Q60/10 , G01Q60/24 , G01Q90/00 , H01J37/28 , H01L21/66 , H04R17/00
摘要： PURPOSE:To provide a scanning type probe microscope allowing the wide range observation and high resolution observation of a sample without changing a head. CONSTITUTION:The three-dimensional actuator of a scanning probe microscope has a laminated structure consisting of a relatively thin cylindrical piezoelectric element 1 for high resolution and a relatively thick piezoelectric element 2 for wide range scanning. When a sample is observed in a wide range, the scanning is carried out by use of the piezoelectric element 2 for wide range scanning, and when an atomic image is observed, the scanning is carried out by use of the cylindrical piezoelectric element 1 for high resolution, whereby the wide range observation of the sample and the observation of the atomic image can be performed without changing a power source for controlling the piezoelectric element, or replacing a head.

34. 发明专利

JPH06260125A ELECTRON MICROSCOPE WITH SPECIMEN COOLING DEVICE 失效
公开(公告)号：JPH06260125A
公开(公告)日：1994-09-16
申请号：JP4238993
申请日：1993-03-03
申请人： HITACHI LTD , HITACHI INSTRUMENTS ENG
发明人： UEDA KAZUHIRO , YAMADA MITSUHIKO
IPC分类号： H01J37/20
摘要： PURPOSE:To provide a specimen cooling device for an electron microscope which can keep stably the specimen cooling temp. from the room temp. to -30 deg.C. CONSTITUTION:A Peltier element 6 is held in a specimen stage 4, and a specimen 1 is cooled through a cupper-mesh wire 3. The heat generated at this time is released to the atmosphere by the use of fins 17 and/or a cooling water pipe 8, the cooling of specimen from the room temp. to -30 deg.C is made stably. The resultant specimen cooling device for electron microscope can effectively release the heat generated on the high temp. side of the Peltier element compared with the conventional arts, and the specimen cooling from the room temp. to -30 deg.C can be performed stably.

35. 发明专利

JP2004289144A Magnetic sensor and magnetic recording and reproducing device 审中-公开
公开(公告)号：JP2004289144A
公开(公告)日：2004-10-14
申请号：JP2004061532
申请日：2004-03-05
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： UEDA KAZUHIRO , HIRANO TATSUMI
IPC分类号： G11B5/39 , H01F10/13 , H01F10/16 , H01F10/32 , H01L43/08 , H01L43/10
摘要： PROBLEM TO BE SOLVED: To provide a magnetic sensor using a soft magnetic free layer sensitive to external magnetic field and a magnetic recording and reproducing device carrying the same.
SOLUTION: The magnetic sensor has a spin valve film structure detecting a magnetic signal recorded on a magnetic recording medium. An oxide film layer or an amorphous layer is inserted into the spin valve film. An angle made by the direction or of a crystal constituting the soft magnetism free layer above the oxide layer or the amorphous layer, and the direction that the spin valve film is laminated, is in the range of ±5°. Average crystal particle diameter perpendicular to the direction that the crystal of the soft magnetism free layer are laminated, is in the range of 1 to 15 nm.
COPYRIGHT: (C)2005,JPO&NCIPI

36. 发明专利

JP2004265879A Element mapping device, scanning transmission electron microscope, and element mapping method 有权
公开(公告)号：JP2004265879A
公开(公告)日：2004-09-24
申请号：JP2004153192
申请日：2004-05-24
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KAJI KAZUTOSHI , UEDA KAZUHIRO , KIMOTO KOJI , AOYAMA TAKASHI , TAYA TOSHIMICHI , ISAGOZAWA SHIGETO
IPC分类号： G01B15/02 , G01N23/04 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide an element mapping device whereby an element mapping image can be easily obtained. SOLUTION: An electron beam transmitting through an object 5 to be analyzed in this scanning transmission electron microscope enters the element mapping device. The transmitted electron beam is subjected to energy spectral analysis by a spectroscope 11 to obtain an electron energy loss spectrum. Window information used for the accelerating voltage data of each element and a two window method is prepared in advance in a data base 24, and even if the element to be analyzed is changed, a two dimensional element distribution image is immediately confirmed. Since all of the electron beam entering the spectroscope pass through an object point 10, an aberration distortion can be made small, and energy stability becomes excellent. Therefore, the drift of the energy loss spectrum lessens, and a precise element distribution can be obtained. COPYRIGHT: (C)2004,JPO&NCIPI

37. 发明专利

JP2002048735A THIN FILM LAYERED BODY STRUCTURE ANALYZING METHOD 失效
公开(公告)号：JP2002048735A
公开(公告)日：2002-02-15
申请号：JP2000244002
申请日：2000-08-07
申请人： HITACHI LTD
发明人： UEDA KAZUHIRO , USAMI KATSUHISA
IPC分类号： G01N23/201
摘要： PROBLEM TO BE SOLVED: To provide a layered structure inspection method for easily analyzing a layered structure in a layered body formed of two or more thin films layered on a base board in spite of increase in the number of layers and easily correcting an incident angle and to provide a method for finding reliability of an analysis value obtained by least square method analysis. SOLUTION: This method is accomplished by carrying out the least squares analysis while fixing the difference of a refractive index between a target layer film and another layer film. From a reflection factor obtained from the analysis value and the analysis value, a depth distribution of the refractive index is found, and a criterion R factor is found from the reflection factor calculated from the refractive index depth distribution so as to be used as a reliability reference of the analysis result.

38. 发明专利

JP2001312988A MULTISTAGE AND MULTIPLEX MAGNETIC POLE LENS SYSTEM, AND ELECTRON ENERGY ANALYZER USING THE SAME 失效
公开(公告)号：JP2001312988A
公开(公告)日：2001-11-09
申请号：JP2000131745
申请日：2000-04-28
申请人： HITACHI LTD , RIKAGAKU KENKYUSHO
发明人： TAYA TOSHIMICHI , UEDA KAZUHIRO , ISAGOZAWA SHIGETO , IWAKI MASAYA , SHINNO TOSHIKI
IPC分类号： H01J37/14 , H01J49/44
摘要： PROBLEM TO BE SOLVED: To provide a multistage and multiplex magnetic pole lens system, used in an energy analyzer for an electron microscope and an electron energy analyzer using the same, for simplifying the alignment of the center axes of a plurality of axially symmetrical lens systems to the track of a beam, as much as possible. SOLUTION: The multistage and multiplex magnetic pole lens system and the electronic energy analyzer, using the same each, is equipped with a mechanism for making magnetic passage for linearly arrayed multiplex magnetic poles in common, improving machining and assembling precision, and aligning the linear center axes of the lens systems with the axis of a beam.

39. 发明专利

JPH11304728A X-RAY MEASURING DEVICE 失效
公开(公告)号：JPH11304728A
公开(公告)日：1999-11-05
申请号：JP11302798
申请日：1998-04-23
申请人： HITACHI LTD
发明人： HIRANO TATSUMI , USAMI KATSUHISA , UEDA KAZUHIRO
IPC分类号： G01N23/20 , G01N23/207 , G21K1/06 , G21K5/08 , H01J35/08
摘要： PROBLEM TO BE SOLVED: To achieve an advanced lamination structure evaluation by forming at least two types of elements at different positions on a target separately so that the intensity distribution of at least two types of characteristic X rays being generated from a target overlap or do not overlap. SOLUTION: After X rays with at least two types of wavelengths from an X ray source 1 are formed by slits 2 and 4 and at the same time are dispersed by a spectroscope, they are applied to a sample 6. Reflection X rays from the sample 6 are formed by slits 7 and 9 and a solar slit 8 and are made parallel, they are measured by a detector 10. The spectroscope consists of two channel-cut-type spectral elements 3a and 3b of Ge (111). When the spectral elements 3a is set to a Y-axis setting value, the spectral element 3b is retracted from a light path. On the other hand, when the spectral element 3b is set to a Yaxis setting value, the spectral element 3a is retracted from the light path, thus allowing the incidence angle and the incidence position of spectral X rays to a sample to coincide at each wavelength.

40. 发明专利

JPH1130511A INSPECTION APPARATUS FOR SURFACE SHAPE 失效
公开(公告)号：JPH1130511A
公开(公告)日：1999-02-02
申请号：JP18500797
申请日：1997-07-10
申请人： HITACHI LTD
发明人： UEDA KAZUHIRO , HIRANO TATSUMI
IPC分类号： G01B15/00 , G01B15/04 , G01B15/08
摘要： PROBLEM TO BE SOLVED: To make the in-plane distribution of the surface shape of a sample acqurable in a short time and with high accuracy, by hinding data on the dependence of a radiating angle from the sample on the intensity of X-rays scattered from the sample on the basis of a detected intensity distribution. SOLUTION: One X-ray-intensity-distribution recording medium 16 is moved in the up-and-down direction with reference to a slit 17, the medium 16 is divided into a plurality of regions 131 to 139, and the dependence of the outgoing angle α of scattered X-rays 7 from a plurality of measuring points 121 to 129 can be recorded on one X-ray-intensity-distribution recording medium 16. After that, a light sensing operation by the scattered X-rays from all the measuring points 121 to 129 is performed, and the whole face of the X-ray-intensity- distribution recording medium 16 is read out at a time. Thereby, although the plurality of measuring points are measured, only one readout operation is sufficient, and the measuring time can be shortened sharply. Since the time can be shortened, it does not take much time to measure the plurality of measuring points on a sample as compared with conventional cases, and the in-plane distribution of information on the roughness of a surface on the sample can be obtained.

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